Method and system for processing data from equipment

• US 10,026,048 B2
• Filed: 04/01/2015
• Issued: 07/17/2018
• Est. Priority Date: 07/30/2014
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Leem, Chang-Ryul, Kume, Uiseok, Park, Jung-Hyuk, Chung, Dong-Hwan
• Primary Examiner(s): Koneru, Sujay
• Application Number:
  US14/676,116
• Publication Number:
  US 20160034836A1
• Time in Patent Office: 1,203 Days
• CPC Class Codes: G06Q 10/06314 Calendaring for a resource
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing

Abstract

Systems and methods of processing equipment information obtained from a plurality of equipment includes obtaining equipment information from the plurality of equipment; standardizing the equipment information such that the equipment information conforms to a desired format, the standardizing including generating practical information and associated information based on the standardized equipment information, the practical information indicating an operation state of each of the plurality of equipment, and the associated information being information about the practical information; aggregating the standardized equipment information the aggregating being based on a prediction of an amount of equipment information to be produced during a desired period of time; objectifying the aggregated equipment information to generate analysis information; and performing a reverse schedule operation to reconfigure the analysis information into a unit schedule based on an information classification table.

Claims

1. A method of processing equipment information obtained from a plurality of equipments, the method comprising:

obtaining, by a processor, equipment information from the plurality of equipments;

standardizing, by the processor, the equipment information such that the standardized equipment information conforms to a desired format, the standardizing including generating practical information and associated information based on the equipment information, the practical information indicating an operation state of each of the plurality of equipments, the associated information being information about the practical information;

aggregating, by the processor, the standardized equipment information, the aggregating being based on a prediction of an amount of equipment information to be produced during a desired period of time;

objectifying, by the processor, the aggregated standardized equipment information to generate analysis information;

performing a reverse schedule operation to reconfigure the analysis information into a unit schedule based on an information classification table, the information classification table including data classifying information included in the standardized equipment information; and

detecting abnormality of each of the plurality of equipments based on the unit schedule,

wherein the plurality of equipments include a plurality of hardware, each of which is configured to carry a wafer, open and close a chamber included therein, and/or insert the wafer to and take the wafer out from the chamber, and

the plurality of equipments are connected to the processor through a communication network.

2. The method of claim 1, wherein

the equipment information comprises (i) information associated with status changes in each of the plurality of equipments, and (ii) information not associated with the status changes, and

the information associated with status changes in each of the plurality of equipments includes at least one of information associated with management of each of the plurality of equipments, information generated in conjunction with an outside of the plurality of equipments, and information generated due to at least one defective equipment from among the plurality of equipments.

3. The method of claim 2, wherein the equipment information is classified within the information classification table according to a Mutually Exclusive and Collectively Exhaustive (MECE) rule such that each element of the information classification table is mutually exclusive and collectively exhaustive from each other element in the information classification table.

4. The method of claim 2, wherein the practical information comprises (i) information to be recorded according to the information classification table, and (ii) a value of the information to be recorded.

5. The method of claim 4, wherein the associated information comprises at least one of (i) information associated with generation of the practical information, (ii) information associated with a target material described by the practical information, and (iii) additional information associated with the practical information.

6. The method of claim 5, wherein the standardized equipment information comprises at least one of (i) information associated with a category defined by the information classification table, and (ii) information associated with a point in time at which the standardized equipment information is generated.

7. The method of claim 2, further comprising:

storing the standardized equipment information in a storage device associated of a corresponding one of the plurality of equipments before collecting the standardized equipment information, and each storage device being accessible from an external device through a network.

8. The method of claim 2, wherein the objectifying comprises:

determining whether the aggregated standardized equipment information corresponds to the desired format;

storing the aggregated standardized equipment information in a temporary storage device in as partial information in response to the aggregated standardized equipment information being determined to correspond to the desired format; and

storing the analysis information generated by gathering the partial information in the temporary storage device.

9. The method of claim 2, wherein the performing a reverse schedule operation comprises:

classifying the analysis information according to the information classification table;

configuring the classified analysis information into the unit schedule; and

determining whether a missing block exists within the unit schedule by comparing the configured classified analysis information with other unit schedules.

10. The method of claim 9, further comprising:

generating expected information associated with the missing block in response to the missing block being determined to exist.

