Pedestal with multi-zone temperature control and multiple purge capabilities

• US 10,062,587 B2
• Filed: 01/15/2016
• Issued: 08/28/2018
• Est. Priority Date: 07/18/2012
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Chen, Xinglong, Yang, Jang-Gyoo, Tam, Alexander, Tam, Elisha
• Primary Examiner(s): Bryant, David
• Assistant Examiner(s): Deonauth, Nirvana
• Application Number:
  US14/996,621
• Publication Number:
  US 20160126118A1
• Time in Patent Office: 956 Days
• CPC Class Codes: F28D 15/00 Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies F28D17/00, F28D19/00, F28D20/00 take precedence
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/67109 mainly by convection

Abstract

Substrate support assemblies for a semiconductor processing apparatus are described. The assemblies may include a pedestal and a stem coupled with the pedestal. The pedestal may be configured to provide multiple regions having independently controlled temperatures. Each region may include a fluid channel to provide a substantially uniform temperature control within the region, by circulating a temperature controlled fluid that is received from and delivered to internal channels in the stem. The fluid channels may include multiple portions configured in a parallel-reverse flow arrangement. The pedestal may also include fluid purge channels that may be configured to provide thermal isolation between the regions of the pedestal.

Claims

1. A substrate support assembly comprising:

a pedestal having a substrate support surface;

a stem coupled with the pedestal opposite the substrate support surface, the stem including a pair of stem internal channels configured to deliver and receive a temperature controlled fluid to the pedestal;

a fluid channel defined within a central region of the pedestal, the fluid channel coupled at an inlet section with, and configured to receive the temperature controlled fluid from, one of the pair of stem internal channels, coupled at an outlet section with, and configured to direct the temperature controlled fluid to, the other of the pair of stem internal channels, and including a first channel portion and a second channel portion between the inlet and the outlet sections, wherein the second channel portion is disposed vertically from and coupled in a parallel-reverse pattern with the first channel portion, and wherein the first and second channel portions are configured such that fluid received at the inlet section is directed through the first channel portion prior to flowing through the second channel portion and through the outlet section.

2. The substrate support assembly of claim 1, wherein the fluid channel is arranged in a coil pattern configured to direct the temperature controlled fluid from the inlet section radially outward through the pedestal.

3. The substrate support assembly of claim 1, wherein the stem comprises a heating means separate from the stem internal channels, and operable to maintain the stem at a temperature different from the pedestal.

4. The substrate support assembly of claim 1, wherein the first and second portions of the fluid channel are disposed vertically from each other in direct vertical alignment.

5. The substrate support assembly of claim 1, further comprising a purge channel having a distally located outwardly closed cavity, wherein the purge channel is defined within the pedestal at least partially below the fluid channel, and configured to receive a pressurized fluid from a stem purge channel that is contained within the purge channel to create a fluid barrier within the pedestal throughout the purge channel.

6. The substrate support assembly of claim 1, wherein the pedestal comprises a plurality of plates coupled with one another to form the pedestal.

7. A substrate support assembly comprising:

a pedestal having a substrate support surface;

a stem coupled with the pedestal opposite the substrate support surface, the stem including a pair of stem internal channels configured to deliver and receive a temperature controlled fluid to the pedestal;

a fluid channel defined within a central region of the pedestal, the fluid channel including a first channel portion and a second channel portion, wherein the second channel portion is disposed vertically from the first channel portion, and wherein the first and second channel portions are configured such that fluid is directed through the first channel portion prior to flowing through the second channel portion.

8. The substrate support assembly of claim 7, wherein the fluid channel is arranged in a coil pattern configured to direct the temperature controlled fluid radially outward through the pedestal via the first channel portion.

9. The substrate support assembly of claim 7, wherein the stem comprises a heater separate from the stem internal channels, wherein the heater is operable to maintain the stem at a temperature different from the pedestal.

10. The substrate support assembly of claim 7, wherein the first and second channel portions of the fluid channel are disposed vertically from each other in direct vertical alignment.

11. The substrate support assembly of claim 7, further comprising a purge channel having a distally located and outwardly closed cavity, wherein the purge channel is defined within the pedestal at least partially below the fluid channel, and configured to receive a pressurized fluid from a stem purge channel that is contained within the purge channel to create a fluid barrier within the pedestal throughout the purge channel.

12. The substrate support assembly of claim 7, wherein the pedestal comprises a plurality of plates coupled with one another to form the pedestal.

13. A substrate support assembly comprising:

a pedestal having a substrate support surface;

a stem coupled with the pedestal opposite the substrate support surface, the stem including a pair of stem internal channels configured to deliver and receive a temperature controlled fluid to the pedestal;

a fluid channel defined within a central region of the pedestal, the fluid channel including a first channel portion and a second channel portion, wherein the second channel portion is disposed vertically from the first channel portion; and

a purge channel having a distally located and outwardly closed cavity defined within the pedestal, wherein the purge channel is defined within the pedestal at least partially below the fluid channel and configured to receive a fluid from a stem purge channel.

14. The substrate support assembly of claim 13, wherein the purge channel is configured to contain the fluid to create a barrier within the pedestal throughout the purge channel.

15. The substrate support assembly of claim 13, wherein the fluid channel is arranged in a coil pattern configured to direct the temperature controlled fluid radially outward through the pedestal via the first channel portion.

16. The substrate support assembly of claim 13, wherein the stem comprises a heater separate from the stem internal channels, wherein the heater is operable to maintain the stem at a temperature different from the pedestal.

17. The substrate support assembly of claim 13, wherein the first channel portion and second channel portion of the fluid channel are disposed vertically from each other in direct vertical alignment.

18. The substrate support assembly of claim 13, wherein the pedestal comprises a plurality of plates coupled with one another to form the pedestal.