Semiconductor device

• US 10,002,949 B2
• Filed: 09/18/2014
• Issued: 06/19/2018
• Est. Priority Date: 11/06/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Hiraishi, Suzunosuke, Akimoto, Kengo, Sakata, Junichiro
• Primary Examiner(s): Gumedzoe, Peniel M
• Assistant Examiner(s): JOHNSON, CHRISTOPHER A
• Application Number:
  US14/489,522
• Publication Number:
  US 20150093853A1
• Time in Patent Office: 1,370 Days
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/02178 the material containing aluminium, e.g. Al2O3
• CPC Class Codes: H01L 21/02565 Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
• CPC Class Codes: H01L 21/02631 Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

An object is, in a thin film transistor including an oxide semiconductor layer, to reduce contact resistance between the oxide semiconductor layer and source and drain electrode layers electrically connected to the oxide semiconductor layer. The source and drain electrode layers have a stacked-layer structure of two or more layers in which a layer in contact with the oxide semiconductor layer is formed using a metal whose work function is lower than the work function of the oxide semiconductor layer or an alloy containing such a metal. Layers other than the layer in contact with the oxide semiconductor layer of the source and drain electrode layers are formed using an element selected from Al, Cr, Cu, Ta, Ti, Mo, or W, an alloy containing any of these elements as a component, an alloy containing any of these elements in combination, or the like.

Claims

1. A method of manufacturing a semiconductor device comprising:

forming a gate electrode over a substrate;

forming a gate insulating layer over the gate electrode;

forming an oxide semiconductor layer over the gate insulating layer by sputtering in a chamber, wherein the oxide semiconductor layer is non-single-crystal;

performing a preheat treatment at 200 to 600°

C. to remove moisture or hydrogen remaining on an inner wall of the chamber before forming the oxide semiconductor layer;

cooling an oxide semiconductor target using non water based coolant; and

removing moisture from an inside of the chamber by using a cryopump at least during the forming of the oxide semiconductor layer,

wherein the substrate is heated during forming the oxide semiconductor layer.

2. The method according to claim 1, wherein the oxide semiconductor layer is intrinsic or substantially intrinsic.

3. The method according to claim 1, wherein the substrate is heated during the forming of the oxide semiconductor layer at a temperature of 400°

C. to 700°

C.

4. The method according to claim 1, wherein the oxide semiconductor layer comprises a material selected from the group consisting of an In—

Ga—

Zn—

O-based material, an In—

Sn—

Zn—

O-based oxide semiconductor material, an In—

Al—

Zn—

O-based oxide semiconductor material, an In—

Zn—

O-based oxide semiconductor material, an In—

Sn—

O-based oxide semiconductor material, and an In—

O-based oxide semiconductor material.

5. The method according to claim 1, further comprising steps of:

processing the oxide semiconductor layer into an island-shaped oxide semiconductor layer which includes a region to become a channel formation region; and

forming a conductive layer on and in contact with the oxide semiconductor layer, wherein the conductive layer comprises a metal whose work function is lower than a work function of the oxide semiconductor layer.

6. A method of manufacturing a semiconductor device comprising:

forming a gate electrode over a substrate;

forming a gate insulating layer over the gate electrode;

forming an oxide semiconductor layer over the gate insulating layer by sputtering in a chamber, wherein the oxide semiconductor layer is non-single-crystal;

performing a preheat treatment at 200 to 600°

C. to remove moisture or hydrogen remaining on an inner wall of the chamber before forming the oxide semiconductor layer;

cooling an oxide semiconductor target using non water based coolant;

removing moisture from an inside of the chamber by using a cryopump at least during forming the oxide semiconductor layer;

processing the oxide semiconductor layer into an island-shaped oxide semiconductor layer which includes a region to become a channel formation region; and

heating the island-shaped oxide semiconductor layer at a temperature of 350°

C. to 750°

C.

7. The method according to claim 6, wherein the island-shaped oxide semiconductor layer is heated in an inert gas.

8. The method according to claim 6, wherein the island-shaped oxide semiconductor layer is heated in a nitrogen atmosphere.

9. The method according to claim 6, wherein the oxide semiconductor layer is intrinsic or substantially intrinsic.

10. The method according to claim 6, wherein the substrate is heated during the forming of the oxide semiconductor layer at a temperature of 400°

C. to 700°

C.

11. The method according to claim 6, wherein the oxide semiconductor layer comprises a material selected from the group consisting of an In—

Ga—

Zn—

O-based material, an In—

Sn—

Zn—

O-based oxide semiconductor material, an In—

Al—

Zn—

O-based oxide semiconductor material, an In—

Zn—

O-based oxide semiconductor material, an In—

Sn—

O-based oxide semiconductor material, and an In—

O-based oxide semiconductor material.

12. The method according to claim 6, further comprising step of:

forming a conductive layer on and in contact with the oxide semiconductor layer, wherein the conductive layer comprises a metal whose work function is lower than a work function of the oxide semiconductor layer.

13. A method of manufacturing a semiconductor device comprising:

forming a gate electrode over a substrate;

forming a gate insulating layer over the gate electrode;

forming an oxide semiconductor layer over the gate insulating layer by sputtering in a chamber, wherein the oxide semiconductor layer is non-single-crystal;

performing a preheat treatment at 200 to 600°

C. to remove moisture or hydrogen remaining on an inner wall of the chamber before forming the oxide semiconductor layer;

removing moisture from an inside of the chamber by using a cryopump at least during forming the oxide semiconductor layer;

processing the oxide semiconductor layer into an island-shaped oxide semiconductor layer which includes a region to become a channel formation region;

performing a first heat treatment at a temperature of 350°

C. to 750°

C. after forming the island-shaped oxide semiconductor layer;

forming an insulating layer over the oxide semiconductor layer after performing the first heat treatment; and

performing a second heat treatment at a temperature of 100°

C. to 400°

C. after forming the insulating layer.

14. The method according to claim 13, wherein the first heat treatment is performed in an inert gas.

15. The method according to claim 13, wherein the oxide semiconductor layer is intrinsic or substantially intrinsic.

16. The method according to claim 13, wherein the substrate is heated during the forming of the oxide semiconductor layer at a temperature of 400°

C. to 700°

C.

17. The method according to claim 13, wherein the oxide semiconductor layer comprises a material selected from the group consisting of an In—

Ga—

Zn—

O-based material, an In—

Sn—

Zn—

O-based oxide semiconductor material, an In—

Al—

Zn—

O-based oxide semiconductor material, an In—

Zn—

O-based oxide semiconductor material, an In—

Sn—

O-based oxide semiconductor material, and an In—

O-based oxide semiconductor material.

18. The method according to claim 13, further comprising step of:

forming a conductive layer on and in contact with the oxide semiconductor layer, wherein the conductive layer comprises a metal whose work function is lower than a work function of the oxide semiconductor layer.

19. The method according to claim 13, wherein the insulating layer comprises silicon oxide.

20. The method according to claim 13, wherein the insulating layer comprises aluminum oxide.