System and method for lithography with leveling sensor

• US 10,048,604 B2
• Filed: 07/12/2016
• Issued: 08/14/2018
• Est. Priority Date: 02/03/2012
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Chen, Li-Jui
• Primary Examiner(s): Riddle, Christina
• Application Number:
  US15/207,861
• Publication Number:
  US 20160320709A1
• Time in Patent Office: 763 Days
• Field of Search: 355 52, 355 53, 355 55, 355 67- 71, 355 72- 77, 430 5, 430 8, 430 22, 430 30, 430311, 430312, 2504921, 2504922, 25049222, 250548, 356 401, 356 404, 356 408, 356601, 356609, 356614, 356624, 356496, 356498, 356500, 356508, 356509, 356510, 356511, 356516
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• CPC Class Codes: G03F 9/7034 Leveling

Abstract

Disclosed is a lithography system. The lithography system includes a radiation source for providing radiation energy; a reticle stage configured to hold a reticle; an imaging lens module configured to direct the radiation energy onto a substrate to form an image of the reticle; and a leveling sensor configured to receive a leveling signal from an exposure field of the reticle secured on the reticle stage.

Claims

1. A lithography system comprising:

a reticle stage configured to hold a reticle;

a substrate stage configured to hold a substrate and operable to move relative to the reticle stage;

a leveling signal source configured to direct a leveling signal at the reticle secured on the reticle stage, wherein the leveling signal source is secured to the substrate stage such that the leveling signal source moves with the substrate stage relative to the reticle stage;

a leveling sensor configured to receive the leveling signal from the reticle secured on the reticle stage, wherein the leveling sensor is secured to the substrate stage such that the leveling sensor moves with the substrate stage relative to the reticle stage;

a leveling analysis module operable to receive the leveling signal from the leveling sensor and generate a control parameter based on the received leveling signal;

a control module operable to receive the control parameter from the leveling analysis module and move the reticle stage based on the control parameter; and

wherein the leveling signal source and the leveling sensor are secured to an upper surface of the substrate stage.

2. The lithography system of claim 1, wherein the leveling analysis module is operable to calculate a reticle flatness measurement for the reticle based on the received leveling signal, and

wherein the control parameter is associated with a focus length based on the reticle flatness measurement.

3. The lithography system of claim 1, wherein the leveling analysis module is operable to calculate a reticle overlay error measurement for the reticle based on the received leveling signal, and

wherein the control parameter is associated with a tilt angle of the reticle based on the reticle overlay error measurement.

4. The lithography system of claim 1, wherein the substrate stage is operable to move in a first direction and a second direction that is perpendicular to the first direction such that the leveling signal source moves with the substrate stage in the first direction and the second direction.

5. The lithography system of claim 1, further comprising a projection module, and

wherein the leveling signal traverses through the projection module.

6. The lithography system of claim 1, wherein the leveling signal source is configured to direct a reference signal at the leveling sensor.

7. The lithography system of claim 1, further comprising a radiation source emitting radiation energy having an extreme ultraviolet wavelength.

8. A lithography system comprising:

a reticle stage configured to hold a reticle;

a substrate stage configured to hold a substrate;

a leveling signal source configured to direct a leveling signal at the reticle;

a leveling sensor configured to receive the leveling signal from the reticle, wherein the leveling signal source and the leveling sensor are secured to an upper surface of the substrate stage;

a leveling analysis module operable to analyze the leveling signal; and

a control module coupled to the leveling analysis module and configured to control the reticle stage according to feedback from the leveling analysis module.

9. The lithography system of claim 8, wherein the leveling analysis module is operable to analyze the leveling signal to calculate at least one of a reticle flatness measurement and a reticle overlay error measurement for the reticle.

10. The lithography system of claim 9, wherein the leveling analysis module is operable to generate a first control parameter associated with a focus length based on at least one of the reticle flatness measurement and the reticle overlay error measurement and generate a second control parameter associated with a tilt angle of the reticle based on at least one of the reticle flatness measurement and the reticle overlay error measurement, and

wherein the control module is operable to receive the first and second control parameters and control the reticle stage based on the first and second control parameters.

11. The lithography system of claim 8, wherein the control module is operable to control the reticle stage by moving the reticle stage along a first axis and a second axis, the second axis being different than the first axis.

12. The lithography system of claim 8, wherein the reticle stage includes a vacuum clamping feature configured to hold the reticle.

13. The lithography system of claim 8, wherein the reticle stage includes an e-chuck clamping feature configured to hold the reticle.

14. The lithography system of claim 8, further comprising a lens element disposed above the leveling signal source such that the leveling signal source directs the leveling signal at the reticle through the lens element.

15. A method comprising:

scanning a reticle using a leveling signal, wherein scanning the reticle using the leveling signal includes moving a leveling signal source producing the leveling signal while scanning the reticle, wherein the leveling signal source is operable to move in a first direction and a second direction, the second direction being perpendicular to the first direction;

after scanning the reticle, generating a control parameter based on the leveling signal;

moving the reticle based on the control parameter; and

after moving the reticle based on the control parameter, applying radiation energy to the reticle.

16. The method of claim 15, further comprising determining at least one of a reticle flatness measurement and a reticle overlay error measurement for the reticle based on the leveling signal, and

wherein the control parameter is associated with a focus length based on at least one of the reticle flatness measurement and the reticle overlay error measurement.

17. The method of claim 15, further comprising determining at least one of a reticle flatness measurement and a reticle overlay error measurement for the reticle based on the leveling signal, and

wherein the control parameter is associated with a tilt angle of the reticle based on at least one of the reticle flatness measurement and the reticle overlay error measurement.

18. The method of claim 15, further comprising clamping the reticle to a reticle stage prior to scanning the reticle using the leveling signal.

19. The method of claim 15, wherein scanning the reticle using the leveling signal includes scanning an exposure field of the reticle.

20. The method of claim 15, wherein scanning the reticle using the leveling signal includes directing the leveling signal through a projection module disposed over the leveling signal source.