Optical sensor, optical inspection device, and optical property detection method for detecting light propagated inside a test object
First Claim
1. An optical sensor comprising:
- an irradiation system including at least one light irradiator, the at least one irradiator includinga surface emitting laser array having a plurality of light-emitting units, anda lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other; and
a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object, whereinthe plurality of light-emitting units of the surface emitting laser array include a first light-emitting unit furthest from an optical axis of the lens and a second light-emitting unit second furthest from the optical axis of the lens,the first light-emitting unit and the second light-emitting unit are not parallel with each other,a light exit direction of the first light-emitting unit has a larger tilt angle with respect to an optical axis of the lens than a light exit direction of the second light-emitting unit,each one of the plurality of light-emitting units includes an approximately ring-shaped dielectric at a light exit area, anda center point of the dielectric of at least one of the at least two of the plurality of light-emitting units is displaced from the center point of the light exit area.
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Accused Products
Abstract
An optical sensor including an irradiation system including at least one light irradiator, the at least one irradiator including a surface emitting laser array having a plurality of light-emitting units, and a lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other. The optical sensor also including a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object.
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Citations
14 Claims
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1. An optical sensor comprising:
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an irradiation system including at least one light irradiator, the at least one irradiator including a surface emitting laser array having a plurality of light-emitting units, and a lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other; and a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object, wherein the plurality of light-emitting units of the surface emitting laser array include a first light-emitting unit furthest from an optical axis of the lens and a second light-emitting unit second furthest from the optical axis of the lens, the first light-emitting unit and the second light-emitting unit are not parallel with each other, a light exit direction of the first light-emitting unit has a larger tilt angle with respect to an optical axis of the lens than a light exit direction of the second light-emitting unit, each one of the plurality of light-emitting units includes an approximately ring-shaped dielectric at a light exit area, and a center point of the dielectric of at least one of the at least two of the plurality of light-emitting units is displaced from the center point of the light exit area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of detecting an optical property with an optical sensor, the optical sensor including an irradiation system including at least one light irradiator, the at least one irradiator including a surface emitting laser array having a plurality of light-emitting units, and a lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other, and a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object, the method comprising:
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detecting an optical property of the test object using the optical sensor; calculating a sensitivity distribution of light on the test object; and calculating an optical property of the test object through solving an inverse problem based on the sensitivity distribution, the plurality of light-emitting units of the surface emitting laser array including a first light-emitting unit furthest from an optical axis of the lens and a second light-emitting unit second furthest from the optical axis of the lens, the first light-emitting unit and the second light-emitting unit not being parallel with each other, a light exit direction of the first light-emitting unit having a larger tilt angle with respect to an optical axis of the lens than a light exit direction of the second light-emitting unit, each one of the plurality of light-emitting units including an approximately ring-shaped dielectric at a light exit area, and a center point of the dielectric of at least one of the at least two of the plurality of light-emitting units being displaced from the center point of the light exit area.
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Specification