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Micromechanical sensor and method for manufacturing a micromechanical sensor

  • US 10,001,374 B2
  • Filed: 07/31/2015
  • Issued: 06/19/2018
  • Est. Priority Date: 07/31/2014
  • Status: Active Grant
First Claim
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1. A micromechanical sensor, comprising:

  • a substrate having a main extension plane;

    a mass element movable relative to the substrate; and

    a spring structure via which the mass element is coupled to the substrate, wherein;

    the spring structure includes a first spring element and a second spring element,the first and second spring elements extend essentially in parallel to each other in sections,the spring structure includes a first compensation element and a second compensation element for quadrature compensation,the first compensation element is connected to the first spring element,the second compensation element is connected to the second spring element,the first spring element has a first spring structure width extending along a transverse direction,the second spring element has a second spring structure width extending along the transverse direction,the first compensation element in a first subarea extends in parallel to the transverse direction along a first width taken along the transverse direction,the first spring structure width and the first width are different,the second compensation element in a second subarea extends in parallel to the transverse direction along a second width taken along the transverse direction,the second spring structure width and the second width are different,the first spring element includes a first trench flank that extends along a first longitudinal direction,the first width of the first compensating element is adapted to a first trench angle formed between a normal direction perpendicular to the substrate and the longitudinal direction along which the first trench flank extends,the second spring element includes a second trench flank that extends along a second longitudinal direction, andthe second width of the first compensating element is adapted to a second trench angle formed between the normal direction and the second longitudinal direction along which the second trench flank extends.

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