MEMS device and electronic device having projector function

• US 10,018,833 B2
• Filed: 01/08/2013
• Issued: 07/10/2018
• Est. Priority Date: 02/03/2012
• Status: Active Grant

• Current Assignee: Funai Electric Co., Ltd. (Funai Electric Holdings Company Limited)
• Original Assignee: Funai Electric Co., Ltd. (Funai Electric Holdings Company Limited)
• Inventors: Murayama, Manabu, Kugo, Kouichi, Inoue, Naoki, Fujii, Hitoshi
• Primary Examiner(s): Thomas, Brandi
• Assistant Examiner(s): FISSEL, TRAVIS S
• Application Number:
  US14/372,367
• Publication Number:
  US 20140355089A1
• Time in Patent Office: 2,009 Days
• Field of Search: 3591991-1994, 3592242, 3592006-2008, 347257-260
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: G02B 27/646 compensating for small deviations, e.g. due to vibration or shake movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68

Abstract

In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component (10).

Claims

1. A MEMS device comprising:

an optical component; and

only a pair of drive portions provided to hold the optical component therebetween including a first drive portion extending in a first direction a second drive portion extending in the first direction and a first connecting portion that connects the first drive portion to the second drive portion and is arranged along a second direction substantially orthogonal to the first direction, wherein

a drive element of the first drive portion consists of a first drive element which is a single-layered drive element and which drives only the first drive portion, and a drive section of the first drive portion consists of a rectangular first drive section, a rectangular second drive section arranged in series with the first drive section in the first direction, and an intermediate section formed between the first drive section and the second drive section,

a drive element of the second drive portion consists of a second drive element which is a single-layered drive element and which drives only the second drive portion, and a drive section of the second drive portion consists of a rectangular third drive section, a rectangular fourth drive section arranged in series with the third drive section in the first direction, and an intermediate section formed between the third drive section and the fourth drive section, and

the first, the second, the third, and the fourth drive sections of only the pair of drive portions are controlled for driving independently of each other to incline the optical component in a biaxial direction about a first rotation axis line and a second rotation axis line extending in the first direction and the second direction substantially orthogonal to each other in a same plane, respectively.

2. The MEMS device according to claim 1, wherein

the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line.

3. The MEMS device according to claim 1, wherein

the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line.

4. The MEMS device according to claim 1, wherein

the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line,

the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line, and

in the first drive section, the second drive section, the third drive section, and the fourth drive section, drive control about the first rotation axis line and drive control about the second rotation axis line are combined to incline the optical component in the biaxial direction about the first rotation axis line and the second rotation axis line.

5. The MEMS device according to claim 1, wherein

the first drive portion is divided into the first drive section and the second drive section in a vicinity of a central portion of the first drive portion in the first direction, and

the second drive portion is divided into the third drive section and the fourth drive section in a vicinity of a central portion of the second drive portion in the first direction.

6. The MEMS device according to claim 5, wherein

the first drive section and the second drive section of the first drive portion are formed to have a substantially same length in the first direction, and

the third drive section and the fourth drive section of the second drive portion are formed to have a substantially same length in the first direction.

7. The MEMS device according to claim 1, wherein

the first drive section and the second drive section of the first drive portion are formed in a state where the first drive section and the second drive section are separated from each other by a first distance in the first direction,

the third drive section and the fourth drive section of the second drive portion are formed in a state where the third drive section and the fourth drive section are separated from each other by a second distance in the first direction, and

the first distance and the second distance are smaller than a width of the first drive portion in the second direction and a width of the second drive portion in the second direction, respectively.

8. The MEMS device according to claim 1, wherein

a pair of the first drive portions and a pair of the second drive portions are provided to hold the optical component therebetween, and

the pair of first drive portions and the pair of the second drive portions are formed to be substantially point-symmetric to each other, using a substantially central portion of the optical component as a symmetry center.

9. The MEMS device according to claim 8, wherein

the pair of first drive portions substantially point-symmetric to each other are controlled for driving in a different manner, and

the pair of second drive portions substantially point-symmetric to each other are controlled for driving in a different manner.

