Electrostatic chuck and base member for use in the same

• US 10,026,634 B2
• Filed: 10/20/2015
• Issued: 07/17/2018
• Est. Priority Date: 10/22/2014
• Status: Active Grant

• Current Assignee: Shinko Electric Industries Company Limited (Fujitsu Limited)
• Original Assignee: Shinko Electric Industries Company Limited (Fujitsu Limited)
• Inventors: Takada, Kazuya
• Primary Examiner(s): BAUER, SCOTT ALLEN
• Application Number:
  US14/887,514
• Publication Number:
  US 20160118285A1
• Time in Patent Office: 1,001 Days
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

An electrostatic chuck includes a base member and an electrostatic chuck substrate. The base member includes a cooling path. The electrostatic chuck substrate is connected to an upper surface of the base member through an adhesive layer so as to attract a substrate to be mounted. The cooling path includes an introduction portion, a discharge portion and a conduit. The cooling medium is introduced from an outside of the base member to the introduction portion. The cooling medium is discharged from the discharge portion. The conduit includes a start end portion communicating with the introduction portion and a final end portion communicating with the discharge portion. The introduction portion is inclined toward a lower surface of the base member and at a predetermined angle with respect to an axis perpendicular to the upper surface. The introduction portion extends from the lower surface toward the start end portion.

Claims

1. An electrostatic chuck comprising:

a base member that includes a cooling path through which a cooling medium flows; and

an electrostatic chuck substrate that is connected to an upper surface of the base member through an adhesive layer so as to attract and retain a substrate to be mounted on an upper surface of the electrostatic chuck substrate;

wherein

the cooling path comprises

an introduction portion to which the cooling medium is introduced from an outside of the base member,

a discharge portion from which the cooling medium is discharged to the outside of the base member, and

a conduit including

a start end portion that is directly coupled to the introduction portion to directly communicate with the introduction portion, and

a final end portion that communicates with the discharge portion,

wherein an entirety of the conduit extends in a direction parallel to the upper surface of the base member,

the introduction portion has an oblique cylindrical shape and is inclined toward a lower surface of the base member and at a predetermined angle with respect to an axis perpendicular to the upper surface of the base member, and

the introduction portion extends from the lower surface of the base member toward the start end portion of the conduit.

2. The electrostatic chuck of claim 1, wherein the introduction portion is connected to the conduit on a lower surface of the start end portion of the conduit.

3. The electrostatic chuck of claim 1, wherein

an upper surface of the start end portion of the conduit is formed on the same plane as an upper surface of the other parts of the conduit than the start end portion, and

a lower surface of the start end portion of the conduit is formed on a plane closer to the lower surface of the base member than a lower surface of the other parts of the conduit than the start end portion.

4. The electrostatic chuck of claim 1, wherein the discharge portion extends along the axis from the lower surface of the base member toward the final end portion of the conduit.

5. The electrostatic chuck of claim 1, wherein

the electrostatic chuck substrate comprises

an electrostatic electrode that attracts the substrate, and

a heating element that heats the substrate.

6. The electrostatic chuck of claim 1, wherein the predetermined angle is equal to or lager than 25 degrees and less than 90 degrees.

7. The electrostatic chuck of claim 1, wherein a depth of a connection portion between the introduction portion and the conduit is deeper than that of a connection portion between the discharge portion and the conduit.

8. The electrostatic chuck of claim 1, wherein the discharge portion has a straight cylindrical shape.

9. An electrostatic chuck comprising:

a base member that includes a cooling path through which a cooling medium flows; and

an electrostatic chuck substrate that is connected to an upper surface of the base member through an adhesive layer so as to attract and retain a substrate to be mounted on an upper surface of the electrostatic chuck substrate,

wherein

the cooling path comprises

an introduction portion to which the cooling medium is introduced from an outside of the base member,

a discharge portion from which the cooling medium is discharged to the outside of the base member, and

a conduit including

a start end portion that communicates with the introduction portion, and

a final end portion that communicates with the discharge portion,

the introduction portion is inclined toward a lower surface of the base member and at a predetermined angle with respect to an axis perpendicular to the upper surface of the base member,

the introduction portion extends from the lower surface of the base member toward the start end portion of the conduit,

the introduction portion and the discharge portion are formed in a central portion of the base member in a plan view,

the conduit is formed into a spiral shape extending from the introduction portion toward an outer circumferential region of the base member, is turned back in the outer circumferential region, and then formed into a spiral shape extending from the outer circumferential region toward the discharge portion, and

a part of the conduit extending from the outer circumferential region toward the discharge portion is in parallel with a part of the conduit extending from the introduction portion toward the outer circumferential region.

10. A base member for supporting an electrostatic chuck substrate, the base member comprising:

an lower surface;

an upper surface that is opposite from the lower surface; and

a cooling path including

an introduction portion to which a cooling medium is introduced from an outside,

a discharge portion from which the cooling medium is discharged to the outside, and

a conduit including

a start end portion that is directly coupled to the introduction portion to directly communicate with the introduction portion, and

a final end portion that communicates with the discharge portion,

wherein an entirety of the conduit extends in a direction parallel to the upper surface,

the cooling path configured to allow the cooling medium to flow therethrough, wherein

the introduction portion has an oblique cylindrical shape and is inclined toward the lower surface and at a predetermined angle with respect to an axis perpendicular to the upper surface, and

the introduction portion extends from the lower surface toward the start end portion of the conduit.