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Ultrasonic device, probe, electronic device, and ultrasonic imaging apparatus

  • US 10,042,044 B2
  • Filed: 09/24/2014
  • Issued: 08/07/2018
  • Est. Priority Date: 09/30/2013
  • Status: Active Grant
First Claim
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1. An ultrasonic device comprising:

  • a base which defines a plurality of openings disposed in an array, and in which a base layer is formed and arranged respectively corresponding to each one of the openings;

    an interconnect layer which is a conductor, and is formed on the base layer in a thickness direction of the base;

    an insulating film that is formed on the interconnect layer in the thickness direction of the base, the insulating film and the base layer establishing a laminated structure to form a vibrating film, the insulating film and the base layer sandwiching the interconnect layer therebetween;

    a plurality of piezoelectric elements that are separated from the interconnect layer by the insulating film, the piezoelectric elements each including a first electrode and a second electrode that sandwich a piezoelectric film on the insulating film; and

    a through conductor that passes through the insulating film in the thickness direction of the base, and connects at least one of the first electrode and the second electrode to the conductor constituting the interconnect layer.

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