MEMS pressure sensor and microphone devices having through-vias and methods of forming same
First Claim
1. A micro-electromechanical (MEMS) device comprising:
- a MEMS chip comprising;
a first conductive layer comprising a first membrane for a microphone device;
a first MEMS structure and a second MEMS structure over the first conductive layer, wherein the first MEMS structure is disposed over the first membrane; and
a second conductive layer comprising a second membrane for a pressure sensor device, wherein the second membrane is disposed over the first MEMS structure;
a carrier chip bonded to the MEMS chip, the carrier chip comprising a cavity exposed to an ambient environment, wherein the cavity includes the first membrane and a first surface of the second membrane; and
a cap chip bonded to a surface of the MEMS chip opposing the carrier chip, and wherein the cap chip and the MEMS chip define a second sealed cavity and a third sealed cavity, and wherein;
the second MEMS structure is disposed in the second sealed cavity; and
a second surface of the second membrane is exposed to a sealed pressure level of the third sealed cavity.
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Abstract
A method embodiment includes providing a MEMS wafer. A portion of the MEMS wafer is patterned to provide a first membrane for a microphone device and a second membrane for a pressure sensor device. A carrier wafer is bonded to the MEMS wafer. The carrier wafer is etched to expose the first membrane and a first surface of the second membrane to an ambient environment. A MEMS structure is formed in the MEMS wafer. A cap wafer is bonded to a side of the MEMS wafer opposing the carrier wafer to form a first sealed cavity including the MEMS structure and a second sealed cavity including a second surface of the second membrane for the pressure sensor device. The cap wafer comprises an interconnect structure. A through-via electrically connected to the interconnect structure is formed in the cap wafer.
25 Citations
19 Claims
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1. A micro-electromechanical (MEMS) device comprising:
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a MEMS chip comprising; a first conductive layer comprising a first membrane for a microphone device; a first MEMS structure and a second MEMS structure over the first conductive layer, wherein the first MEMS structure is disposed over the first membrane; and a second conductive layer comprising a second membrane for a pressure sensor device, wherein the second membrane is disposed over the first MEMS structure; a carrier chip bonded to the MEMS chip, the carrier chip comprising a cavity exposed to an ambient environment, wherein the cavity includes the first membrane and a first surface of the second membrane; and a cap chip bonded to a surface of the MEMS chip opposing the carrier chip, and wherein the cap chip and the MEMS chip define a second sealed cavity and a third sealed cavity, and wherein; the second MEMS structure is disposed in the second sealed cavity; and a second surface of the second membrane is exposed to a sealed pressure level of the third sealed cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A package comprising:
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a device chip, wherein the device chip comprises; a first conductive layer comprising a first membrane for a first device; a first micro-electromechanical (MEMS) structure over and aligned with the first membrane; and a second conductive layer comprising a second membrane for a second device different than the first device, wherein the second conductive layer extends continuously across an entirety of the second membrane, wherein the second membrane is disposed over and aligned with the first MEMS structure, and wherein opposing surfaces of the second membrane are exposed to different pressure levels; and a cap bonded to the device chip, wherein the cap comprises; a substrate; interconnect structures disposed between the substrate and the device chip; and through-vias extending through the substrate and electrically connected to the interconnect structures. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A package comprising:
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a device chip comprises; a first membrane for a first device; a first structure directly over the first membrane, wherein the first structure is freely movable in at least one axis; and a second membrane for a second device different than the first device, wherein the second membrane is disposed directly over the first structure, and wherein a bottom surface of the second membrane is exposed to an ambient pressure level; and a cap bonded to the device chip, wherein the cap and the device chip define a sealed cavity, and wherein a top surface of the second membrane is disposed in the sealed cavity and exposed to a second pressure level of the sealed cavity; and a carrier bonded to an opposing side of the device chip as the cap, wherein an opening extends through the carrier and exposes the bottom surface of the second membrane to the ambient pressure level. - View Dependent Claims (16, 17, 18, 19)
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Specification