Surface shape measuring method, misalignment amount calculating method, and surface shape measuring device

• US 10,041,779 B2
• Filed: 01/24/2018
• Issued: 08/07/2018
• Est. Priority Date: 08/27/2015
• Status: Active Grant

• Current Assignee: Tokyo Seimitsu Company Limited
• Original Assignee: Tokyo Seimitsu Company Limited
• Inventors: Masuta, Hikaru
• Primary Examiner(s): FULTON, CHRISTOPHER W
• Application Number:
  US15/879,395
• Publication Number:
  US 20180149457A1
• Time in Patent Office: 195 Days
• Field of Search: 33549, 33550, 33551
• CPC Class Codes: G01B 3/22 Feeler-pin gauges, e.g. dial gauges for measuring contours or curvatures G01B5/20
• CPC Class Codes: G01B 5/08 for measuring diameters G01B5/0035 takes precedence; measuring radius of curvature G01B5/213
• CPC Class Codes: G01B 5/10 of objects while moving
• CPC Class Codes: G01B 5/20 for measuring contours or curvatures
• CPC Class Codes: G01B 5/201 for measuring roundness

Abstract

There are provided a surface shape measuring method and a surface shape measuring device which can measure the diameter of a workpiece to be measured with high precision and high reproducibility and have excellent versatility. These method include: acquiring first shape data indicating a surface shape of the workpiece with a detector being disposed on one side across a workpiece while rotating the workpiece relatively to the detector around a rotational center; acquiring second shape data indicating the surface shape of the workpiece with the detector being disposed on the other side across the workpiece while rotating the workpiece relatively to the detector around the rotational center; and calculating a shape parameter defining the surface shape of the workpiece by collating the first shape data and second shape data. In calculating the shape parameter, a deviation of the detector from the reference line is calculated based on the collation result.

Claims

1. A surface shape measuring device which measures a surface shape of a workpiece by detecting a displacement of a probe being in contact with a surface of the workpiece with a detector while rotating the workpiece relatively to the detector around a rotational center, the device comprising:

a first measuring unit configured to measure a surface shape of the workpiece in a state where the detector is disposed at one of two positions across the workpiece, the two positions on a straight line which is parallel to a reference line passing through the rotational center and is shifted from the reference line;

a second measuring unit configured to measure the surface shape of the workpiece in a state where the detector is disposed at the other of the two positions; and

a shape parameter calculation unit configured to calculate a shape parameter defining the surface shape of the workpiece by collating the measurement result by the first measuring unit and the measurement result by the second measuring unit, wherein

the shape parameter calculation unit includes a detector deviation calculation unit configured to calculate a deviation of the detector from the reference line based on the collation result between the measurement result by the first measuring unit and the measurement result by the second measuring unit.

2. The surface shape measuring device according to claim 1, wherein the shape parameter is a diameter of the workpiece.

3. The surface shape measuring device according to claim 1, wherein the shape parameter is a roundness or a degree of cylindricity.

4. A surface shape measuring method of measuring a surface shape of a workpiece by detecting a displacement of a probe being in contact with a surface of the workpiece with a detector while rotating the workpiece relatively to the detector around a rotational center, the method comprising:

a first measuring step of measuring a surface shape of the workpiece in a state where the detector is disposed at one of two positions across the workpiece, the two positions on a straight line which is parallel to a reference line passing through the rotational center and is shifted from the reference line;

a second measuring step of measuring the surface shape of the workpiece in a state where the detector is disposed at the other of the two positions; and

a shape parameter calculation step of calculating a shape parameter defining the surface shape of the workpiece by collating the measurement result by the first measuring step and the measurement result by the second measuring step, wherein

the shape parameter calculation step includes a detector deviation calculation step of calculating a deviation of the detector from the reference line based on the collation result between the measurement result by the first measuring step and the measurement result by the second measuring step.

5. The surface shape measuring method according to claim 4, wherein the shape parameter is a diameter of the workpiece.

6. The surface shape measuring method according to claim 4, wherein the shape parameter is a roundness or a degree of cylindricity.