MEMS sensor

• US 10,024,881 B2
• Filed: 06/24/2016
• Issued: 07/17/2018
• Est. Priority Date: 06/26/2015
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: RYTKONEN, Ville-Pekka
• Primary Examiner(s): BOLDUC, DAVID J
• Application Number:
  US15/192,192
• Publication Number:
  US 20160377649A1
• Time in Patent Office: 753 Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: G01C 2009/062 capacitive
• CPC Class Codes: G01C 9/06 Electric or photoelectric indication or reading means
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum

Abstract

The present invention relates to A MEMS sensor with movable and fixed components for measuring linear acceleration. The MEMS sensor includes at least two mutually independent differential sensor elements disposed inside a common frame structure providing walls for hermetic sealing of the MEMS sensor. The mutually independent differential sensor elements are pairwise configured to perform double differential detection of linear acceleration. The MEMS sensor includes a common anchoring area to which the at least two differential sensor elements are anchored. The common anchoring area is located at the centroid of the pairwise configured differential sensor elements. A self-test capability of the MEMS sensor is also provided.

Claims

1. A MEMS sensor with movable and fixed components for measuring linear acceleration, said sensor comprising:

at least two mutually independent differential sensor elements disposed inside a common frame structure, the frame structure providing walls for hermetic sealing of the MEMS sensor, wherein the at least two mutually independent differential sensor elements are pairwise configured to perform double differential detection of the linear acceleration; and

a common anchoring area to which rotor masses and stator structures of the pairwise configured differential sensor elements are anchored, the common anchoring area being located at the centroid of the pairwise configured differential sensor elements.

2. A MEMS sensor according to claim 1, wherein each differential sensor element of the at least two pairwise configured mutually independent differential sensor elements includes:

a movable rotor mass suspended with a spring to an anchor structure within the common anchoring area, the spring allowing the rotor mass to move within a plane of the device; and

two immovable stator structures rigidly anchored to one or more anchor structures within the common anchoring area,

wherein two sensing electrode pairs each formed by a defined number of rotor fingers of the rotor mass and a defined number of stator fingers of one of the two stator structures are configured to provide a differential detection signal.

3. The MEMS sensor according to claim 2, wherein the two immovable stator structures of each differential sensor element of the at least two pairwise configured mutually independent sensor elements are disposed symmetrically in the plane of the device on opposite sides of the spring suspending the movable rotor mass.

4. The MEMS sensor according to claim 2, wherein the rotor masses of differential sensor elements of the at least two pairwise configured mutually independent differential sensor elements are suspended to a common rotor anchor structure located at or in a vicinity of the centroid of the pairwise configured differential sensor elements within the common anchoring area.

5. The MEMS sensor according to claim 2, wherein rotor masses of the differential sensor elements of the pairwise configured mutually independent differential sensor elements are suspended to separate rotor anchor structures located at or in a vicinity of the centroid of the pairwise arranged differential sensor elements within the common anchoring area.

6. The MEMS sensor according to claim 2, wherein stator structures of the differential sensor elements of the pairwise configured mutually independent differential sensor elements are anchored to a common stator anchor structure located at or in a vicinity of the centroid of the pairwise configured differential sensor elements within the common anchoring area.

7. The MEMS sensor according to claim 2, wherein stator structures of the differential sensor elements of the pairwise configured mutually independent differential sensor elements are anchored to a number of stator anchor structures located in a vicinity of the centroid of the pairwise configured differential sensor elements within the common anchoring area.

8. The MEMS sensor according to claim 2, wherein the rotor mass of each of the differential sensor elements of the pairwise configured mutually independent differential sensor elements is suspended to an anchor structure within the common anchoring area with a rectilinear beam spring allowing the rotor mass to move within the plane of the device, but preventing the rotor mass from moving away from the plane of the device, the spring defining a suspension axis of the sensor element, the suspension axis traversing along the longitudinal dimension of the spring.

9. The MEMS sensor according to claim 2, wherein the spring suspending the rotor mass of the respective sensor element is configured as a rotor electrode finger for both sensing electrode pairs of the respective sensor element.

10. The MEMS sensor according to claim 1, comprising:

two pairs of differential sensor elements, each pair having a common suspension axis oblique to the detection axes of the sensor elements, wherein the suspension axes are mutually orthogonal,

wherein each of the differential sensor elements is configured to have two mutually orthogonal detection axes.

11. The MEMS sensor according to claim 10, wherein the suspension axis of each differential sensor element has a 45 degree angle with respect to both said detection axes.

12. The MEMS sensor according to claim 1, comprising:

two pairs of differential sensor elements, each pair having a common suspension axis orthogonal to a detection axis of both sensor elements in the respective pair of sensor elements, the suspension axes being mutually orthogonal, wherein

each of the differential sensor elements is configured to have a single detection axis.

13. The MEMS sensor according to claim 1, comprising:

one pair of differential sensor elements having a common suspension axis orthogonal to a detection axis of the pair of sensor elements, wherein

each of the differential sensor elements is configured to have a single detection axis.

14. The MEMS sensor according to claim 2, wherein the sensing electrode pairs of the differential sensor elements of the pairwise configured mutually independent differential sensor elements are arranged in mirrored positions with respect to a symmetry axis orthogonal to a common suspension axis of the respective sensor element pair, and wherein each of such mirror symmetrical sensor element pairs produce a capacitive detection value that changes in a mutually same direction.

15. The MEMS sensor according to claim 2, wherein the sensing electrode pairs of the differential sensor elements of the pairwise configured mutually independent differential sensor elements are configured pairwise symmetrically on opposite sides of the geometrical center of the pairwise configured mutually independent differential sensor elements, and wherein each of such sensing electrode pairs on opposite sides of the geometrical center provide a capacitive detection value that changes in mutually same direction.

16. The MEMS sensor according to claim 1, wherein detection values of the differential sensor elements of the pairwise configured mutually independent differential sensor elements may be used for performing a self-test, wherein the self-test includes summing the detection values of all differential sensor elements in a calculation unit, and wherein the self-test indicates that the sensor is working correctly if the total sum of the self-test detection values equals zero.

17. The MEMS sensor according to claim 1, wherein any lateral dimension of the common anchoring area in a plane of the device does not exceed 20% of the total lateral dimension of the MEMS sensor in the same direction.

18. The MEMS sensor according to claim 1, wherein any lateral dimension of the common anchoring area in a plane of the device does not exceed 20% of the total lateral dimension of the pairwise configured mutually independent differential sensor elements in the same direction.