Sensor device, electronic apparatus, and moving object

• US 10,048,072 B2
• Filed: 12/02/2015
• Issued: 08/14/2018
• Est. Priority Date: 12/11/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Shindo, Takehiko
• Primary Examiner(s): Lindsay, Jr., Walter L
• Assistant Examiner(s): Labombard, Ruth
• Application Number:
  US14/956,732
• Publication Number:
  US 20160169675A1
• Time in Patent Office: 986 Days
• Field of Search: 73510, 7351432, 7350404
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A sensor device includes a first physical quantity sensor, a drive section adapted to generate a drive signal for driving the first physical quantity sensor with a drive frequency, a second physical quantity sensor, and an output section adapted to generate an output signal based on a signal from the second physical quantity sensor and a signal having a frequency n times (n is an integer equal to or greater than 1) as high as the drive frequency.

Claims

1. A sensor device comprising:

a first physical quantity sensor;

a drive section adapted to generate a drive signal and drive the first physical quantity sensor with a drive frequency of the drive signal;

a second physical quantity sensor; and

an output section adapted to generate an output signal based on a signal from the second physical quantity sensor and a signal having a frequency n times as high as the drive frequency assuming n is an integer equal to or greater than 1, wherein

the signal having the frequency n times as high as the drive frequency is applied to the second physical quantity sensor.

2. The sensor device according to claim 1, wherein

the signal having the frequency n times as high as the drive frequency is a signal from the drive section.

3. The sensor device according to claim 2, further comprising:

a filter section, to which the signal from the drive section is input, and which has filter characteristics of transmitting a signal in a first band including the drive frequency, and attenuating a signal in a second band higher than the first band, wherein

the signal having the frequency n times as high as the drive frequency is a signal via the filter section.

4. The sensor device according to claim 3, further comprising:

a level-shift section adapted to decrease an amplitude of the signal from the drive section, wherein

the signal having the frequency n times as high as the drive frequency is a signal from the level-shift section.

5. An electronic apparatus comprising:

the sensor device according to claim 4.

6. An electronic apparatus comprising:

the sensor device according to claim 3.

7. A moving object comprising:

the sensor device according to claim 3.

8. An electronic apparatus comprising:

the sensor device according to claim 2.

9. A moving object comprising:

the sensor device according to claim 2.

10. The sensor device according to claim 1, further comprising:

a waveform shaping section to which a signal from the drive section is input, wherein

the signal having the frequency n times as high as the drive frequency is a signal from the waveform shaping section.

11. The sensor device according to claim 10, further comprising:

a level-shift section adapted to decrease an amplitude of the signal from the drive section, wherein

the signal having the frequency n times as high as the drive frequency is a signal from the level-shift section.

12. An electronic apparatus comprising:

the sensor device according to claim 11.

13. The sensor device according to claim 10, wherein

the first physical quantity sensor is an angular velocity sensor, and

the second physical quantity sensor is an acceleration sensor.

14. An electronic apparatus comprising:

the sensor device according to claim 10.

15. The sensor device according to claim 1, further comprising:

a level-shift section adapted to decrease an amplitude of a signal from the drive section, wherein

the signal having the frequency n times as high as the drive frequency is a signal from the level-shift section.

16. The sensor device according to claim 15, wherein

the first physical quantity sensor is an angular velocity sensor, and

the second physical quantity sensor is an acceleration sensor.

17. An electronic apparatus comprising:

the sensor device according to claim 15.

18. The sensor device according to claim 1, wherein

the first physical quantity sensor is an angular velocity sensor, and

the second physical quantity sensor is an acceleration sensor.

19. An electronic apparatus comprising:

the sensor device according to claim 1.

20. A moving object comprising:

the sensor device according to claim 1.