Information processing device, information processing method, computer-readable recording medium, and inspection system
First Claim
1. An information processing device for inspecting a target image that contains an image of an inspection target, the information processing device comprising:
- circuitry including at least a processor and a memory, the circuitry configured to;
perform pre-processing for comparing the target image with a reference image or a plurality of reference images;
define, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI, and calculate a feature value of the ROI;
calculate an outlier from comparison with feature values of images corresponding to the ROI and the surrounding regions in the reference images, the outlier numerically indicating singularity of an image at the ROI;
provide, based on the outlier, an indicator to be used for the inspection; and
determine defections in the inspection target from the target image by using the indicator.
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Accused Products
Abstract
An information processing device inspects a target image that contains an image of an inspection target. The information processing device includes a pre-processor, a first calculator, a second calculator, and a determiner. The pre-processor is configured to perform pre-processing for comparing the target image with a reference image or a plurality of reference images. The first calculator is configured to define, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI, and calculate a feature value of the ROI. The second calculator is configured to calculate an outlier from comparison with feature values of images corresponding to the ROI and the surrounding regions in the reference images. The outlier numerically indicates singularity of an image at the ROI. The determiner is configured to provide, based on the outlier, an indicator to be used for the inspection.
11 Citations
14 Claims
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1. An information processing device for inspecting a target image that contains an image of an inspection target, the information processing device comprising:
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circuitry including at least a processor and a memory, the circuitry configured to; perform pre-processing for comparing the target image with a reference image or a plurality of reference images; define, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI, and calculate a feature value of the ROI; calculate an outlier from comparison with feature values of images corresponding to the ROI and the surrounding regions in the reference images, the outlier numerically indicating singularity of an image at the ROI; provide, based on the outlier, an indicator to be used for the inspection; and determine defections in the inspection target from the target image by using the indicator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method performed in an information processing device to quantify a target image that contains an image of an inspection target, the method comprising:
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performing pre-processing for comparing the target image with a reference image or a plurality of reference images; defining, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI to calculate a feature value of the ROI; calculating an outlier from comparison with feature values of images corresponding to the ROI and the surrounding regions in the reference images, the outlier numerically indicating singularity of an image at the ROI; providing, based on the outlier, an indicator to be used for the inspection; and determining defections in the inspection target from the target image by using the indicator. - View Dependent Claims (10, 11, 12, 13)
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14. An inspection system for inspecting an inspection target, the inspection system comprising:
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circuitry including at least a processor and a memory, the circuitry configured to; acquire a target image that contains an image of the inspection target; perform pre-processing for comparing the target image with a reference image or a plurality of reference images; define, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI, and calculate a feature value of the ROI; calculate an outlier from comparison with feature values of images, in the reference images, that correspond to the ROI and the surrounding regions, the outlier numerically indicating singularity of an image at the ROI; provide, based on the outlier, an indicator to be used for the inspection; and reduce noise components included in the outlier when the outlier is obtained, wherein the circuitry provides the indicator by using the outlier from which the noise components have been cut out, and determines defection in the inspection target from the target image by using the indicator.
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Specification