Calibration structure and calibration method for calibrating optical measuring devices

• US 10,067,028 B2
• Filed: 09/17/2017
• Issued: 09/04/2018
• Est. Priority Date: 09/23/2016
• Status: Active Grant

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Inventors: Haverkamp, Nils, Seitz, Dominik
• Primary Examiner(s): Sherali, Ishrat I
• Application Number:
  US15/706,723
• Publication Number:
  US 20180088001A1
• Time in Patent Office: 352 Days
• Field of Search: 382199, 382203, 348135, 348136, 348140
• CPC Class Codes: G01B 21/042 Calibration or calibration artifacts G01B3/30, G01B9/02072 take precedence
• CPC Class Codes: G01M 11/00 Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
• CPC Class Codes: G01M 11/0207 Details of measuring devices
• CPC Class Codes: G01M 11/0264 by using targets or reference patterns
• CPC Class Codes: G01M 11/0285 by measuring material or chromatic transmission properties G01M11/0292 takes precedence
• CPC Class Codes: G01N 21/8806 Specially adapted optical and illumination features
• CPC Class Codes: G01N 21/93 Detection standards; Calibrating baseline adjustment, drift correction

Abstract

A calibration structure for calibrating optical measuring devices is provided. The calibration structure includes a plurality of zones adjoining one another in a plane, wherein the zones adjoin one another along straight lines and/or curved lines and the calibration structure has both zones adjoining one another along straight lines and zones adjoining one another along curved lines, wherein the zones adjoining one another along straight lines or the zones adjoining one another along curved lines have respectively mutually different optical properties. Furthermore, a calibration method for calibrating the optical measuring devices by the calibration structure is provided.

Claims

1. A calibration structure for calibrating an optical edge profile measuring device, the optical edge profile measuring device comprising:

a workpiece table;

a camera having an imaging optical unit and being arranged at a distance from the workpiece table;

an illumination unit configured to illuminate the calibration structure; and

a processor configured to evaluate edge positions of the calibration structure, the calibration structure comprising;

a plurality of zones adjoining one another in a plane and along at least one of straight lines and curved lines;

the plurality of zones including first zones adjoining one another along the straight lines and second zones adjoining one another along the curved lines;

the first zones adjoining one another along the straight lines or the second zones adjoining one another along the curved lines having respectively mutually different optical properties;

points at which the zones adjoin one another and which are distinguished as intersection points of the straight lines and the curved lines; and

at least one region with a regular sequence of the zones and the straight and curved lines which results in a regular arrangement of the points within the at least one region,

wherein the regular arrangement is given by a regular shortest distance with the length L of the points with respect to one another,

wherein the straight lines and the curved lines in a form of circle arcs begin at a point and end at a neighboring point relative to the point, and

wherein a length of all lines beginning or ending at the point is greater than 4*L.

2. The calibration structure as claimed in claim 1, wherein the respectively mutually different optical properties are complementary optical properties of a zone and a respective other zone.

3. The calibration structure as claimed in claim 1, wherein the optical properties comprise at least one of transmissivity, reflectivity and polarization capability.

4. The calibration structure as claimed in claim 1, further comprising:

a plate-shaped substrate material,

wherein optical properties of a subset of the zones result from a coating of the plate-shaped substrate material.

5. The calibration structure as claimed in claim 4, wherein the plate-shaped substrate material is a plate-shaped glass carrier and the coating is a chromium coating.

6. The calibration structure as claimed in claim 4, wherein the plate-shaped substrate material is a plate-shaped glass carrier and the coating defines a bandpass filter which transmits more illumination light having a wavelength of less than 500 nm at a vertical incidence angle than illumination light having a wavelength of more than 600 nm.

7. The calibration structure as claimed in claim 4, wherein the plate-shaped substrate material is a plate-shaped glass carrier and the coating defines a bandpass filter, which transmits less illumination light having a wavelength of less than 500 nm at a vertical incidence angle than illumination light having a wavelength of more than 600 nm.

8. The calibration structure as claimed in claim 4, wherein the plate-shaped substrate material is a plate-shaped glass carrier and the coating defines a polarization filter.

9. The calibration structure as claimed in claim 1, wherein the respectively mutually different optical properties are given only for a specific wavelength in a range of between 400 nm and 700 nm and the respectively mutually different optical properties have other optical properties at a different wavelength of the range to permit a ratio of the optical properties at the different wavelength to be reversed in comparison with a ratio of the optical properties at the specific wavelength.

10. The calibration structure as claimed in claim 1, further comprising:

points at which the zones adjoin one another and which are distinguished as intersection points of the straight lines and the curved lines; and

at least one region with a regular sequence of the zones and the straight and curved lines which results in a regular arrangement of the points within the at least one region,

wherein the regular arrangement is given by a regular shortest distance with the length L of the points with respect to one another,

wherein the straight lines and the curved lines in a form of circle arcs begin at a point and end at a neighboring point relative to the point, and

wherein a length of all lines beginning or ending at the point is greater than 9*L.

11. The calibration structure as claimed in claim 1, further comprising:

at least one further region with at least one further zone,

wherein the at least one further region is a region without a sequence of the zones and the straight and curved lines.

12. The calibration structure as claimed in claim 1, further comprising:

at least one further region with at least one further zone,

wherein the at least one further region has a sequence of the zones and the straight and curved lines that is different from the regular sequence of the at least one region with the regular sequence of the zones and the straight and curved lines.

13. A calibration method for calibrating the optical edge profile measuring device by the calibration structure as claimed in claim 1, the method comprising:

positioning the calibration structure within a measurement range of the optical edge profile measuring device;

illuminating the calibration structure by at least one of a reflected-light illumination and a transmitted-light illumination;

recording of the calibration structure by a sensor chip of the optical edge profile measuring device;

evaluating the recording regarding the edge positions of the calibration structure within the recording;

calculating correction values based on an ascertained edge position; and

storing the correction values in a correction file.

14. The calibration method as claimed in claim 13, further comprising:

carrying out the illuminating of the calibration structure, the recording, the evaluating of the recording and the calculating of the correction values for at least one of two different illuminations and two different illumination wavelengths; and

carrying out the calculating of the correction values based on a difference between two recordings of the calibration structure with the at least one of the two different illuminations and the two different illumination wavelengths.

15. The calibration method as claimed in claim 14, wherein one of the two illuminations is the reflected-light illumination and the other one of the two illuminations is the transmitted-light illumination.

16. The calibration method as claimed in claim 15, further comprising:

setting a specific degree of polarization of illumination light for one of the two illuminations which differs from a degree of the polarization of the illumination light set for the other one of the two illuminations.

17. The calibration method as claimed in claim 14, wherein one of the two different illumination wavelengths for recording the calibration structure is less than 500 nm, and wherein the other of the two different illumination wavelengths for recording the calibration structure is greater than 600 nm.