10. The MEMS device according to claim 1, further comprising:

a plurality of drive units that include a first drive unit including the first drive portion, the second drive portion, and the first connecting portion, and a second drive unit arranged adjacent to the first drive unit along the second direction, including a third drive portion extending in the first direction, a fourth drive portion extending in the first direction, and a second connecting portion that is arranged along the second direction and connects the third portion to the fourth drive portion; and

a third connecting portion that connects the first drive unit to be the second drive unit, wherein

a drive section of the third drive portion consists of a rectangular fifth drive section, a rectangular sixth drive section arranged in series with the fifth drive section in the first direction, and an intermediate section formed between the fifth drive section and the sixth drive section,

a drive section of the fourth device portion consists of a rectangular seventh drive section, a rectangular eighth drive section arranged in series with the seventh drive section in the first direction, and an intermediate section formed between the seventh drive section and the eighth drive section, and

the plurality of drive units, in which the fourth drive section of the first drive unit and the fifth drive section of the second drive unit are connected by the third connection portion, are formed to meander.

11. The MEMS device according to claim 1, wherein

the first drive section, the second drive section, the third drive section, and the fourth drive section are driven by deformation of a piezoelectric body resulting from voltage application to the piezoelectric body and have a first drive electrode, a second drive electrode, a third drive electrode, and a fourth drive electrode, respectively, and

the first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other by application of voltages different from each other to the first drive electrode, the second drive electrode, the third drive electrode, and the fourth drive electrode.

12. The MEMS device according to claim 11, further comprising:

a plurality of drive units that include the first drive portion, the second drive portion and the first connecting portion,

a movable portion where the optical component is arranged, connected to a first end of the drive units; and

a fixing portion fixing a second end of the drive units, wherein

the drive units further include a detection electrode capable of detecting driving of the drive units based on deformation of the piezoelectric body, and

the detection electrode is provided in the drive unit located at the second end of the plurality of drive units fixed to the fixing portion.

13. The MEMS device according to claim 1, further comprising:

a plurality of drive units that includes the first drive portion, the second drive portion and the first connecting portion,

a movable portion where the optical component is arranged, connected to a first end of the plurality of drive units;

a fixing portion fixing a second end of the plurality of drive units; and

a spacer that provides the optical component in a stacked arrangement in the movable portion in a state where the optical component and the plurality of drive units are separated from each other in a third direction substantially orthogonal to the first direction and the second direction.

14. The MEMS device according to claim 1, wherein

the optical component is resonantly driven, and the first drive portion and the second drive portion perform non-resonant drive.

15. The MEMS device according to claim 1, comprising:

a plurality of drive units that include the first drive portion, the second drive portion and the first connection portion; and

a movable portion where the optical component is arranged, connected to a first end of the drive units, wherein

the first end of the drive units is connected to a corner of the movable portion.

16. An electronic device having a projector function, comprising:

a laser beam generation portion emitting a laser beam;

a control portion analyzing an input picture and recognizing pixel information; and

a laser scanning portion including a MEMS device scanning the laser beam, wherein

the MEMS device includes;

an optical component; and

only a pair of drive portions provided to hold the optical component therebetween including a first drive portion extending in a first direction a second drive portion extending in the first direction and a first connecting portion that connects the first drive portion to the second drive portion and is arranged along a second direction substantially orthogonal to the first direction, wherein

a drive element of the first drive portion consists of a first drive element which is a single-layered drive element and which drives only the first drive portion, and a drive section of the first drive portion consists of a rectangular first drive section, a rectangular second drive section arranged in series with the first drive section in the first direction, and an intermediate section formed between the first drive section and the second drive section,

a drive element of the second drive portion consists of a second drive element which is a single-layered drive element and which drives only the second drive portion, and a drive section of the second drive portion consists of a rectangular third drive section, a rectangular fourth drive section arranged in series with the third drive section in the first direction, and an intermediate section formed between the third drive section and the fourth drive section, and

the first, the second, the third, and the fourth drive sections of only the pair of drive portions are controlled for driving independently of each other to incline the optical component in a biaxial direction about a first rotation axis line and a second rotation axis line extending in the first direction and the second direction substantially orthogonal to each other in a same plane, respectively.

17. The electronic device having a projector function according to claim 16, further comprising a vibration detecting portion capable of detecting vibration of the electronic device, wherein

the control portion corrects a shake by performing control of inclining the optical component of the MEMS device on the basis of the vibration of the electronic device resulting from the shake detected by the vibration detecting portion.

18. The electronic device having a projector function according to claim 16, wherein

the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line.

19. The electronic device having a projector function according to claim 16, wherein

the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line.