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Thermal flow meter

  • US 10,012,522 B2
  • Filed: 03/31/2017
  • Issued: 07/03/2018
  • Est. Priority Date: 12/07/2011
  • Status: Active Grant
First Claim
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1. A thermal-type flowmeter including a sensor element having an exothermic resistor formed on a diaphragm, a temperature detecting element, and a drive circuit electrically connected to the sensor element, comprising:

  • a chip package formed through encapsulation with a resin of the sensor element, the drive circuit, a metal lead frame adapted to have mounted thereon the sensor element and the drive circuit, and the temperature detecting element, wherein;

    the chip package has an exposed structure in which a surface of the sensor element having the diaphragm is exposed, andthe temperature detecting element is mounted on the lead frame via an electrically conductive member.

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