Housing for an infrared radiation micro device and method for fabricating such housing

• US 10,002,896 B2
• Filed: 06/21/2010
• Issued: 06/19/2018
• Est. Priority Date: 06/19/2009
• Status: Active Grant

• Current Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V., ULIS SAS (Thales SA)
• Original Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V., ULIS SAS (Thales SA)
• Inventors: Reinert, Wolfgang, Quenzer, Jochen, Tinnes, Sebastien, Roman, Ccile
• Primary Examiner(s): Nadav, Ori
• Assistant Examiner(s): Allen, III, Ernest
• Application Number:
  US13/379,263
• Publication Number:
  US 20120097415A1
• Time in Patent Office: 2,920 Days
• Field of Search: 257227, 2573381, 257749, 257E27118, 257E27122, 257E31054, 257E31093
• CPC Class Codes: G01J 5/045 Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements getter arrangements per se H01L23/26 and H01L21/3221
• CPC Class Codes: G01J 5/0875 Windows; Arrangements for fastening thereof
• CPC Class Codes: H01L 2224/16 of an individual bump connector
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 27/14649 Infrared imagers
• CPC Class Codes: H01L 27/14683 Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof not peculiar thereto H01L21/00
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/01057 Lanthanum [La]
• CPC Class Codes: H01L 2924/01077 Iridium [Ir]
• CPC Class Codes: H01L 2924/01078 Platinum [Pt]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/01322 Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
• CPC Class Codes: H01L 2924/01327 Intermediate phases, i.e. intermetallics compounds
• CPC Class Codes: H01L 2924/10157 at the active surface
• CPC Class Codes: H01L 2924/10158 at the passive surface
• CPC Class Codes: H01L 2924/1461 MEMS

Abstract

Infrared radiation micro device, cover for such a device and method for its fabrication, the device comprising a substrate and a cover and an infrared radiation detecting, emitting or reflecting infrared micro unit, the infrared micro unit being arranged in a cavity defined between the substrate and the cover, the cover comprising an antireflective surface texture to enhance the transmissibility of infrared radiation, wherein a distance frame formed in an additive process on the substrate side of the cover and/or the cover side of the substrate is arranged between substrate and cover.

Claims

1. A method of housing an infrared radiation micro unit the method having the following steps:

providing a housing comprising a cover, a substrate, and a silicon distance frame, wherein the substrate is part of a substrate wafer and the cover is part of a cover wafer;

masking the cover with a pattern configured to form an area with a surface texture, the surface texture provided to reduce an effective refractive index of the cover;

etching the cover as patterned and creating the area with the surface texture comprising one of elevations and depressions that reduce the effective refractive index of the cover within the area;

providing the silicon distance frame on a substrate side of the cover, wherein the silicon distance frame is provided by;

depositing an unstructured TEOS layer on the cover comprising the surface texture, thus also covering the area of reduced effective refractive index with the unstructured TEOS layer;

depositing by a CVD a silicon layer on the unstructured TEOS Layer;

masking the CVD deposited silicon layer with a pattern that defines the silicon distance frame;

etching the CVD deposited silicon layer to provide the silicon distance frame;

removing the unstructured TEOS layer from the cover, outside the silicon distance frame, to expose the surface texture having the reduced effective refractive index;

bonding of substrate and cover with the silicon distance frame being intermediate, whereby substrate, cover and distance frame form a cavity, housing the infrared radiation micro unit to provide an infrared radiation micro device on a wafer level; and

wherein the cover wafer is diced and the substrate wafer is not diced, exposing the undiced substrate wafer with the diced cover wafer for electrical device characterization to a test gas atmosphere, measuring a vacuum level, thereby identifying leaking infrared radiation micro device on the undiced substrate wafer for a later rejection.

2. The method according to claim 1, further comprising applying a getter material on the cover or the substrate.

3. The method according to claim 2, wherein getter material is applied by an argon free evaporation process.

4. The method according to claim 1, further comprising applying a seal frame metallization on the silicon distance frame by gold and tin electroplating.

5. The method according to claim 1, further comprising depositing several layers of Ge—

ZnS on the cover, each Ge—

ZnS-layer having a different layer thickness for eliminating several wavelengths of an incident infrared radiation.

6. The method according to claim 5, wherein the several layers are deposited on the substrate far side of the cover and being a Ge—

ZnS-multilayer system.

7. The method according to claim 1, further comprising bonding of substrates and covers with intermediate silicon distance frames, whereby each group of substrate, cover and silicon distance frame forms its own cavity, housing an individual infrared radiation micro unit.

8. The method according to claim 1, wherein as the cover wafer is diced electrical contact pads are exposed.

9. The method according to claim 1, wherein the substrate wafer is diced to singulate tested infrared radiation micro devices.

10. The method according to claim 1, wherein the vacuum level is measured by detecting thermal insulation properties of the housed infrared micro units.