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Micro-electro-mechanical systems (MEMS), apparatus, and operating methods thereof

  • US 10,014,870 B2
  • Filed: 01/06/2016
  • Issued: 07/03/2018
  • Est. Priority Date: 09/09/2009
  • Status: Active Grant
First Claim
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1. A method comprising:

  • converting a first electrical signal to a second electrical signal using a converter coupled between a micro-mechanical structure and an analog-to-digital converter (ADC), andactuating a switch to selectively interpolate at least one datum between two neighboring converted second electrical signals based on a selected clock signal,wherein the selected clock signal is one of a plurality of clock signals, each clock signal of the plurality of clock signals has a corresponding frequency, and the selected clock signal corresponds to an operating mode of the micro-mechanical structure.

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