11. A system comprising:

a processor of one of a plurality of application servers configured to standardize equipment information collected from a plurality of equipments such that the standardized equipment information conforms to a desired format, the standardized equipment information including practical information and associated information, the practical information indicating an operation state of each of the plurality of equipments, the associated information being information about the practical information;

a main server configured to,

obtain fundamental information of each of the plurality of equipments, fundamental information including identification information used to identify each of the plurality of equipments, the main server obtaining the fundamental information from a host device, and

calculate a prediction of an amount of the equipment information to be produced during a desired period of time; and

at least one application server of the plurality of application servers configured to,

collect the standardized equipment information through a network based on the prediction of the amount of the standardized equipment information to be produced during a period of time,

objectify the collected equipment information to generate analysis information,

perform a reverse schedule operation for configuring the analysis information into a unit schedule based on an information classification table, the information classification table including data classifying information included in the standardized equipment information, and

detecting abnormality of each of the plurality of equipments based on the unit schedule,

wherein the plurality of equipments include a plurality of hardware, each of which is configured to carry a wafer, open and close a chamber included therein, and/or insert the wafer to and take the wafer out from the chamber, and

the plurality of equipments are connected to the processor through a communication network.

12. The system of claim 11, wherein

the equipment information comprises (i) information associated with a status change in the plurality of equipments, and (ii) information not associated with the status changes, and

the information associated with the status change in the plurality of equipments comprises at least one of (i) information associated with management of the plurality of equipments, (ii) information generated through conjunction with an outside of the plurality of equipments, and (iii) information generated due to at least one defective equipment of the plurality of equipments.

13. The system of claim 12, wherein the main server is configured to:

store, in a storage device associated with the main server, the information classification table and the analysis information configured by performing the reverse schedule operation.

14. The system of claim 13, wherein the practical information comprises information to be recorded based on the information classification table and a value of the information to be recorded.

15. The system of claim 14, wherein the associated information comprises at least one of (i) information associated with generation of the practical information, (ii) information associated with a target material corresponding to the practical information, and (iii) additional information associated with the practical information.

16. A server, comprising:

a non-transitory computer readable medium configured to store program code; and

a processor configured to execute the program code to,

obtain equipment information from a plurality of equipments;

standardize the equipment information such that the standardized equipment information conforms to a desired format, the standardized equipment information including practical information and associated information based on the standardized equipment information, the practical information indicating an operation state of each of the plurality of equipments, the associated information being information about the practical information;

aggregate the standardized equipment information based on a prediction of an amount of standardized equipment information to be produced during a desired period of time;

generate analysis information based on the aggregated standardized equipment information;

reconfigure the analysis information into a unit schedule based on an information classification table, the information classification table including data classifying information included in the standardized equipment information; and

detect abnormality of each of the plurality of equipments based on the unit schedule,

wherein the plurality of equipments include a plurality of hardware, each of which is configured to carry a wafer, open and close a chamber included therein, and/or insert the wafer to and take the wafer out from the chamber, and

the plurality of equipments are connected to the processor through a communication network.

17. The server of claim 16, wherein

the equipment information comprises (i) information associated with status changes in each of the plurality of equipments, and (ii) information not associated with the status changes, and

the information associated with status changes in each of the plurality of equipments includes at least one of information associated with management of each of the plurality of equipments, information generated in conjunction with an outside of the plurality of equipments, and information generated due to at least one defective equipment from among the plurality of equipments.

18. The server of claim 17, wherein the processor is further configured to execute the program code to:

store the standardized equipment information in another storage device associated of a corresponding one of the plurality of equipments before collecting the standardized equipment information, and each storage device is accessible by an external device through a network.

19. The server of claim 17, wherein in the generating analysis information, the processor is configured to execute the program code to:

determine whether the aggregated standardized equipment information corresponds to the desired format;

store the aggregated standardized equipment information in a temporary storage device as partial information in response to the equipment information is being determined to correspond to the desired format; and

store the analysis information generated by gathering the partial information in the temporary storage device.

20. The server of claim 16, wherein the processor is configured to execute the program code to reconfigure the analysis information by:

classifying the analysis information according to the information classification table;

configuring the classified analysis information into the unit schedule; and

determining whether a missing block exists within the unit schedule by comparing the configured classified analysis information with other unit schedules.