High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
First Claim
1. A nanosecond pulser comprising:
- one or more switch circuits including one or more solid state switches;
a transformer comprising;
a first transformer core;
a first primary winding wound at least partially around a portion of the first transformer core, each of the one or more switch circuits are coupled with at least a portion of the first primary winding; and
a secondary winding wound at least partially around a portion of the first transformer core; and
an output electrically coupled with the secondary winding that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than 150 nanoseconds, wherein the electrical pulses have an output pulse width that is variable and proportional to an input pulse width.
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Accused Products
Abstract
A nanosecond pulser is disclosed. In some embodiments, the nanosecond pulser may include one or more switch circuits including one or more solid state switches, a transformer, and an output. In some embodiments, the transformer may include a first transformer core, a first primary winding wound at least partially around a portion of the first transformer core, and a secondary winding wound at least partially around a portion of the first transformer core. In some embodiments, each of the one or more switch circuits are coupled with at least a portion of the first primary winding. In some embodiments, the output may be electrically coupled with the secondary winding and outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than 150 nanoseconds or less than 50 nanoseconds.
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Citations
22 Claims
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1. A nanosecond pulser comprising:
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one or more switch circuits including one or more solid state switches; a transformer comprising; a first transformer core; a first primary winding wound at least partially around a portion of the first transformer core, each of the one or more switch circuits are coupled with at least a portion of the first primary winding; and a secondary winding wound at least partially around a portion of the first transformer core; and an output electrically coupled with the secondary winding that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than 150 nanoseconds, wherein the electrical pulses have an output pulse width that is variable and proportional to an input pulse width. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A nanosecond pulser comprising:
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a first switch circuit; a first transformer core; a first primary winding electrically coupled with the first switch circuit and wrapped at least partially around the first transformer core; a second switch circuit; a second transformer core disposed adjacent to the first transformer core; a second primary winding electrically coupled with the second switch circuit and wrapped at least partially around the second transformer core; a secondary winding wrapped around the first transformer core and the second transformer core; and an output coupled with the secondary winding, configured to output electrical pulses having an output pulse width that is variable and proportional to an input pulse width. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A nanosecond pulser comprising:
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one or more switch circuits including one or more solid state switches; a fast capacitor disposed in series with the switch circuit; a transformer comprising; a first transformer core; a first primary winding wound at least partially around a portion of the first transformer core, each of the one or more switch circuits are coupled with at least a portion of the first primary winding; and a secondary winding wound at least partially around a portion of the first transformer core; and an output electrically coupled with the secondary winding that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than about 100 nanoseconds, wherein the electrical pulses have an output pulse width that is variable and proportional to an input pulse width. - View Dependent Claims (20, 21, 22)
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Specification