Micro-electro-mechanical systems (MEMS), apparatus, and operating methods thereof
First Claim
Patent Images
1. A method comprising:
- converting a first electrical signal to a second electrical signal using a converter coupled between a micro-mechanical structure and an analog-to-digital converter (ADC), andactuating a switch to selectively interpolate at least one datum between two neighboring converted second electrical signals based on a selected clock signal,wherein the selected clock signal is one of a plurality of clock signals, each clock signal of the plurality of clock signals has a corresponding frequency, and the selected clock signal corresponds to an operating mode of the micro-mechanical structure.
1 Assignment
0 Petitions
Accused Products
Abstract
A method that comprises converting a first electrical signal to a second electrical signal using a converter coupled between a micro-mechanical structure and an analog-to-digital converter (ADC). The method also comprises actuating a switch to selectively interpolate at least one datum between two neighboring converted second electrical signals based on a selected clock signal, wherein the selected clock signal is one of a plurality of clock signals, each clock signals of the plurality of clock signals has a corresponding frequency, and the selected clock signal corresponds to an operating mode of the micro-mechanical structure.
-
Citations
20 Claims
-
1. A method comprising:
-
converting a first electrical signal to a second electrical signal using a converter coupled between a micro-mechanical structure and an analog-to-digital converter (ADC), and actuating a switch to selectively interpolate at least one datum between two neighboring converted second electrical signals based on a selected clock signal, wherein the selected clock signal is one of a plurality of clock signals, each clock signal of the plurality of clock signals has a corresponding frequency, and the selected clock signal corresponds to an operating mode of the micro-mechanical structure. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A micro-electro-mechanical system (MEMS) comprising:
-
a micro-mechanical structure capable of generating a first electrical signal; an analog-to-digital converter (ADC) coupled with the micro-mechanical structure to convert the first electrical signal to at least one digital signal, the ADC being configured to demodulate a high-pass signal; and a frequency divider coupled with the micro-mechanical structure and the ADC, wherein the MEMS is free of an amplifier between the micro-mechanical structure and the ADC. - View Dependent Claims (9, 10, 11, 12, 13, 14)
-
-
15. An apparatus comprising:
-
at least one processor coupled with a micro-electro-mechanical system (MEMS); and at least one memory including computer program code for one or more programs, the at least one memory and the computer program configured to, with the at least one processor, cause the MEMS to; convert analog signals to digital signals, wherein the analog signals are generated from a micro-mechanical structure; and selectively interpolate at least one datum between the two converted digital signals based on a clock signal selectable from a plurality of clock signals, the clock signals of the plurality of clock signals having clock signal frequencies that differ from one another. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification