Magnetic tunnel junction with an improved tunnel barrier

• US 10,002,973 B2
• Filed: 09/05/2012
• Issued: 06/19/2018
• Est. Priority Date: 09/09/2011
• Status: Active Grant

• Current Assignee: Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Original Assignee: Crocus Technology S.A. (Sanken Electric Company Limited)
• Inventors: Prejbeanu, Ioan Lucian, Portemont, Celine, Ducruet, Clarisse
• Primary Examiner(s): Malsawma, Lex
• Assistant Examiner(s): IDA, GEOFFREY H
• Application Number:
  US13/604,035
• Publication Number:
  US 20130234266A1
• Time in Patent Office: 2,113 Days
• Field of Search: 257427, 438 3
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01R 33/098 comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
• CPC Class Codes: G11C 11/16 using elements in which the storage effect is based on magnetic spin effect
• CPC Class Codes: G11C 11/161 details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
• CPC Class Codes: G11C 11/1675 Writing or programming circuits or methods
• CPC Class Codes: H01F 41/307 insulating or semiconductive spacer
• CPC Class Codes: H01L 21/02104 Forming layers deposition in general C23C; crystal growth in general C30B
• CPC Class Codes: H01L 29/82 controllable by variation of the magnetic field applied to the device
• CPC Class Codes: H10N 50/01 Manufacture or treatment
• CPC Class Codes: H10N 50/10 Magnetoresistive devices

Abstract

The present disclosure concerns a method of fabricating a magnetic tunnel junction suitable for a magnetic random access memory (MRAM) cell and comprising a first ferromagnetic layer, a tunnel barrier layer, and a second ferromagnetic layer, comprising: forming the first ferromagnetic layer; forming the tunnel barrier layer; and forming the second ferromagnetic layer; wherein said forming the tunnel barrier layer comprises depositing a layer of metallic Mg; and oxidizing the deposited layer of metallic Mg such as to transform the metallic Mg into MgO; the step of forming the tunnel barrier layer being performed at least twice such that the tunnel barrier layer comprises at least two layers of MgO.

Claims

1. Method of fabricating a magnetic tunnel junction suitable for a magnetic random access memory (MRAM) cell and comprising a first ferromagnetic layer, a tunnel barrier layer, and a second ferromagnetic layer, comprising:

forming the first ferromagnetic layer comprising elements from the group consisting of cobalt CO, iron Fe, boron B, and nickel Ni;

depositing a first additional CoFe layer after forming the first ferromagnetic layer;

forming the tunnel barrier layer;

depositing a second additional CoFe layer prior to forming the second ferromagnetic layer; and

forming the second ferromagnetic layer comprising elements from the group consisting of cobalt Co, iron Fe, boron B, and nickel Ni,

such that the magnetic tunnel junction comprises the first additional CoFe layer between the first ferromagnetic layer and the tunnel barrier layer and the second additional CoFe layer between the tunnel barrier layer and the second ferromagnetic layer;

said forming the tunnel barrier layer comprising the steps of;

depositing a first layer of metallic Mg,

subsequent to the deposition of the first layer of metallic Mg, oxidizing the deposited first layer of metallic Mg such as to transform the first layer of metallic Mg into a first layer of MgO,

subsequent to transforming the first layer into MgO, depositing a second layer of metallic Mg on the first layer of MgO, and

subsequent to depositing the second layer of metallic Mg, oxidizing the deposited second layer of metallic Mg such as to transform the second layer of metallic Mg into a second layer of MgO;

whereby the steps of forming MgO layers are performed more than twice such that the tunnel barrier layer comprises more than two layers of MgO so as to reduce the probability of the barrier layer comprising pinholes which are aligned through all the MgO layers, wherein

the steps of depositing the layer of metallic Mg further comprises using an inert gas such as to level the deposited layer of metallic Mg, the deposited layer of metallic Mg is between 0.3 nm and 1.2 nm.

2. The method according to claim 1, wherein the thickness of the deposited layer of metallic Mg is comprised between 0 nm and 1.5 nm and preferably between 0.3 nm and 1.2 nm.

3. The method according to claim 1, further comprising depositing an additional layer of metallic Mg prior and after forming the tunnel barrier layer.

4. The method of claim 1, wherein said Mg layer does not contain oxygen while being deposited using the inert gas.

5. The method of claim 4, where oxygen is introduced for performing said oxidation only after the layer of Mg is deposited.

6. The method of claim 1, where oxygen is introduced for performing said oxidation only after the layer of Mg is deposited.

8. The method according to claim 5, wherein the thickness of the deposited layer of metallic Mg is comprised between 0 nm and 1.5 nm and preferably between 0.3 nm and 1.2 nm.

9. The method according to claim 5, further comprising depositing a CoFe layer after said forming the first ferromagnetic layer and prior said forming the second ferromagnetic layer.

10. The method according to claim 5, further comprising depositing an additional layer of metallic Mg prior and after forming the tunnel barrier layer.

