Display and method for manufacturing display

• US 10,042,196 B2
• Filed: 06/21/2016
• Issued: 08/07/2018
• Est. Priority Date: 07/01/2015
• Status: Active Grant

• Current Assignee: Trivale Technologies, LLC (Vector Capital Corporation)
• Original Assignee: Mitsubishi Electric Corporation
• Inventors: Iwasaka, Toshihiko, Aoki, Masaru, Inoue, Kazunori, Yamagata, Yusuke
• Primary Examiner(s): PAN, JIA X
• Application Number:
  US15/554,320
• Publication Number:
  US 20180052356A1
• Time in Patent Office: 777 Days
• CPC Class Codes: G02F 1/133345 Insulating layers G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence
• CPC Class Codes: G02F 1/133514 Colour filters
• CPC Class Codes: G02F 1/134309 characterised by their geometrical arrangement
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: G02F 1/1345 Conductors connecting electrodes to cell terminals
• CPC Class Codes: G02F 1/13458 Terminal pads
• CPC Class Codes: G02F 2201/50 Protective arrangements
• CPC Class Codes: G02F 2202/10 semiconductor
• CPC Class Codes: G02F 2202/22 Antistatic materials or arrangements
• CPC Class Codes: H01J 37/32431 Constructional details of the reactor

Abstract

The insulating properties of terminal lines on an array substrate can be maintained without adding any steps for avoiding formation of a counter electrode on the peripheral portion of a color filter substrate. A display includes an insulation film formed to cover an electrode formed on a surface of an array substrate, an oxide semiconductor film formed on a surface of a color filter substrate, and a seal member that is located between the insulation film and the oxide semiconductor film, which face each other, and that bonds the insulation film and the oxide semiconductor film together. An area surrounded by the seal member in plan view is taken as a display area. A portion of the oxide semiconductor film that corresponds to the display area is a conductor, and a portion of the oxide semiconductor film that corresponds to the outside of the display area is an insulator.

Claims

1. A display comprising:

a first substrate;

an electrode formed on a surface of said first substrate;

an insulation film formed to cover said electrode;

a second substrate;

an oxide semiconductor film formed on a surface of said second substrate; and

a seal member that is located between said insulation film and said oxide semiconductor film facing each other and that bonds said insulation film and said oxide semiconductor film together,

wherein an area that is sandwiched between said first substrate and said second substrate and surrounded by said seal member in plan view is taken as a display area, and

a portion of said oxide semiconductor film that corresponds to said display area is a conductor, and a portion of said oxide semiconductor film that corresponds to an outside of said display area is an insulator.

2. The display according to claim 1, further comprising:

a silicon oxide film formed on a surface of the portion of said oxide semiconductor film that corresponds to said display area.

3. The display according to claim 1, further comprising:

a silicon oxide film formed on a surface of a portion of said second substrate that corresponds to said display area,

wherein said oxide semiconductor film covers said silicon oxide film and is formed on the surface of said second substrate.

4. The display according to claim 1, wherein

a boundary between the portion of said oxide semiconductor film that is a conductor and the portion of said oxide semiconductor film that is an insulator is located at a surface of said oxide semiconductor film that is in contact with said seal member.

5. The display according to claim 4, wherein

said boundary between the portion of said oxide semiconductor film that is a conductor and the portion of said oxide semiconductor film that is an insulator is located at an end portion on said display area side out of the surface of said oxide semiconductor film that is in contact with said seal member.

6. The display according to claim 1, wherein

said oxide semiconductor film is one of InGaZnO-, InZnO-, InGaO-, InSnO-, InSnZnO-, InGaZnSnO-, InAlZnO-, InHfZnO-, InZrZnO-, InMgZnO-, and InYZnO-based oxide semiconductor films, where Hf is hafnium, Zr is zirconium, Mg is magnesium, and Y is yttrium.

7. A method for manufacturing a display, comprising:

forming an electrode on a surface of a first substrate;

forming an insulation film that covers said electrode;

forming an oxide semiconductor film on a surface of a second substrate; and

bonding said insulation film and said oxide semiconductor film with a seal member, said insulation film and said oxide semiconductor film facing each other,

wherein an area that is sandwiched between said first substrate and said second substrate and surrounded by said seal member in plan view is taken as a display area, and

a portion of said oxide semiconductor film that corresponds to said display area is a conductor, and a portion of said oxide semiconductor film that corresponds to an outside of said display area is an insulator.

8. The method for manufacturing a display according to claim 7, wherein

plasma treatment using gas that contains hydrogen is performed on the portion of said oxide semiconductor film that corresponds to said display area, and

plasma treatment using gas that contains N₂O is performed on the portion of said oxide semiconductor film that corresponds to the outside of said display area.

9. The method for manufacturing a display according to claim 7, further comprising:

forming a silicon oxide film on a surface of the portion of said oxide semiconductor film that corresponds to said display area.

10. The method for manufacturing a display according to claim 7, further comprising:

forming a silicon oxide film on a surface of a portion of said second substrate that corresponds to said display area, and

forming an oxide semiconductor film on a surface of said silicon oxide film and on a surface of said second substrate.

11. The method for manufacturing a display according to claim 9, further comprising:

performing ultraviolet treatment on the portion of said oxide semiconductor film that corresponds to said display area; and

performing plasma treatment using gas that contains N₂O on the portion of said oxide semiconductor film that corresponds to the outside of said display area.

12. The method for manufacturing a display according to claim 11, wherein

said ultraviolet treatment, which is performed on the portion of said oxide semiconductor film that corresponds to said display area, includes applying ultraviolet light having a wavelength of less than or equal to 480 nm.

13. The method for manufacturing a display according to claim 7, wherein

said oxide semiconductor film is one of InGaZnO-, InZnO-, InGaO-, InSnO-, InSnZnO-, InGaZnSnO-, InAlZnO-, InHfZnO-, InZrZnO-, InMgZnO-, and InYZnO-based oxide semiconductor films, where Hf is hafnium, Zr is zirconium, Mg is magnesium, and Y is yttrium.