Microelectromechanical gyroscopes and related apparatus and methods
First Claim
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1. A microelectromechanical resonant structure, comprising:
- a plate comprising a crystalline support and a piezoelectric thin film coupled to the crystalline support, the plate defining a plane when the resonant structure is not excited and the crystalline support exhibiting in-plane anisotropy within the plane;
a drive electrode configured to excite the plate in a first in-plane mode having a first resonance frequency; and
a sense electrode configured to sense motion of the plate in a second in-plane mode having a second resonance frequency and produce a signal in response to rotation of the resonant structure about an axis substantially orthogonal to the plane defined by the plate when the resonant structure is not excited,wherein the drive electrode and the sense electrode are arranged on the plate relative to a crystalline direction of the crystalline support such that the first resonance frequency and second resonance frequency are substantially equal.
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Abstract
In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.
111 Citations
21 Claims
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1. A microelectromechanical resonant structure, comprising:
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a plate comprising a crystalline support and a piezoelectric thin film coupled to the crystalline support, the plate defining a plane when the resonant structure is not excited and the crystalline support exhibiting in-plane anisotropy within the plane; a drive electrode configured to excite the plate in a first in-plane mode having a first resonance frequency; and a sense electrode configured to sense motion of the plate in a second in-plane mode having a second resonance frequency and produce a signal in response to rotation of the resonant structure about an axis substantially orthogonal to the plane defined by the plate when the resonant structure is not excited, wherein the drive electrode and the sense electrode are arranged on the plate relative to a crystalline direction of the crystalline support such that the first resonance frequency and second resonance frequency are substantially equal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A microelectromechanical resonant structure, comprising:
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a drive electrode configured to excite a plate of the microelectromechanical resonant structure in a first in-plane mode having a first resonance frequency, the plate configured to oscillate in a second in-plane mode having a second resonance frequency when excited by the drive electrode and upon rotation of the microelectromechanical resonant structure about an axis substantially orthogonal to a plane defined by the plate when the microelectromechanical resonant structure is not excited, wherein the plate comprises a crystalline support, exhibiting in-plane anisotropy within the plane, and a piezoelectric thin film coupled to the crystalline support; and a sense electrode configured to sense the oscillation of the plate in the second in-plane mode, wherein the drive electrode and the sense electrode are arranged relative to a crystalline direction of the crystalline support such that the first resonance frequency and second resonance frequency are substantially equal.
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20. A method, comprising:
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exciting, by a drive electrode, a plate of a resonant structure in a first in-plane mode having a first resonance frequency, the plate comprising a crystalline support, exhibiting in-plane anisotropy within a plane in which the plate lies, and a piezoelectric thin film coupled to the crystalline support; and measuring, by a sense electrode, an oscillation of the plate in a second in-plane mode having a second resonance frequency upon rotation of the resonant structure and after exciting the plate, wherein the drive electrode and the sense electrode are arranged on the plate relative to a crystalline direction of the crystalline support such that the first resonance frequency and second resonance frequency are substantially equal. - View Dependent Claims (21)
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Specification