Relative and absolute pressure sensor combined on chip

• US 10,031,003 B2
• Filed: 12/02/2015
• Issued: 07/24/2018
• Est. Priority Date: 12/02/2014
• Status: Active Grant

• Current Assignee: Melexis Technologies NV (Sensinnovat BVBA), X-FAB Semiconductor Foundries AG (X-FAB Silicon Foundries SE)
• Original Assignee: Melexis Technologies NV (Sensinnovat BVBA), X-FAB Semiconductor Foundries AG (X-FAB Silicon Foundries SE)
• Inventors: Van Der Wiel, Appolonius Jacobus, Schwarz, Uwe, De Winter, Rudi
• Primary Examiner(s): Nguyen, Duy T
• Application Number:
  US14/956,770
• Publication Number:
  US 20160153815A1
• Time in Patent Office: 965 Days
• Field of Search: 438 50
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 7/04 Networks or arrays of similar microstructural devices
• CPC Class Codes: B81C 1/00214 Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
• CPC Class Codes: G01F 1/34 by measuring pressure or differential pressure
• CPC Class Codes: G01F 15/14 Casings, e.g. of special material
• CPC Class Codes: G01L 15/00 Devices or apparatus for measuring two or more fluid pressure values simultaneously
• CPC Class Codes: G01L 9/008 using piezoelectric devices piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025

Abstract

A method for manufacturing a system in a wafer for measuring an absolute and a relative pressure includes etching a shallow and a deep cavity in the wafer. A top wafer is applied and the top wafer is thinned for forming a first respectively second membrane over the shallow respectively deep cavity, and for forming in the top wafer first respectively second bondpads at the first respectively second membrane resulting in a first respectively second sensor. Back grinding the wafer results in an opened deep cavity and a still closed shallow cavity. The first bondpads of the first sensor measure an absolute pressure and the second bondpads of the second sensor measure a relative pressure. The etching in the first step defines the edges of the first membrane and of the second membrane in respectively the sensors formed from the shallow and the deep cavity.

Claims

1. A method for manufacturing a pressure measurement system in a wafer for measuring an absolute pressure and a relative pressure, the method comprising:

a first step wherein a shallow cavity and a deep cavity are etched in a base wafer, such that the depth of the shallow cavity is smaller than the depth of the deep cavity;

a second step wherein a top wafer is applied to the base wafer;

a third step wherein the top wafer is thinned for forming a first membrane over the shallow cavity and for forming a second membrane over the deep cavity, and wherein elements are formed in the top wafer, the elements allowing performing pressure measurements resulting in a first sensor and a second sensor, respectively; and

a fourth step wherein back thinning is applied on the base wafer such that the deep cavity is opened from the backside of the base wafer and that the shallow cavity is still closed by the backside of the base wafer;

wherein the system can be used for measuring the absolute pressure using the first sensor and the relative pressure using the second sensor, and wherein the etching of the first step defines the edges of the first membrane and of the second membrane in respectively the sensors formed from the shallow cavity and the deep cavity.

2. A method according to claim 1, wherein the etching in the first step is deep reactive-ion etching.

3. A method according to claim 1, wherein the etching in the first step comprises etching such that the horizontal cross-section of the cavities is circular.

4. A method according to claim 1, wherein the first step comprises two substeps:

in a first substep the deep cavity is etched leaving at least one pillar inside the cavity, the pillar subdividing the cavity, and

in a second substep the shallow cavity and a part of the at least one pillar are etched, wherein both are etched to the same depth.

5. A method according to claim 1, wherein the etching in the first step comprises etching such that the area of the horizontal cross-section of the deep cavity has a different size than the area of the horizontal cross-section of the shallow cavity.

6. A method according to claim 1, wherein the formation of the elements allowing performing pressure measurements is performed on the stack of the base wafer and the top substrate, after they have been applied to each other.

7. A method according to claim 6, wherein the formation of the elements is performed by CMOS like processing.

8. A method according to claim 6, wherein the formation of the elements is performed by a CMOS process and where a CMOS sensor interface is realized around the sensor membranes.

9. A method according to claim 6, wherein applying the base wafer and the top wafer comprises bonding said base wafer and said top wafer in a vacuum environment.

10. A method according to claim 1, wherein the top wafer is an SOI wafer with a thin silicon bonded to the base wafer and where a buried oxide of the SOI wafer is used as an etch stop for the thinning process to obtain good thickness uniformity of the membranes.