Method of manufacturing MEMS switches with reduced switching voltage
First Claim
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1. A method of fabricating a switch comprising:
- forming a fixed electrode;
forming a first cantilevered electrode;
forming a second cantilevered electrode aligned vertically over the fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode; and
forming a hermetically sealed volume encapsulating the fixed electrode, the first cantilevered electrode, and the second cantilevered electrode,wherein the first cantilevered electrode comprises an arm with an extending protrusion which extends upward from an upper surface of the arm.
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Abstract
An approach includes a method of fabricating a switch. The approach includes forming a fixed electrode, forming a first cantilevered electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
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Citations
10 Claims
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1. A method of fabricating a switch comprising:
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forming a fixed electrode; forming a first cantilevered electrode; forming a second cantilevered electrode aligned vertically over the fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode; and forming a hermetically sealed volume encapsulating the fixed electrode, the first cantilevered electrode, and the second cantilevered electrode, wherein the first cantilevered electrode comprises an arm with an extending protrusion which extends upward from an upper surface of the arm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of fabricating a switch comprising:
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forming a fixed electrode; forming a first cantilevered electrode; forming a second cantilevered electrode aligned vertically over the fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode; and forming a hermetically sealed volume encapsulating the fixed electrode, the first cantilevered electrode, and the second cantilevered electrode, wherein the forming the hermetically sealed volume comprises; forming at least one hole in a nitride liner to gain access to a sacrificial resist; etching the sacrificial resist; and closing the at least one hole by deposition of additional liner material.
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Specification