Relative pressure sensor
First Claim
1. Pressure measurement sensor, comprising:
- a pressure measuring cell having a measuring diaphragm and a main body, wherein the measuring diaphragm is connected to the main body in a pressure-tight manner by forming a measuring chamber between the main body and the measuring diaphragm, wherein the measuring chamber is exposable to a reference pressure via a reference pressure channel, which extends from the measuring chamber through the main body to a rear face of the main body, which rear face is facing away from the measuring chamber;
a clamping ring; and
a housing, having at least one housing body, which contains a measuring cell chamber inside, wherein the pressure measuring cell is arranged inside the measuring cell chamber and is clamped in an axial position by the clamping ring, which clamping ring is in mesh with the housing body, wherein the housing has a reference air opening, whereby the reference pressure channel communicates with the reference air opening via a reference air path, which runs through the measuring cell chamber and has a path volume that is separate from the measuring cell chamber, wherein the reference air path has a section that runs along the rear side of the main body, wherein the section is bounded by a guide body and the rear face of the main body, wherein the guide body is clamped against the rear face of the main body—
in particular, by a shunt—
and covers an opening of the reference pressure channel in the rear face of the main body.
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Accused Products
Abstract
A relative pressure sensor (1) includes a pressure measuring cell (10) having a measuring diaphragm (12), a main body (14) which is connected to said measuring diaphragm, and a the measuring chamber between the measuring diaphragm and main body, a reference pressure being applied to the measuring chamber by a reference pressure channel (18) which runs from a rear face (16) of the main body (14) through the main body (14); a clamping ring (38); and a housing (40) which has at least one housing body (42) with a measuring cell chamber (46), wherein the pressure measuring cell (10) is clamped in the measuring cell chamber (46) by the clamping ring (38). The housing has a reference air opening (48) which communicates with the reference pressure channel (18) by a reference air path which has a path volume which is separate from the volume of the measuring cell chamber, wherein the reference air path has a section which runs along the rear face of the main body, wherein the section is bounded by the rear face of the main body and a guide body, which guide body is clamped in against the rear face of the main body and covers an opening of the reference pressure channel (18) in the rear face of the main body.
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Citations
11 Claims
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1. Pressure measurement sensor, comprising:
a pressure measuring cell having a measuring diaphragm and a main body, wherein the measuring diaphragm is connected to the main body in a pressure-tight manner by forming a measuring chamber between the main body and the measuring diaphragm, wherein the measuring chamber is exposable to a reference pressure via a reference pressure channel, which extends from the measuring chamber through the main body to a rear face of the main body, which rear face is facing away from the measuring chamber;
a clamping ring; and
a housing, having at least one housing body, which contains a measuring cell chamber inside, wherein the pressure measuring cell is arranged inside the measuring cell chamber and is clamped in an axial position by the clamping ring, which clamping ring is in mesh with the housing body, wherein the housing has a reference air opening, whereby the reference pressure channel communicates with the reference air opening via a reference air path, which runs through the measuring cell chamber and has a path volume that is separate from the measuring cell chamber, wherein the reference air path has a section that runs along the rear side of the main body, wherein the section is bounded by a guide body and the rear face of the main body, wherein the guide body is clamped against the rear face of the main body—
in particular, by a shunt—
and covers an opening of the reference pressure channel in the rear face of the main body.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
Specification