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Microdischarge-based transducer

  • US 10,006,823 B2
  • Filed: 06/20/2014
  • Issued: 06/26/2018
  • Est. Priority Date: 06/20/2013
  • Status: Active Grant
First Claim
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1. A sensor, comprising:

  • a sensor body;

    a diaphragm supported in spaced apart relation to the sensor body and facing the sensor body across a gap; and

    a plurality of electrodes, each of which is attached to the sensor body or to the diaphragm at the gap and arranged such that, when the diaphragm deflects relative to the sensor body, the distance between a first pair of the electrodes changes, and the distance between a second pair of the electrodes does not change, wherein the first pair of electrodes includes a cathode on the sensor body and a sensing anode on the diaphragm, and the second pair of electrodes includes the cathode and a reference anode on the sensor body.

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