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Smart selection and/or weighting of parameters for lithographic process simulation

  • US 10,025,198 B2
  • Filed: 11/09/2009
  • Issued: 07/17/2018
  • Est. Priority Date: 07/07/2008
  • Status: Active Grant
First Claim
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1. A method comprising:

  • identifying a software model for simulating a lithographic manufacturing process, the software model comprising a finite number of mathematical terms added together, which when combined with a mathematical representation of a mask, generate a result that simulates performance of the lithographic manufacturing process using the mask, wherein each of at least two of the mathematical terms comprises a same or different variable;

    identifying a geometric or frequency characteristic of a desired mask layout;

    selecting, by a hardware computer, a subset of the finite number of terms of the software model based on the identified characteristic of the desired mask layout; and

    using the software model with only the selected subset of the plurality of terms to perform a computer simulation of the performance of the lithographic manufacturing process, where an output of the software model is used to design, control and/or modify an aspect of the lithographic manufacturing process and/or of a physical object or apparatus for use in the lithographic manufacturing process.

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