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RPX’s CEO released a statement on our response to the COVID-19 emergency. Click here to access.

Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method

  • US 10,031,038 B2
  • Filed: 11/17/2014
  • Issued: 07/24/2018
  • Est. Priority Date: 01/14/2014
  • Status: Active Grant
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