Fabrication of enclosed nanochannels using silica nanoparticles

• US 10,060,904 B1
• Filed: 09/28/2015
• Issued: 08/28/2018
• Est. Priority Date: 10/17/2005
• Status: Active Grant

• Current Assignee: UNM Rainforest Innovations (f/k/a STC.UNM) (The University of New Mexico)
• Original Assignee: UNM Rainforest Innovations (f/k/a STC.UNM) (The University of New Mexico)
• Inventors: Brueck, Steven R. J., Kuznetsova, Yuliya, Neumann, Alexander
• Primary Examiner(s): Wilczewski, Mary
• Application Number:
  US14/868,128
• Time in Patent Office: 1,065 Days
• CPC Class Codes: B81C 1/00071 Channels
• CPC Class Codes: B81C 2201/0159 Lithographic techniques not provided for in B81C2201/0157
• CPC Class Codes: C12Q 1/6869 Methods for sequencing
• CPC Class Codes: C12Q 2565/631 being a biochannel or pore
• CPC Class Codes: G01N 27/447 using electrophoresis
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68
• CPC Class Codes: G03F 7/2051 Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source G03F7/70 takes precedence

Abstract

In accordance with the disclosure, a method of forming a nanochannel is provided. The method includes depositing a photosensitive film stack over a substrate; forming a pattern on the film stack using interferometric lithography; depositing a plurality of silica nanoparticles to form a structure over the pattern; removing the pattern while retaining the structure formed by the plurality of silica nanoparticles, wherein the structure comprises one or more enclosed nanochannels, wherein each of the one or more nanochannels comprise one or more sidewalls and a roof; and partially sealing the roof of one or more nanochannels, wherein the roof comprises no more than one unsealed nanochannel per squared micron.

Claims

1. A method for a manipulating a target molecule comprising:

providing at least one nanochannel having a partially sealed porous roof comprising a plurality of exposed unsealed pores and a plurality of tortuous nanopores;

introducing a sample comprising the target molecule to the nanochannel; and

allowing the target molecule to travel through the tortuous nanopores in the partially sealed porous roof before or after the target molecule travels through the nanochannel,

wherein the sample is introduced to the at least one nanochannel by placing the sample on the roof, thus forcing the target molecule to travel through the tortuous nanopores prior to traveling through the nanochannel.

2. The method of claim 1, wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores to reduce the translocation speed of the target molecule.

3. The method of claim 1, wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores in the partially sealed porous roof such that they are spread out to a density of less than 1/μ

m².

4. The method of claim 1, further comprising applying a potential along the at least one nanochannel to control transport of the target molecule within the at least one nanochannel.

5. The method of claim 1, further comprising applying a potential above the roof of the at least one nanochannel to move the target molecule from the region above the nanochannel through the roof.

6. The method of claim 5, further comprising adjusting the field strength of the electric field.

7. The method of claim 5, further comprising adjusting the length of time the electric field is applied.

8. The method of claim 1, wherein a variety of potentials is applied to impact the motion of the target molecule within the at least one nanochannel, through the tortuous pores of the roof, and in a region on the roof of the at least one nanochannel.

9. The method of claim 1, wherein the at least one nanochannel comprises top and bottom layers of nanochannels, and further comprising applying an electric field between the top and bottom layers of nanochannels to drive molecules across the porous roof.

10. The method of claim 1, wherein the target molecule comprises a long-chain molecule.

11. The method of claim 1, wherein the target molecule is a biological molecule.

12. The method of claim 1, wherein the target molecule comprises DNA.

13. The method of claim 1, wherein the target molecule comprises RNA.

14. The method of claim 1, wherein the target molecule comprises a protein.

15. A method for a manipulating a target molecule comprising:

providing at least one nanochannel having a partially sealed porous roof comprising a plurality of exposed unsealed pores and a plurality of tortuous nanopores;

introducing a sample comprising the target molecule to the nanochannel; and

allowing the target molecule to travel through the tortuous nanopores in the partially sealed porous roof before or after the target molecule travels through the nanochannel,

wherein the target molecule exits the at least one nanochannel through the roof, thus forcing the target molecule to travel through the tortuous nanopores after traveling through the nanochannel.

16. The method of claim 15, further comprising applying a potential across the roof of the at least one nanochannel to control translocation of the target molecule through the tortuous nanopores of the roof from an interior of the nanochannel to a region above the roof.

17. The method of claim 15, wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores to reduce the translocation speed of the target molecule.

18. The method of claim 15, wherein the providing of the at least one nanochannel comprises arranging the tortuous nanopores in the partially sealed porous roof such that they are spread out to a density of less than 1/μ

m².

19. The method of claim 15, wherein the target molecule comprises a long-chain molecule.

20. The method of claim 15, wherein the target molecule is a biological molecule.