Slit valve apparatus, systems, and methods

• US 10,023,954 B2
• Filed: 09/10/2012
• Issued: 07/17/2018
• Est. Priority Date: 09/15/2011
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Mazzocco, John J., Du Bois, Dale Robert, Rocha-Alvarez, Juan Carlos
• Primary Examiner(s): Baldwin, Gordon
• Assistant Examiner(s): BENNETT, CHARLEE
• Application Number:
  US13/608,389
• Publication Number:
  US 20130068391A1
• Time in Patent Office: 2,136 Days
• Field of Search: 118715-733, 1563451-34555
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: F16K 3/0218 with only one sealing face
• CPC Class Codes: F16K 3/0254 being operated by particular means
• CPC Class Codes: F16K 3/16 with special arrangements for separating the sealing faces or for pressing them together F16K3/10, F16K3/14 take precedence
• CPC Class Codes: F16K 3/22 with sealing faces shaped as surfaces of solids of revolution F16K13/02 takes precedence; with resilient valve members F16K3/28
• CPC Class Codes: F16K 3/314 Forms or constructions of slides; Attachment of the slide to the spindle
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

Slit valve apparatuses are described. In one aspect, a slit valve apparatus is disclosed having a gate with at least one sealing surface, a blocker element, and a connector member that structurally connects the gate and the blocker element. Systems and methods including the slit valve apparatus are also disclosed, as are numerous other aspects.

Claims

1. A slit valve apparatus, comprising:

a housing including a side wall having an opening to a chamber through which substrates are passed, and a radial recess formed in the opening directly adjacent to the chamber;

a gate having at least one sealing surface on a first side configured to seal against the opening at a first location;

a blocker element spaced from the first side of the gate and configured to block the opening at a second location directly proximate the chamber when the slit valve apparatus is in a closed configuration, the second location being closer to the chamber than the first location, at least a portion of the blocker element received in the radial recess when the slit valve apparatus is in an opened configuration;

one or more connector members structurally connecting the first side of the gate to the blocker element, wherein the one or more connector members structurally connected to the blocker element are all located at positions offset in a vertical direction from a longitudinal centerline passing through a physical center of the blocker element; and

a moving mechanism coupled to the gate on other than the first side and adapted to carry out motion of the gate and the blocker element simultaneously from the closed configuration to the opened configuration and from the opened configuration to the closed configuration.

2. The slit valve apparatus of claim 1, wherein the one or more connector members comprise one or more rods and rigidly connect between the gate and the blocker element.

3. The slit valve apparatus of claim 1, wherein the one or more connector members rigidly connect between the gate and the blocker element comprise a cross sectional area that is less than 25% of a frontal area of a frontal surface of the blocker element.

4. The slit valve apparatus of claim 1, comprising a curved frontal surface on the blocker element.

5. The slit valve apparatus of claim 4, wherein the curved frontal surface on the blocker element includes a radius of curvature that substantially matches a radius of a chamber the blocker element is adapted to interface with.

6. The slit valve apparatus of claim 1, wherein an edge surface on at least some peripheral edges of the blocker element includes an angled interface surface angled at less than 90 degrees from a lateral longitudinal centerline of the blocker element.

7. The slit valve apparatus of claim 1, wherein the blocker element includes an electrically conductive bridge element.

12. The slit valve apparatus of claim 1, wherein the one or more connector members structurally connected to the blocker element are offset from the longitudinal centerline passing through a physical center of the blocker element in a vertical direction that is opposite to the direction of movement of the blocker element when being received in the radial recess.

8. An electronic device processing system, comprising:

a housing including a side wall having an opening through which substrates are passed, and a radial recess formed in the opening;

a chamber coupled to the opening, the opening including a first location and a second location spaced from the first location, the second location being closer to the chamber than the first location, and the radial recess being located directly adjacent to the chamber; and

a slit valve apparatus arranged to seal the opening at the first location, wherein the slit valve apparatus includes;

a gate having at least one sealing surface, on a first side, adapted to seal the opening at the first location,

a blocker element spaced from the first side of the gate and configured to block the opening at a second location directly proximate the chamber when the slit valve apparatus is in a closed configuration, at least a portion of the blocker element received in the radial recess of the opening when the slit valve apparatus is in an opened configuration,

one or more connector members structurally connecting the first side of the gate to the blocker element, wherein the one or more connector members structurally connected to the blocker element are all located at positions offset in a vertical direction from a longitudinal centerline passing through a physical center of the blocker element; and

a moving mechanism coupled to the gate on a side other than the first side and adapted to carry out motion of the gate and the blocker element simultaneously from the closed configuration to the opened configuration and from the opened configuration to the closed configuration.

9. The electronic device processing system of claim 8 wherein the blocker element interfaces with a liner element of the chamber.

10. The electronic device processing system of claim 9 wherein an inner surface of the liner element aligns with an inner surface of the blocker element.

11. The electronic device processing system of claim 8 wherein an edge surface on at least some peripheral edges of the blocker element includes an angled interface surface angled at less than 90 degrees from a longitudinal centerline of the blocker element.

13. The electronic device processing system of claim 8, wherein the one or more connector members structurally connected to the blocker element are offset from the longitudinal centerline passing through a physical center of the blocker element in a vertical direction that is opposite to the direction of movement of the blocker element when being received in the radial recess.