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Multi-protocol multi-client equipment server

  • US 10,007,256 B2
  • Filed: 01/24/2015
  • Issued: 06/26/2018
  • Est. Priority Date: 02/01/2000
  • Status: Expired due to Fees
First Claim
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1. A computer-implemented system, comprising:

  • a manufacturing execution system (MES) that runs on a host and that manages automated jobs related to manufacture of semiconductor chips;

    an equipment server that maintains a Common Equipment Model (CEM) for each of a plurality of semiconductor manufacturing tools, the CEM representing a logical structure and behavioral characteristics of a semiconductor manufacturing tool, wherein the equipment server interfaces with the MES and with a plurality of clients that include a client running a web browser that displays e-diagnostics based on at least one CEM, wherein an interface with the MES includes a Semi Equipment Communications Standard (SECS) interface and wherein an interface with at least one of the clients includes a distributed object interface that allows access to at least one CEM; and

    a plurality of semiconductor manufacturing tools running tool control software, wherein at least one of the semiconductor manufacturing tools interfaces with the equipment server using a point-to-point Semi Equipment Communications Standard/Generic Model for Communications and Control of Manufacturing Equipment (SECS/GEM) interface;

    wherein the equipment server is configured to allow messages exchanged between the MES and one of said plurality of semiconductor manufacturing tools to pass unmodified over a point-to-point SECS/GEM interface, while performing data collection to supply data to the CEM of the equipment server whereby SECS/GEM variables of the messages are mapped to objects in the CEM, the supplied data being concurrently accessible by multiple clients through the distributed object interface that allows access to the CEM.

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