Transducer with piezoelectric, conductive and dielectric membrane
First Claim
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1. An apparatus, comprising:
- a substrate;
a deformable membrane; and
a cavity disposed between the substrate and the deformable membrane such that the deformable membrane spans the cavity,the deformable membrane including a first piezoelectric layer between first and second metal layers, and a dielectric layer, wherein the dielectric layer is capable of deforming on application of a drive voltage across the first piezoelectric layer to thereby generate an ultrasonic wave, wherein the cavity is a sealed cavity that is enclosed on all sides, and wherein the dielectric layer is directly engaged with the substrate.
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Abstract
This disclosure provides systems, methods and apparatus for microspeaker devices. In one aspect, a microspeaker element may include a deformable dielectric membrane that spans a speaker cavity. The deformable dielectric membrane can include a piezoactuator and a dielectric layer. Upon application of a driving signal to the piezoactuator, the dielectric layer can deflect, producing sound. In some implementations, an array of microspeaker elements can be encapsulated between a glass substrate and a cover glass. Sound generated by the microspeaker elements can be emitted through a speaker grill formed in the cover glass.
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Citations
20 Claims
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1. An apparatus, comprising:
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a substrate; a deformable membrane; and a cavity disposed between the substrate and the deformable membrane such that the deformable membrane spans the cavity, the deformable membrane including a first piezoelectric layer between first and second metal layers, and a dielectric layer, wherein the dielectric layer is capable of deforming on application of a drive voltage across the first piezoelectric layer to thereby generate an ultrasonic wave, wherein the cavity is a sealed cavity that is enclosed on all sides, and wherein the dielectric layer is directly engaged with the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An apparatus, comprising:
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a substrate; a deformable membrane; and a cavity disposed between the substrate and the deformable membrane such that the deformable membrane spans the cavity, the deformable membrane including a first piezoelectric layer between first and second metal layers, and a dielectric layer, wherein the dielectric layer is capable of deforming on application of a drive voltage across the first piezoelectric layer to thereby generate an ultrasonic wave, wherein the cavity is a sealed cavity that is enclosed on all sides, and wherein the dielectric layer extends over the entire area of the cavity. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification