Optical beam positioning unit for atomic force microscope

• US 10,054,612 B2
• Filed: 07/05/2016
• Issued: 08/21/2018
• Est. Priority Date: 03/14/2013
• Status: Active Grant

• Current Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Original Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Inventors: Labuda, Aleksander, Cleveland, Jason, Walters, Deron, Proksch, Roger
• Primary Examiner(s): Johnston, Phillip A
• Assistant Examiner(s): Tsai, Hsien
• Application Number:
  US15/202,427
• Publication Number:
  US 20160313368A1
• Time in Patent Office: 777 Days
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

An optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.

Claims

1. An cantilever based measuring system, comprising:

a target object that is configured for measuring a surface;

an objective lens, along an optical path including said target object,

a first optical beam positioning unit, comprising;

a first light source, emitting light having a first characteristic;

a first steering mirror that is rotatable in two orthogonal axes based on a control signal;

a controller, producing a control signal for moving the first steering mirror, to move the position of the first beam reflected from the first steering mirror; and

a lens group which collimates the first beam and directs a collimated first beam to a first location, where said lens group translating along its axis to change an axial location of a final focused spot relative to a front focal plane of the objective lens without moving the objective lens;

wherein said first optical beam positioning unit directs the collimated first beam to the first location,

a first mirror at the first location, directing the collimated first beam to the objective lens;

a second optical beam positioning unit, comprising;

a second light source, emitting second light having a second characteristic different than the first characteristic;

a second steering mirror that is rotatable in two orthogonal axes based on a control signal;

said controller producing a control signal for moving the second steering mirror, to move the position of the second light reflected from the second steering mirror,

and

a second lens group which collimates the second beam and directs a collimated second beam to a second location, where said second lens group translating along its axis to change an axial location of a final focused spot relative to a front focal plane of the objective lens without moving the objective lens;

wherein said second optical beam positioning unit directs the beam to the second location,

a second mirror at the second location, directing the beam to the objective lens; and

a photodetector;

wherein the objective lens directs the collimated first beam and collimated second beam to the target object, and receives returned beams from the target object indicative of reflections of the collimated first beam and collimated second beam, based on movement of the cantilever and directing the returned beams to the photodetector,

said photodetector producing an output signal indicative of characteristics of a surface adjacent the cantilever.

2. The system as in claim 1 wherein the target object is a surface of a cantilever with a first part that reflects a light beam and a tip at one end of the cantilever, said tip of the cantilever mounted adjacent a holding stage for a sample that has the surface being characterized.

3. The system as in claim 1 wherein said characteristic is wavelength and the first and second beams have different wavelengths.

4. The system as in claim 3, where the first and second mirrors are dichroic mirrors,

where a first dichroic mirror is tuned to reflect a first wavelength of the first beam, and where a second dichroic mirror is tuned to reflect a second wavelength of the second beam.

5. The system as in claim 1, wherein said first mirror is controlled to pivot in three-dimensional space to set an axial position of its focus and an axial position of a reflected beam as geometrically constrained to move along a mathematically defined surface.

6. The system as in claim 1, wherein said first mirror is positioned to have a conjugate focal plane as an optical image near a front focal plane of the objective lens, and positioned so that a tilt angle of the conjugate focal plane matches a tilt angle of the target object.