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Micromachined monolithic 3-axis gyroscope with single drive

  • US 10,050,155 B2
  • Filed: 01/25/2016
  • Issued: 08/14/2018
  • Est. Priority Date: 09/18/2010
  • Status: Active Grant
First Claim
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1. An inertial measurement system, comprising:

  • a device layer including;

    a 3-axis gyroscope including a single proof mass formed in an x-y plane of a device layer, the single proof mass of the 3-axis gyroscope including;

    symmetrical x-axis proof mass sections; and

    a z-axis gyroscope coupling flexure coupled to the symmetric x-axis proof mass sections;

    a sense electrode included within the single proof mass of the 3-axis gyroscope; and

    a 3-axis accelerometer including a single proof mass formed in the x-y plane of the device layer adjacent the 3-axis gyroscope,the 3-axis gyroscope including a central suspension configured to suspend the single proof mass of the 3-axis gyroscope about a single, central gyroscope anchor, andthe 3-axis accelerometer including separate x, y, and z-axis flexure bearings configured to suspend a single proof mass of the 3-axis accelerometer about a single, central accelerometer anchor.

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