Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method

• US 10,048,600 B2
• Filed: 03/30/2015
• Issued: 08/14/2018
• Est. Priority Date: 03/28/2014
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shirato, Akinori
• Primary Examiner(s): Iacoletti, Michelle M
• Application Number:
  US15/129,426
• Publication Number:
  US 20170108716A1
• Time in Patent Office: 1,233 Days
• CPC Class Codes: G02F 1/1303 Apparatus specially adapted to the manufacture of LCDs
• CPC Class Codes: G03F 7/0005 Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
• CPC Class Codes: G03F 7/20 Exposure; Apparatus therefor photographic printing apparatus for making copies G03B27/00
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 9/7049 Technique, e.g. interferometric

Abstract

Provided is a substrate stage apparatus that is provided with: a substrate holder that can be moved in a plane including an X-axis and a Y-axis; a head unit that can be moved synchronously with the substrate holder along the Y-axis; an encoder system for measuring substrate position, the system including a scale disposed on the substrate holder, and heads disposed on the head unit, and acquiring the X-axis direction and the Y-axis direction position information of the substrate holder on the basis of the output of the heads; an encoder system for measuring head-unit position, the system acquiring the Y-axis direction position information of the head unit; and a position control system that controls the position of the substrate holder within the XY plane on the basis of the output of the encoder system for measuring substrate position and the encoder system for measuring head-unit position.

Claims

1. A movable body apparatus, comprising:

a first movable body movable along a predetermined two-dimensional plane which includes a first direction and a second direction orthogonal to each other;

a second movable body movable synchronously with the first movable body along the first direction;

a first measurement system, including a first encoder system that has one of a scale and a head disposed at the first movable body and the other of the scale and the head disposed at the second movable body, the first measurement system acquiring position information of the first movable body at least in the second direction on the basis of output of the head;

a second measurement system that acquires position information of the second movable body in the first direction; and

a position control system that performs position control of the first movable body within the two-dimensional plane, on the basis of output of the first measurement system and the second measurement system.

2. The movable body apparatus according to claim 1, wherein

the second measurement system comprises a second encoder system that has one of a scale and a head provided at the second movable body, and the other of the scale and the head disposed at a predetermined fixed member.

3. The movable body apparatus according to claim 1, wherein

the first encoder system of the first measurement system can acquire position information of the first movable body in the first direction and the second direction, and

the position control system performs position control of the first movable body in the first direction, on the basis of position information of the second movable body in the first direction acquired by the second measurement system and relative position information of the first movable body with respect to the second movable body in the first direction acquired by the first measurement system.

4. The movable body apparatus according to claim 1, wherein

the second movable body is driven in the first direction independently from the first movable body.

5. The movable body apparatus according to claim 1, wherein

a plurality of the second movable bodies are disposed in the first direction at a predetermined spacing, and

a plurality of the first encoder systems are disposed, by the other of the scale and the head disposed on each of the plurality of the second movable bodies and one of the scale and the head disposed on the first movable body corresponding to the other of the scale and the head.

6. The movable body apparatus according to claim 1, wherein

the first encoder system comprises a plurality of scales placed apart from one another in the first direction, and a plurality of heads placed apart from one another in the first direction, and

the first movable body and the second movable body moves relatively along the first direction, between a position where the plurality of heads all face a scale located closest to one side of the first direction and a position where the plurality of heads all face a scale located closest to the other side of the first direction.

7. The movable body apparatus according to claim 6, wherein

spacing between an adjacent pair of the heads is wider than spacing between an adjacent pair of the scales.

8. The movable body apparatus according to claim 6, wherein

at least three of the scales are arranged along the first direction at a predetermined spacing.

9. The movable body apparatus according to claim 1, wherein

the first movable body is disposed movable in a direction intersecting the two-dimensional plane, and

a head of the first encoder system is driven in the direction intersecting the two-dimensional plane, according to position change quantity of the first movable body in the direction intersecting the two-dimensional plane.

10. An exposure apparatus, comprising:

the movable body apparatus according to claim 1 in which a predetermined object is held by the first movable body; and

a pattern formation apparatus that, while driving a pattern holding body which holds a predetermined pattern in the second direction synchronously with the first movable body, forms the pattern on the object via the pattern holding body using an energy beam.

11. The exposure apparatus according to claim 10, further comprising:

a third measurement system which includes a third encoder system for acquiring position information of the pattern holding body at least in the second direction, on the basis of output of a head disposed at a predetermined fixed member; and

a fourth measurement system that measures relative position information between the head of the third encoder system and the scale of the first encoder system.

12. The exposure apparatus according to claim 10, wherein

the object is a substrate used in a flat panel display.

13. The exposure apparatus according to claim 12, wherein

the substrate has at least one of a side length and a diagonal length that is 500 mm and over.

14. A manufacturing method of a flat panel display, comprising:

exposing the object using the exposure apparatus according to claim 12; and

developing the object which has been exposed.

15. A device manufacturing method, comprising:

exposing the object using the exposure apparatus according to claim 10; and

developing the object which has been exposed.

16. A movable body apparatus, comprising:

a first movable body movable in a first direction and a second direction that intersect each other;

a second movable body movable in the first direction;

a first measurement system, including a first measurement device that has one of a grating member and a head movable in the first direction disposed at the first movable body and the other of the grating member and the head disposed at the second movable body, the first measurement system acquiring position information of the first movable body in the second direction on the basis of output of the head;

a second measurement system that acquires position information of the second movable body in the first direction; and

a control system that performs position control of the first movable body in the first direction and the second direction, on the basis of the position information acquired by the first measurement system and the second measurement system.

17. An exposure apparatus, comprising:

the movable body apparatus according to claim 16 in which a predetermined object is held by the first movable body; and

a pattern formation apparatus that, while driving a pattern holding body which holds a predetermined pattern in the second direction synchronously with the first movable body, forms the pattern on the object via the pattern holding body using an energy beam.

18. The exposure apparatus according to claim 17, further comprising:

a third measurement system which includes a third encoder system for acquiring position information of the pattern holding body at least in the second direction, on the basis of output of a head disposed at a predetermined fixed member; and

a fourth measurement system that measures relative position information between the head of the third encoder system and the scale of the first encoder system.

19. The exposure apparatus according to claim 17, wherein

the object is a substrate used in a flat panel display.

20. The exposure apparatus according to claim 19, wherein

the substrate has at least one of a side length and a diagonal length that is 500 mm and over.

21. A manufacturing method of a flat panel display, comprising:

exposing the object using the exposure apparatus according to claim 19; and

developing the object which has been exposed.

22. A device manufacturing method, comprising:

exposing the object using the exposure apparatus according to claim 17; and

developing the object which has been exposed.

23. A movable body drive method in which a movable body is driven along a predetermined two-dimensional plane that includes a first direction and a second direction orthogonal to each other, comprising:

driving a first movable body in the second direction, on the basis of output of an encoder system that has a head disposed at one of the first movable body and a second movable body placed facing the first movable body, and a scale disposed at the other of the first movable body and the second movable body;

driving the first movable body in the first direction;

driving the second movable body in the first direction synchronously with the first movable body when the first movable body moves in the first direction; and

performing position control of the first movable body in the two-dimensional plane, on the basis of position information of the first movable body in the second direction acquired from the output of the encoder system and position information of the second movable body in the first direction.