Temperature compensated beam resonator
First Claim
1. A microelectromechanical resonator device comprising,a support structure,a resonator suspended to the support structure and having at least one beam, the beam;
- having a longitudinal axis,being doped to a doping concentration with an n-type doping agent, andbeing capable of resonating in a length-extensional, flexural or torsional resonance mode,an actuator for exciting said length-extensional, flexural or torsional resonance mode into the resonator,wherein the support structure and the resonator are manufactured from a (100) oriented semiconductor wafer or a (110) oriented semiconductor wafer,wherein said doping concentration is at least 1.1*1020 cm−
3, andwherein the longitudinal axis of the beam is orientedat an angle of 17±
10 degrees with respect to the [100] crystal direction of the wafer if said resonance mode is length-extensional or flexural, andat an angle of 0±
35 degrees with respect to the [110] crystal direction of the wafer if said resonance mode is torsional.
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Abstract
The invention provides a microelectromechanical resonator device comprising a support structure and a resonator manufactured on a (100) or (110) semiconductor wafer, wherein the resonator is suspended to the support structure and comprises at least one beam being doped to a doping concentration of 1.1*1020 cm−3 or more with an n-type doping agent and is being capable of resonating in a length-extensional, flexural resonance or torsional mode upon suitable actuation. In particular, the doping concentration and angle of the beam are chosen so as to simultaneously produce zero or close to zero second order TCF, and even more preferably zero or close to zero first and second order TCFs, for the resonator in said resonance mode, thus providing a temperature stable resonator.
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Citations
22 Claims
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1. A microelectromechanical resonator device comprising,
a support structure, a resonator suspended to the support structure and having at least one beam, the beam; -
having a longitudinal axis, being doped to a doping concentration with an n-type doping agent, and being capable of resonating in a length-extensional, flexural or torsional resonance mode, an actuator for exciting said length-extensional, flexural or torsional resonance mode into the resonator, wherein the support structure and the resonator are manufactured from a (100) oriented semiconductor wafer or a (110) oriented semiconductor wafer, wherein said doping concentration is at least 1.1*1020 cm−
3, andwherein the longitudinal axis of the beam is oriented at an angle of 17±
10 degrees with respect to the [100] crystal direction of the wafer if said resonance mode is length-extensional or flexural, andat an angle of 0±
35 degrees with respect to the [110] crystal direction of the wafer if said resonance mode is torsional. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification