Devices and methods for fully depleted silicon-on-insulator back biasing

• US 10,062,713 B1
• Filed: 09/08/2017
• Issued: 08/28/2018
• Est. Priority Date: 09/08/2017
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Smith, Bradley Paul
• Primary Examiner(s): Gumedzoe, Peniel M
• Assistant Examiner(s): Johnson, Christopher
• Application Number:
  US15/698,679
• Time in Patent Office: 354 Days
• CPC Class Codes: H01L 21/74 Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
• CPC Class Codes: H01L 21/84 the substrate being other than a semiconductor body, e.g. being an insulating body
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H01L 29/1083 with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current
• CPC Class Codes: H01L 29/66537 using a self aligned punch through stopper or threshold implant under the gate region H01L29/66606 takes precedence
• CPC Class Codes: H01L 29/7838 without inversion channel, e.g. buried channel lateral MISFETs, normally-on lateral MISFETs, depletion-mode lateral MISFETs
• CPC Class Codes: H01L 29/78606 with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device H01L29/78642, H01L29/78645 take precedence

Abstract

An integrated circuit includes a first device having a first threshold voltage (Vt) adjusting implant extension region having a first conductivity type and extending from a first implant rail region under an entirety of a first channel region. The first implant rail region and first Vt adjusting implant extension region are contiguous, and the first channel region is over an insulating layer and the insulating layer is over the first implant rail region and first Vt adjusting implant extension region. A second device has a second Vt adjusting implant extension region having the first conductivity type and extending from a second implant rail region under an entirety of a second channel region. The second implant rail region and second Vt adjusting implant extension region are contiguous, and the second channel region is over the insulating layer and the insulating layer is over the second implant rail region and second Vt adjusting implant extension region.

Claims

1. An integrated circuit, comprising:

a first well of a first conductivity type formed in a substrate;

a second well of a second conductivity type, opposite the first conductivity type, formed in the substrate, immediately adjacent the first well;

an insulating layer over the first well and the second well;

a first device having;

a first gate over a first channel region having the first conductivity type and formed over the second well,

a first implant rail region formed in the second well extending across the first device and having the first conductivity type, and

a first threshold voltage (Vt) adjusting implant extension region having the first conductivity type and extending from the first implant rail region under an entirety of the first channel region, wherein the first implant rail region and first Vt adjusting implant extension region are contiguous, and the first channel region is over the insulating layer and the insulating layer is over the first implant rail region and first Vt adjusting implant extension region;

a second device having;

a second gate over a second channel region having the first conductivity type and formed over the second well,

a second implant rail region formed in the second well extending across the second device and having the first conductivity type, and

a second threshold voltage (Vt) adjusting implant extension region having the first conductivity type and extending from the second implant rail region under an entirety of the second channel region, wherein the second implant rail region and second Vt adjusting implant extension region are contiguous, and the second channel region is over the insulating layer and the insulating layer is over the second implant rail region and second Vt adjusting implant extension region;

wherein the first and second implant rail regions are contiguous and correspond to portions of a same implant rail of the integrated circuit.

2. The integrated circuit of claim 1, wherein the first and second Vt adjusting implant extension regions are configured to receive a same potential as the same implant rail.

3. The integrated circuit of claim 1, wherein the first and second implant regions and first and second Vt adjusting implant regions extend a distance in a range of 0.1 um to 1 um from the insulating layer into the second well.

4. The integrated circuit of claim 1, wherein the first implant rail region is located along a border of the first device and the second implant region is located along a border of the second device.

5. The integrated circuit of claim 4, further comprising:

a third device having;

a third gate over a third channel region having the first conductivity type and formed over the second well,

a third implant rail region formed in the second well extending across a border of the third device, contiguous to the first implant region, and having the first conductivity type, and

wherein the second well is directly under a portion of the insulating layer that is directly under an entirety of the third channel region.

6. The integrated circuit of claim 5, wherein a region of the second well that is directly under the entirety of the third channel region is devoid of implant regions having the first conductivity type.

7. The integrated circuit of claim 5, wherein the first device and the third device are immediately adjacent devices.

8. The integrated circuit of claim 7, wherein the first device is characterized as a low threshold voltage device due to the first adjusting implant extension region and the third device is characterized as a regular threshold voltage device which has a higher threshold voltage than the first device.

9. The integrated circuit of claim 4, further comprising:

a third device having;

a third gate over a third channel region having the second conductivity type and formed over the first well,

a third implant rail region formed in the first well extending across the third device and having the second conductivity type, and

a third threshold voltage (Vt) adjusting implant extension region having the second conductivity type and extending from the third implant rail region under an entirety of the third channel region, wherein the third implant rail region and third Vt adjusting implant extension region are contiguous, and the third channel region is over the insulating layer and the insulating layer is over the third implant rail region and third Vt adjusting implant extension region.

10. The integrated circuit of claim 9, wherein third implant rail region is isolated from the first and second implant rail regions and correspond to a portion of a second implant rail of the integrated circuit.

