Micromechanical sensor and method for manufacturing a micromechanical sensor
First Claim
1. A micromechanical sensor, comprising:
- a substrate having a main extension plane;
a mass element movable relative to the substrate; and
a spring structure via which the mass element is coupled to the substrate, wherein;
the spring structure includes a first spring element and a second spring element,the first and second spring elements extend essentially in parallel to each other in sections,the spring structure includes a first compensation element and a second compensation element for quadrature compensation,the first compensation element is connected to the first spring element,the second compensation element is connected to the second spring element,the first spring element has a first spring structure width extending along a transverse direction,the second spring element has a second spring structure width extending along the transverse direction,the first compensation element in a first subarea extends in parallel to the transverse direction along a first width taken along the transverse direction,the first spring structure width and the first width are different,the second compensation element in a second subarea extends in parallel to the transverse direction along a second width taken along the transverse direction,the second spring structure width and the second width are different,the first spring element includes a first trench flank that extends along a first longitudinal direction,the first width of the first compensating element is adapted to a first trench angle formed between a normal direction perpendicular to the substrate and the longitudinal direction along which the first trench flank extends,the second spring element includes a second trench flank that extends along a second longitudinal direction, andthe second width of the first compensating element is adapted to a second trench angle formed between the normal direction and the second longitudinal direction along which the second trench flank extends.
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Accused Products
Abstract
A micromechanical sensor is provided as including a substrate having a main extension plane and a mass element movable relative to the substrate, the movable mass element being coupled to the substrate via a spring structure, the spring structure including a first and a second spring element, the first and second spring elements extending essentially in parallel to each other in sections and being coupled to each other in sections, the spring structure including a first and a second compensation element for quadrature compensation, the first compensation element being connected to the first spring element, the second compensation element being connected to the second spring element, the first spring element having a first spring structure width extending along a transverse direction, the second spring element having a second spring structure width extending along the transverse direction, the first compensation element in a first subarea extending in parallel to the transverse direction along a first width, the first spring structure width and the first width being different, the second compensation element in a second subarea extending in parallel to the transverse direction along a second width, the second spring structure width and the second width being different.
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Citations
12 Claims
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1. A micromechanical sensor, comprising:
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a substrate having a main extension plane; a mass element movable relative to the substrate; and a spring structure via which the mass element is coupled to the substrate, wherein; the spring structure includes a first spring element and a second spring element, the first and second spring elements extend essentially in parallel to each other in sections, the spring structure includes a first compensation element and a second compensation element for quadrature compensation, the first compensation element is connected to the first spring element, the second compensation element is connected to the second spring element, the first spring element has a first spring structure width extending along a transverse direction, the second spring element has a second spring structure width extending along the transverse direction, the first compensation element in a first subarea extends in parallel to the transverse direction along a first width taken along the transverse direction, the first spring structure width and the first width are different, the second compensation element in a second subarea extends in parallel to the transverse direction along a second width taken along the transverse direction, the second spring structure width and the second width are different, the first spring element includes a first trench flank that extends along a first longitudinal direction, the first width of the first compensating element is adapted to a first trench angle formed between a normal direction perpendicular to the substrate and the longitudinal direction along which the first trench flank extends, the second spring element includes a second trench flank that extends along a second longitudinal direction, and the second width of the first compensating element is adapted to a second trench angle formed between the normal direction and the second longitudinal direction along which the second trench flank extends. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification