Method and system for forming patterns using charged particle beam lithography

• US 10,031,413 B2
• Filed: 07/25/2016
• Issued: 07/24/2018
• Est. Priority Date: 09/19/2011
• Status: Active Grant

• Current Assignee: D2S, Inc.
• Original Assignee: D2S, Inc.
• Inventors: Fujimura, Akira, Aadamov, Anatoly, Khaliullin, Eldar, Bork, Ingo
• Primary Examiner(s): Parihar, Suchin
• Application Number:
  US15/218,513
• Publication Number:
  US 20160334700A1
• Time in Patent Office: 729 Days
• Field of Search: 716 53
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
• CPC Class Codes: G06F 30/00 Computer-aided design [CAD]
• CPC Class Codes: G06F 30/20 Design optimisation, verification or simulation optimisation, verification or simulation of circuit designs G06F30/30
• CPC Class Codes: G06F 30/367 Design verification, e.g. using simulation, simulation program with integrated circuit emphasis [SPICE], direct methods or relaxation methods
• CPC Class Codes: G06F 30/39 Circuit design at the physical level physical level design for reconfigurable circuits G06F30/347

Abstract

A method for mask data preparation (MDP) is disclosed, in which a set of shots is determined that will form a pattern on a reticle, where the determination includes calculating the pattern that will be formed on a substrate using an optical lithographic process with a reticle formed using the set of shots. A method for optical proximity correction (OPC) or MDP is also disclosed, in which a preliminary set of charged particle beam shots is generated using a preliminary mask model, and then the shots are modified by calculating both a reticle pattern using a final mask model, and a resulting substrate pattern. A method for OPC is also disclosed, in which an ideal pattern for a photomask is calculated from a desired substrate pattern, where the model used in the calculation includes only optical lithography effects and/or substrate processing effects.

Claims

1. A method for mask data preparation (MDP) for use with charged particle beam lithography, the method comprising:

inputting a substrate model;

determining an initial set of charged particle beam shots that is capable of forming a pattern on a reticle;

calculating a calculated reticle pattern using the initial set of shots;

calculating a pattern formed on a substrate using an optical lithographic process with the calculated reticle pattern; and

optimizing the initial set of shots based on the calculated pattern on the substrate;

wherein calculating the pattern formed on the substrate comprises lithography simulation and uses the substrate model, wherein the substrate model excludes charged particle beam effects and reticle processing effects, wherein the determining is performed using a computing hardware device, and wherein the optimized set of shots is to be used to form a pattern on a reticle.

2. The method of claim 1, further comprising forming a pattern on the reticle with the optimized set of shots.

3. The method of claim 1 wherein calculating the calculated pattern on the reticle comprises charged particle beam simulation.

4. The method of claim 1, further comprising inputting a mask model, wherein calculating the calculated pattern on the reticle uses the mask model.

5. The method of claim 1 wherein the substrate model includes optical lithography effects.

6. The method of claim 1 wherein the substrate model includes a substrate processing effect selected from the group consisting of substrate resist bake and substrate resist development.

7. The method of claim 1, further comprising:

inputting a desired substrate pattern; and

comparing the calculated pattern on the substrate with the desired substrate pattern.

8. The method of claim 1, wherein the optimizing comprises optimizing the calculated pattern on the substrate.

9. The method of claim 1, further comprising outputting aerial intensity information for the pattern on the substrate.

10. The method of claim 1 wherein the pattern on the reticle comprises a complete pattern for the reticle.

11. The method of claim 1 wherein the pattern on the reticle comprises a portion of a complete pattern for the reticle.

12. The method of claim 11, further comprising:

inputting a complete desired pattern for the reticle; and

identifying the portion of the complete desired pattern for the reticle for which the set of charged particle beam shots is determined.

13. The method of claim 12, further comprising:

inputting a first set of charged particle beam shots;

wherein identifying the portion of the complete desired pattern for the reticle comprises determining those areas of the complete desired pattern for the reticle for which the first set of charged particle beam shots is incapable of generating a pattern on the reticle that is within a predetermined tolerance of the complete desired reticle pattern.

14. The method of claim 1 wherein the optimizing comprises optimizing a parameter selected from the group consisting of critical dimension (CD) of the pattern on the substrate, critical dimension uniformity (CDU) of the pattern on the substrate, depth of focus (DOF) of the pattern on the substrate, exposure latitude (EL) of the pattern on the substrate, process variation (PV) band of the pattern on the substrate, and mask error enhancement factor (MEEF) of the pattern on the substrate.

15. The method of claim 1 wherein the pattern on the reticle comprises a portion of an integrated circuit design.

16. A method for optical proximity correction (OPC) or mask data preparation (MDP) for use with charged particle beam lithography, the method comprising:

inputting a set of charged particle beam shots;

calculating a reticle pattern that will be formed on a reticle with the input set of charged particle beam shots, wherein calculating the reticle pattern comprises using a mask model;

calculating a substrate pattern that will be formed on a substrate using an optical lithography process with the calculated pattern for the reticle; and

optimizing the input set of shots based on the calculated pattern on the substrate,

wherein the optimized set of shots is to be used to form a pattern on a reticle, wherein calculating the substrate pattern comprises lithography simulation, wherein calculating the substrate pattern comprises using a substrate model, wherein the substrate model excludes all effects which are included in the mask model, and wherein calculating the reticle pattern and calculating the substrate pattern are performed using a computing hardware device.

17. The method of claim 16 wherein calculating the reticle pattern comprises charged particle beam simulation.

18. The method of claim 16 wherein the mask model includes at least one effect selected from the group consisting of forward scattering, backward scattering, Coulomb effect, fogging, loading and reticle resist charging.

19. The method of claim 16 wherein the mask model comprises a Gaussian.

20. The method of claim 16 wherein the substrate model includes at least one effect selected from the group consisting of optical lithography, substrate resist bake, substrate resist development, and substrate resist etch.