11. The integrated circuit of claim 9, wherein the first and third devices are immediately adjacent devices and the first well and second well between the first and third devices are immediately adjacent.

12. The integrated circuit of claim 9, wherein the first implant rail is located along a first border of the first device and the third implant rail is located along a first border of the third device, wherein the first gate and the third gate are between the first borders of the first and third device.

13. The integrated circuit of claim 9, wherein the first gate and the third gate are portions of a continuous conductive gate structure.

14. An integrated circuit, comprising:

a first well of a first conductivity type formed in a substrate;

a second well of a second conductivity type, opposite the first conductivity type, formed in the substrate, immediately adjacent the first well;

an insulating layer over the first well and the second well;

a first device having;

a first gate over a first channel region having the first conductivity type and formed over the second well,

a first implant rail region formed in the second well extending across the first device and having the first conductivity type, and

a first threshold voltage (Vt) adjusting implant extension region having the first conductivity type and extending from the first implant rail region under an entirety of the first channel region, wherein the first implant rail region and first Vt adjusting implant extension region are contiguous, and the first channel region is over the insulating layer and the insulating layer is over the first implant rail region and first Vt adjusting implant extension region;

a second device having;

a second gate over a second channel region having the second conductivity type and formed over the first well,

a second implant rail region formed in the first well extending across the second device and having the second conductivity type, and

a second threshold voltage (Vt) adjusting implant extension region having the second conductivity type and extending from the second implant rail region under an entirety of the second channel region, wherein the second implant rail region and second Vt adjusting implant extension region are contiguous, and the second channel region is over the insulating layer and the insulating layer is over the second implant rail region and second Vt adjusting implant extension region;

wherein the first and second devices are immediately adjacent devices and the first well and the second well between the first and second devices are immediately adjacent.

15. The integrated circuit of claim 14, wherein first implant rail region is isolated from the second implant rail regions, and the first implant rail region corresponds to a portion of a first implant rail of the integrated circuit and the second implant rail region corresponds to a portion of a second implant rail of the integrated circuit.

16. The integrated circuit of claim 15, further comprising:

a first set of immediately adjacent devices each having a threshold voltage adjusting implant region extending under an entirety of a corresponding channel region contiguous with the first rail; and

a second set of immediately adjacent devices each having a threshold voltage adjusting implant region extending under an entirety of a corresponding channel region contiguous with the second rail.

17. The integrated circuit of claim 14, wherein the first implant rail region is located along a first border of the first device and the second implant rail region is located along a second border of the second device, wherein the first gate and the second gate are between the first borders of the first and second device.

18. An integrated circuit, comprising:

a first well of a first conductivity type formed in a substrate;

a second well of a second conductivity type, opposite the first conductivity type, formed in the substrate, immediately adjacent the first well;

an insulating layer over the first well and the second well;

a first device characterized as a low threshold voltage device, wherein the first device includes;

a first gate over a first channel region having the first conductivity type and formed over the second well,

a first implant rail region formed in the second well extending across a first border of the first device and having the first conductivity type, and

a first threshold voltage (Vt) adjusting implant extension region having the first conductivity type and extending from the first implant rail region under an entirety of the first channel region, wherein the first implant rail region and first Vt adjusting implant extension region are contiguous, and the first channel region is over the insulating layer and the insulating layer is over the first implant rail region and first Vt adjusting implant extension region;

a second device immediately adjacent a first side of the first device, wherein the second device is characterized as a regular threshold voltage device, wherein the first device has a lower threshold voltage than the second device, and the second device comprises;

a second gate over a second channel region having the first conductivity type and formed over the second well,

a second implant rail region formed in the second well extending across a first border of the second device and having the first conductivity type, wherein a region of the second well that is directly under the entirety of the second channel region is devoid of implant regions having the first conductivity type, and the second implant rail region is electrically isolated from the second gate and the second channel region,

wherein the first and second implant rail regions are contiguous and correspond to portions of a first implant rail of the integrated circuit.

19. The device of claim 18, further comprising:

a first set of devices immediately adjacent to a second side of the first device, opposite the first side, wherein each device of the first set of devices has;

a corresponding implant rail region of the first implant rail of the integrated circuit, and

a corresponding threshold voltage adjusting implant region extending under an entirety of a corresponding channel region and contiguous with the first implant rail of the integrated circuit.

20. The device of claim 19, further comprising:

a third device immediately adjacent to a third side of the first device, between the first and second sides, and having;

a third gate over a third channel region having the second conductivity type and formed over the first well,

a third implant rail region formed in the first well extending across the third device and having the second conductivity type, and

a third threshold voltage (Vt) adjusting implant extension region having the second conductivity type and extending from the third implant rail region under an entirety of the third channel region, wherein the third implant rail region and third Vt adjusting implant extension region are contiguous, and the third channel region is over the insulating layer and the insulating layer is over the third implant rail region and third Vt adjusting implant extension region,

wherein the first well and second well between the first and third devices are immediately adjacent, and

wherein the third implant rail region is isolated from the first and second implant rail regions and corresponds to a portion of a second implant rail of the integrated circuit.