Inspection device and substrate processing apparatus

• US 10,043,694 B2
• Filed: 04/22/2016
• Issued: 08/07/2018
• Est. Priority Date: 04/23/2015
• Status: Active Grant

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: SCREEN Holdings Co., Ltd.
• Inventors: Matsuo, Tomohiro, Nakagawa, Koji
• Primary Examiner(s): Niu, Feng
• Application Number:
  US15/136,336
• Publication Number:
  US 20160314575A1
• Time in Patent Office: 837 Days
• Field of Search: None
• CPC Class Codes: G03F 7/7065 Defects, e.g. optical inspection of patterned layer for defects
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/001 using an image reference approach
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like

Abstract

Surface image data of a non-defective sample substrate is acquired, and surface image data of a substrate to be inspected is acquired. Differences between gradation values are calculated for pixels of the surface image data of the substrate to be inspected and corresponding pixels of the surface image data of the sample substrate. A constant value is added to the difference between gradation values of each pixel. In the case where the value acquired by addition is in a predetermined allowable range, it is determined that there is no defect for the substrate to be inspected. In the case where the value acquired by addition is outside of the allowable range, it is determined that the substrate to be inspected is defective. A defect in appearance on the substrate to be inspected is detected based on a pixel of which the value is outside of the allowable range.

Claims

1. An inspector that performs appearance inspection for a substrate, comprising:

an image data acquirer comprising a sensor and a CPU that acquires image data of a substrate with no defect in appearance as first image data, and acquires image data of a substrate to be inspected as second image data by picking up an image of the substrate to be inspected;

the CPU being programmed to set an allowable range for determining whether there is a defect in appearance on the substrate; and

the CPU further being programmed to calculate values related to differences between gradation values of pixels of the first image data acquired by the image data acquirer and gradation values of pixels of the second image data acquired by the image data acquirer as pieces of difference information;

wherein the pixels of the first and second image data correspond to each other; and

to determine whether there is a defect in appearance on the substrate to be inspected based on whether each piece of calculated difference information is in the allowable range set by the programmed CPU, wherein

the programmed CPU calculates, for each of a plurality of predetermined target pixels of the first image data, differences between gradation values of a target pixel and a plurality of pixels in a constant region including the target pixel;

determines, for each of the plurality of predetermined target pixels of the first image data, a representative value in a range from a minimum value to a maximum value of the calculated differences by a predetermined method based on the calculated differences and respectively sets values related to a minimum value and a maximum value of a plurality of representative values respectively determined for the plurality of predetermined target pixels as a lower limit value and an upper limit value of the allowable range.

2. The inspector according to claim 1, wherein

the predetermined method is a method of determining, for each of the plurality of predetermined target pixels of the first image data, an average value of the differences between a gradation value of the target pixel and gradation values of the plurality of pixels in the constant region including the target pixels as the representative value.

3. The inspector according to claim 1, wherein

the predetermined method is a method of determining, for each of the plurality of predetermined target pixels of the first image data, a maximum value of the differences between a gradation value of the target pixel and gradation values of the plurality of pixels in the constant region including the target pixels as the representative value.

4. The inspector according to claim 1, wherein

the pieces of difference information include values acquired by addition of a constant value to differences between gradation values of pixels of the first image data and gradation values of pixels of the second image data, the pixels of the first and second image data being considered to correspond to each other, and

values related to the minimum value and the maximum value of the plurality of representative values include values acquired by respective addition of the constant value to the minimum value and the maximum value of the plurality of representative values.

5. The inspector according to claim 1, wherein

the programmed CPU sets a first value smaller than the minimum value of the plurality of representative values by a predetermined value as the lower limit value of the allowable range instead of the value related to the minimum value of the plurality of representative values, and sets a second value larger than the maximum value of the plurality of representative values by a predetermined value as the upper limit value of the allowable range instead of the value related to the maximum value of the plurality of representative values.

6. The inspector according to claim 1, wherein

the programmed CPU detects a defect in appearance on the substrate based on a pixel of which a piece of difference information is outside of the allowable range.

7. The inspector according to claim 1, wherein

the programmed CPU determines that there is a defect in appearance on the substrate to be inspected in the case where the number of pieces of difference information outside of the allowable range is not less than a predetermined number.

8. The inspector according to claim 1, wherein

the programmed CPU performs smoothing of the first image data acquired by the image data acquirer, produces first correction image data by subtracting a gradation value of each pixel of first image data after smoothing from a gradation value of each pixel of first image data before smoothing, performs smoothing of the second image data acquired by the image data acquirer, produces second correction image data by subtracting a gradation value of each pixel of second image data after smoothing from a gradation value of each pixel of second image data before smoothing, and calculates differences between gradation values of pixels of the produced first correction data and gradation values of pixels of the produced second correction data, the pixels of the produced first and second correction data being considered to correspond to each other, as the pieces of difference information for the pixels of the first image data and corresponding pixels of the second image data, and

the programmed CPU calculates, for each of a plurality of target pixels of the first correction image data produced by the determiner instead of the first image data, differences between a gradation value of the target pixel and gradation values of the plurality of pixels in the constant region including the target pixel, and determines, for each of the plurality of target pixels of the first correction image data produced by the determiner instead of the first image data, the representative value in the range from the minimum value to the maximum value of the plurality of differences by the predetermined method based on the plurality of calculated differences.

9. A substrate processor arranged to be adjacent to an exposer that performs exposure processing on a substrate, comprising:

a coater that forms a photosensitive film on the substrate before the exposure processing by the exposer;

a developer that performs development processing on the photosensitive film on the substrate before the exposure processing by the exposer; and

the inspector according to claim 1 that performs appearance inspection for the substrate after the formation of the photosensitive film by the coater.

10. The substrate processor according to claim 9, wherein

the inspector performs the appearance inspection for the substrate after the formation of the photosensitive film by the coater and the development processing by the developer.