Linearly deployed actuators

• US 10,003,282 B2
• Filed: 10/19/2015
• Issued: 06/19/2018
• Est. Priority Date: 11/15/2010
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C.
• Primary Examiner(s): MULLINS, BURTON S
• Application Number:
  US14/887,054
• Publication Number:
  US 20160043665A1
• Time in Patent Office: 974 Days
• Field of Search: 310309, 3592241, 359290-291, 359876, 735049, 438 52, 257415
• CPC Class Codes: B81B 3/0035 Constitution or structural means for controlling the movement of the flexible or deformable elements
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 7/102 controlled by a microcomputer cameras with interchangeable lenses G03B17/14
• CPC Class Codes: G03B 2205/0084 using other types of actuators
• CPC Class Codes: G03B 3/00 Focusing arrangements of general interest for cameras, projectors or printers
• CPC Class Codes: H02K 41/02 Linear motors; Sectional motors
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H02N 11/006 Motors
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/49863 with prestressing of part
• CPC Class Codes: Y10T 74/18072 Reciprocating carriage motions

Abstract

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Claims

1. An actuator device, comprising:

a fixed frame;

a movable frame configured to rotate about a pivot axis relative to the fixed frame; and

interlocking flaps disposed at the pivot axis between the fixed frame and the movable frame and configured to restrict the movable frame from moving out of plane relative to the fixed frame at the pivot axis, wherein the interlocking flaps comprise a first flap extending from the fixed frame across the pivot axis and over a shoulder portion formed on the movable frame and a second flap extending from the movable frame across the pivot axis and over a shoulder portion formed on the fixed frame.

2. The actuator device of claim 1, wherein the interlocking flaps are disposed over a gap formed between the fixed frame and the movable frame.

3. The actuator device of claim 2, wherein portions of the gap are offset from the pivot axis.

4. The actuator device of claim 1, wherein the first flap and the second flap are configured to interact with the shoulder portions of the fixed frame and the movable frame to prevent the movable frame from moving out of plane relative to the fixed frame at the pivot axis.

5. The actuator device of claim 1, further comprising a snubber flap disposed at the pivot axis and configured to restrict a lateral movement of the movable frame relative to the fixed frame.

6. The actuator device of claim 1, further comprising a flap damper disposed at the pivot axis and configured to provide damping between the movable frame and the fixed frame.

7. The actuator device of claim 1, wherein each of the first and the second flaps have corners at respective front ends comprising a front surface, and wherein one or more corners of the front surface is elliptically shaped.

8. A portable device having a camera comprising the actuator device of claim 1.

9. A method for operating an actuator device, the method comprising:

rotating a movable frame of the actuator device about a pivot axis relative to a fixed frame of the actuator device; and

restricting the movable frame from moving out of plane relative to the fixed frame at the pivot axis by interlocking flaps disposed at the pivot axis between the fixed frame and the movable frame, the interlocking flaps comprise a first flap extending from the fixed frame across the pivot axis and over a shoulder portion formed on the movable frame and a second flap extending from the movable frame across the pivot axis and over a shoulder portion formed on the fixed frame.

10. The method of claim 9, wherein the movable frame is rotated by an electrostatic force generated between the movable frame and the fixed frame.

11. The method of claim 9, further comprising restricting, by a snubber flap disposed at the pivot axis, a lateral movement of the movable frame relative to the fixed frame.

12. The method of claim 9, further comprising providing damping between the fixed frame and the movable frame by a flap damper disposed at the pivot axis.

13. The method of claim 9, further comprising moving an optical element by actuation of the actuator device in a camera for one or more of a focusing operation, a zooming operation, an optical image stabilization operation in the camera.

14. A method of making interlocking flaps of an actuator device, the method comprising:

forming a trench in a substrate;

forming an oxide layer on an upper surface of the substrate and inner walls of the trench;

forming a polysilicon layer on the oxide layer;

removing a bottom portion of the substrate to extend the trench through the substrate to form a gap separating a fixed frame from a movable frame of the actuator device; and

etching selected areas of an oxide liner formed by the oxide layer and the polysilicon layer to form the interlocking flaps, the interlocking flaps comprising a first flap extending across the gap and over a shoulder portion of the movable frame of the actuator and a second flap extending across the gap and over a shoulder portion of the fixed frame of the actuator device.

15. The method of claim 14, wherein portions of the gap are offset from a pivot axis.

16. The method of claim 14, wherein the first flap and the second flap are configured to interact with the shoulder portions of the fixed frame and the movable frame to prevent the movable frame from moving out of plane relative to the fixed frame at the pivot axis.

17. The method of claim 14, further comprising forming a snubber flap at the pivot axis, the snubber flap configured to restrict a lateral movement of the movable frame relative to the fixed frame.

18. The method of claim 14, further comprising forming a flap damper at the pivot axis, the flap damper configured to provide damping between the movable frame and the fixed frame.

19. The method of claim 14, wherein one or more of the first and the second flaps are formed from the polysilicon layer.