7. Method of fabricating a magnetic tunnel junction suitable for a magnetic random access memory (MRAM) cell and comprising a first ferromagnetic layer, a tunnel barrier layer, and a second ferromagnetic layer, comprising:

forming the first ferromagnetic layer comprising elements from the group consisting of cobalt Co, iron Fe, boron B and nickel Ni;

depositing a first additional CoFe layer after forming the first ferromagnetic layer;

forming the tunnel barrier layer by performing method including the steps of;

depositing a first layer of metallic Mg using an inert gas resulting in the layer of metallic Mg forming without oxygen doping,

subsequent to the deposition of the first layer of metallic Mg, introducing oxygen for oxidizing the deposited first layer of metallic Mg such as to transform the metallic Mg into MgO,

depositing a second layer of metallic Mg on the first layer of MgO, and

subsequent to depositing the second layer of metallic Mg, oxidizing the deposited second layer of metallic Mg such as to transform the second layer of metallic Mg into a second layer of MgO;

whereby the steps of forming MgO layers are performed at least twice such that the tunnel barrier layer comprises a plurality of layers of MgO so as to reduce the probability of the barrier layer comprising pinholes which are aligned through all the MgO layers;

depositing a second additional CoFe layer prior to forming the second ferromagnetic layer; and

forming the second ferromagnetic layer comprising elements from the group consisting of cobalt Co, iron Fe, boron B and nickel Ni,

such that the magnetic tunnel junction comprises the first additional CoFe layer between the first ferromagnetic layer and the tunnel barrier layer and the second additional CoFe layer between the tunnel barrier layer and the second ferromagnetic layer.

11. Method of fabricating a magnetic tunnel junction suitable for a magnetic random access memory (MRAM) cell and comprising a first ferromagnetic layer, a tunnel barrier layer, and a second ferromagnetic layer, comprising:

forming the first ferromagnetic layer comprising elements from the group consisting of cobalt Co, iron Fe, boron B and nickel Ni;

depositing a first additional CoFe layer after forming the first ferromagnetic layer;

forming the tunnel barrier layer;

depositing a second additional CoFe layer prior to forming the second ferromagnetic layer; and

forming the second ferromagnetic layer comprising elements from the group consisting of cobalt Co, iron Fe, boron B and nickel Ni,

such that the magnetic tunnel junction comprises the first additional CoFe layer between the first ferromagnetic layer and the tunnel barrier layer and the second additional CoFe layer between the tunnel barrier layer and the second ferromagnetic layer;

said forming the tunnel barrier layer comprising the steps of;

depositing a first layer of metallic Mg,

subsequent to the deposition of the first layer of metallic Mg, oxidizing the deposited first layer of metallic Mg such as to transform the first layer of metallic Mg into a first layer of MgO,

subsequent to transforming the first layer into MgO, depositing a second layer of metallic Mg on the first layer of MgO, and

subsequent to depositing the second layer of metallic Mg, oxidizing the deposited second layer of metallic Mg such as to transform the second layer of metallic Mg into a second layer of MgO;

whereby the steps of forming MgO layers are performed more than twice such that the tunnel barrier layer comprises more than two layers of MgO so as to reduce the probability of the barrier layer comprising pinholes which are aligned through all the MgO layers, wherein

depositing the layer of metallic Mg further comprises using an inert gas such as to level the deposited layer of metallic Mg.

12. Method of fabricating a magnetic tunnel junction suitable for a magnetic random access memory (MRAM) cell and comprising a first ferromagnetic layer, a tunnel barrier layer, and a second ferromagnetic layer, comprising:

forming the first ferromagnetic layer comprising elements from the group consisting of cobalt Co, iron Fe, boron B and nickel Ni;

depositing a first additional CoFe layer after forming the first ferromagnetic layer;

forming the tunnel barrier layer;

depositing a second additional CoFe layer prior to forming the second ferromagnetic layer; and

forming the second ferromagnetic layer comprising elements from the group consisting of cobalt Co, iron Fe, boron B and nickel Ni,

such that the magnetic tunnel junction comprises the first additional CoFe layer between the first ferromagnetic layer and the tunnel barrier layer and the second additional CoFe layer between the tunnel barrier layer and the second ferromagnetic layer;

said forming the tunnel barrier layer comprising the steps of;

depositing a first layer of metallic Mg,

subsequent to the deposition of the first layer of metallic Mg, oxidizing the deposited first layer of metallic Mg such as to transform the first layer of metallic Mg into a first layer of MgO,

subsequent to transforming the first layer into MgO, depositing a second layer of metallic Mg on the first layer of MgO, and

subsequent to depositing the second layer of metallic Mg, oxidizing the deposited second layer of metallic Mg such as to transform the second layer of metallic Mg into a second layer of MgO;

whereby the steps of forming MgO layers are performed more than twice such that the tunnel barrier layer comprises more than two layers of MgO so as to reduce the probability of the barrier layer comprising pinholes which are aligned through all the MgO layers, wherein

depositing the layer of metallic Mg further comprises using an inert gas such as to level the deposited layer of metallic Mg, and wherein

the thickness of each one of the Mg layers is between 0.3 nm and 1.2 nm.