Thermal flow meter
First Claim
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1. A thermal-type flowmeter including a sensor element having an exothermic resistor formed on a diaphragm, a temperature detecting element, and a drive circuit electrically connected to the sensor element, comprising:
- a chip package formed through encapsulation with a resin of the sensor element, the drive circuit, a metal lead frame adapted to have mounted thereon the sensor element and the drive circuit, and the temperature detecting element, wherein;
the chip package has an exposed structure in which a surface of the sensor element having the diaphragm is exposed, andthe temperature detecting element is mounted on the lead frame via an electrically conductive member.
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Abstract
A thermal-type flowmeter includes a chip package. The chip package is formed through encapsulation with a resin of a sensor element, a drive circuit, a metal lead frame adapted to have mounted thereon the sensor element and the drive circuit, and a temperature detecting element. The chip package has an exposed structure in which a surface of the sensor element having the diaphragm is exposed. The temperature detecting element is mounted on the lead frame via an electrically conductive member.
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9 Claims
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1. A thermal-type flowmeter including a sensor element having an exothermic resistor formed on a diaphragm, a temperature detecting element, and a drive circuit electrically connected to the sensor element, comprising:
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a chip package formed through encapsulation with a resin of the sensor element, the drive circuit, a metal lead frame adapted to have mounted thereon the sensor element and the drive circuit, and the temperature detecting element, wherein; the chip package has an exposed structure in which a surface of the sensor element having the diaphragm is exposed, and the temperature detecting element is mounted on the lead frame via an electrically conductive member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification