Multi-protocol multi-client equipment server

• US 10,007,256 B2
• Filed: 01/24/2015
• Issued: 06/26/2018
• Est. Priority Date: 02/01/2000
• Status: Expired due to Fees

• Current Assignee: PEER Intellectual Property Incorporated
• Original Assignee: PEER Intellectual Property Incorporated
• Inventors: Baylis, Charles M., Ellis, Raymond W., Guckert, Toni, Yoas, Timothy
• Primary Examiner(s): Bengzon, Greg C
• Application Number:
  US14/604,720
• Publication Number:
  US 20150142162A1
• Time in Patent Office: 1,249 Days
• CPC Class Codes: G05B 19/042 using digital processors G05B19/05 takes precedence
• CPC Class Codes: G05B 19/418 Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
• CPC Class Codes: G05B 19/41855 by local area network [LAN], network structure
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: H04L 63/083 using passwords cryptographic mechanisms or cryptographic arrangements for entity authentication using a predetermined code H04L9/3226
• CPC Class Codes: H04L 67/02 based on web technology, e.g. hypertext transfer protocol [HTTP]
• CPC Class Codes: H04L 67/12 specially adapted for proprietary or special-purpose networking environments, e.g. medical networks, sensor networks, networks in vehicles or remote metering networks
• CPC Class Codes: H04L 69/18 Multiprotocol handlers, e.g. single devices capable of handling multiple protocols
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A multi-client multi-protocol equipment server includes: a host interface that facilitates communication with a manufacturing execution system (MES); a plurality of client interfaces, wherein each client interface facilitates communication with a client based on a Common Equipment Model (CEM) for a semiconductor manufacturing tool; and a plurality of tool interfaces, wherein each tool interface facilitates communication with a semiconductor manufacturing tool, wherein at least one of the interfaces is a Semi Equipment Communications Standard/Generic Model for Communications and Control of Manufacturing Equipment (SECS/GEM) interface that is configured in a single XML file that defines attributes of the CEM for the semiconductor manufacturing tool which uses the SECS/GEM interface, and wherein a computer executes the multi-client multi-protocol server.

Claims

1. A computer-implemented system, comprising:

a manufacturing execution system (MES) that runs on a host and that manages automated jobs related to manufacture of semiconductor chips;

an equipment server that maintains a Common Equipment Model (CEM) for each of a plurality of semiconductor manufacturing tools, the CEM representing a logical structure and behavioral characteristics of a semiconductor manufacturing tool, wherein the equipment server interfaces with the MES and with a plurality of clients that include a client running a web browser that displays e-diagnostics based on at least one CEM, wherein an interface with the MES includes a Semi Equipment Communications Standard (SECS) interface and wherein an interface with at least one of the clients includes a distributed object interface that allows access to at least one CEM; and

a plurality of semiconductor manufacturing tools running tool control software, wherein at least one of the semiconductor manufacturing tools interfaces with the equipment server using a point-to-point Semi Equipment Communications Standard/Generic Model for Communications and Control of Manufacturing Equipment (SECS/GEM) interface;

wherein the equipment server is configured to allow messages exchanged between the MES and one of said plurality of semiconductor manufacturing tools to pass unmodified over a point-to-point SECS/GEM interface, while performing data collection to supply data to the CEM of the equipment server whereby SECS/GEM variables of the messages are mapped to objects in the CEM, the supplied data being concurrently accessible by multiple clients through the distributed object interface that allows access to the CEM.

2. A system as in claim 1, wherein one of the clients is a tool performance application.

3. A system as in claim 1, wherein one of the clients is a custom spreadsheet application.

4. A system as in claim 1, wherein the distributed object interface is a DCOM interface.

5. A system as in claim 1, wherein the distributed object interface is a .NET interface.

6. A system as in claim 1, wherein the distributed object interface is a HTTP/SOAP interface.

7. A multi-client multi-protocol equipment server, comprising:

a host interface that facilitates communication with a manufacturing execution system (MES);

a plurality of client interfaces, wherein each client interface facilitates communication with a client based on a Common Equipment Model (CEM) for a semiconductor manufacturing tool, the CEM representing a logical structure and behavioral characteristics of the semiconductor manufacturing tool; and

a plurality of tool interfaces, wherein each tool interface facilitates communication with a semiconductor manufacturing tool, wherein at least one of the interfaces is a Semi Equipment Communications Standard/Generic Model for Communications and Control of Manufacturing Equipment (SECS/GEM) interface that is configured in a single XML file that defines attributes of the CEM for the semiconductor manufacturing tool which uses the SECS/GEM interface, and wherein a computer executes the multi-client multi-protocol server;

wherein the equipment server is configured to allow messages exchanged between the MES and one of said plurality of semiconductor manufacturing tools to pass unmodified over a point-to-point SECS/GEM interface, while performing data collection to supply data to the CEM of the equipment server whereby SECS/GEM variables of the messages are mapped to objects in the CEM, the supplied data being concurrently accessible by multiple clients through the distributed object interface that allows access to the CEM.

8. A system as in claim 7, wherein one of the clients is a tool performance application.

9. A system as in claim 7, wherein one of the clients is a custom spreadsheet application.

10. A system as in claim 7, wherein one of the clients is a web browser for viewing e-diagnostics.

11. A system as in claim 7, wherein the distributed object interface is a DCOM interface.

12. A system as in claim 7, wherein the distributed object interface is a .NET interface.

13. A system as in claim 7, wherein the distributed object interface is a HTTP/SOAP interface.