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MEMS device and electronic device having projector function

  • US 10,018,833 B2
  • Filed: 01/08/2013
  • Issued: 07/10/2018
  • Est. Priority Date: 02/03/2012
  • Status: Active Grant
First Claim
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1. A MEMS device comprising:

  • an optical component; and

    only a pair of drive portions provided to hold the optical component therebetween including a first drive portion extending in a first direction a second drive portion extending in the first direction and a first connecting portion that connects the first drive portion to the second drive portion and is arranged along a second direction substantially orthogonal to the first direction, whereina drive element of the first drive portion consists of a first drive element which is a single-layered drive element and which drives only the first drive portion, and a drive section of the first drive portion consists of a rectangular first drive section, a rectangular second drive section arranged in series with the first drive section in the first direction, and an intermediate section formed between the first drive section and the second drive section,a drive element of the second drive portion consists of a second drive element which is a single-layered drive element and which drives only the second drive portion, and a drive section of the second drive portion consists of a rectangular third drive section, a rectangular fourth drive section arranged in series with the third drive section in the first direction, and an intermediate section formed between the third drive section and the fourth drive section, andthe first, the second, the third, and the fourth drive sections of only the pair of drive portions are controlled for driving independently of each other to incline the optical component in a biaxial direction about a first rotation axis line and a second rotation axis line extending in the first direction and the second direction substantially orthogonal to each other in a same plane, respectively.

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