Dispersing immersion liquid for high resolution imaging and lithography

• US 10,067,330 B2
• Filed: 06/07/2016
• Issued: 09/04/2018
• Est. Priority Date: 09/13/2007
• Status: Active Grant

• Current Assignee: Leica Microsystems Gmbh (Danaher Corporation)
• Original Assignee: GE Healthcare Bio-Sciences Corporation (General Electric Company)
• Inventors: Dougherty, William M., Goodwin, Paul C., Reese, Steven A., Stewart, David A.
• Primary Examiner(s): Chapel, Derek S
• Application Number:
  US15/175,667
• Publication Number:
  US 20160282597A1
• Time in Patent Office: 819 Days
• Field of Search: None
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18
• CPC Class Codes: G02B 21/02 Objectives
• CPC Class Codes: G02B 21/33 Immersion oils , or microscope systems or objectives for use with immersion fluids
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041

Abstract

Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered to a specimen substrate or specimen substrate cover by an immersion liquid printing apparatus. An immersion liquid reservoir provides immersion liquid to the printer by a precision pump. The printer delivers immersion liquid to the substrate or substrate cover in arrays of immersion liquid droplets of defined volumes and array patterns. The volumes and patterns of array droplets delivered to the substrate or substrate cover are optimized to maintain adequate immersion liquid between the substrate or substrate cover and an immersion objective while avoiding the formation of air bubbles in the immersion liquid and the accumulation of excess volumes of immersion liquid.

Claims

1. A device for preparing a substrate for immersion microscopy comprising:

an immersion fluid printer arranged to deposit a replenishment array of immersion fluid droplets onto a substrate surface prior to positioning the substrate in a microscopy instrument such that the deposited immersion fluid droplets replenish an immersion fluid volume at an objective lens during immersion microscopy.

2. The device of claim 1, wherein the immersion fluid printer is a multi-duct immersion-fluid-drop-array printer comprising:

a base;

a plurality of ducts having ends positioned as an array with respect to the base and the substrate surface, wherein each duct is arranged to deposit immersion fluid at the substrate surface, and

a metering pump configured to provide a specific volume of immersion fluid to each of the plurality of ducts in order to deposit the replenishment array of immersion fluid droplets onto the substrate surface.

3. The device of claim 1, wherein the immersion fluid printer is arranged to place immersion fluid droplets on the substrate surface in a direction of next movement of the objective lens during immersion microscopy.

4. The device of claim 1, wherein the immersion fluid printer comprises an ultrasonic nebulizer arranged to deposit immersion fluid onto the substrate surface.

5. An immersion fluid printer for preparing a substrate for immersion microscopy comprising:

a base; and

a plurality of ducts forming an array and arranged to deposit a replenishment array of immersion fluid droplets onto a substrate surface, wherein each duct is arranged to deposit immersion fluid at the substrate surface prior to positioning the substrate in a microscopy instrument.

6. The immersion fluid printer of claim 5, further comprising:

a pump configured to provide a specific volume of immersion fluid to each of the plurality of ducts in order to deposit the replenishment array of immersion fluid droplets onto the substrate surface.

7. The immersion fluid printer of claim 5, wherein the base is configured to support the substrate surface.

8. The immersion fluid printer of claim 5, wherein the base comprises a port configured to receive immersion fluid.

9. The immersion fluid printer of claim 5, wherein the immersion fluid is selected from the group consisting of water, glycerol, and oil.

10. The immersion fluid printer of claim 5, further comprising an ultrasonic nebulizer.

11. The immersion fluid printer of claim 5, further comprising a thermal printing element.

12. The immersion fluid printer of claim 5, further comprising a piezoelectric element.

13. The immersion fluid printer of claim 5, wherein the immersion fluid printer is configured to selectively deposit the replenishment array of immersion fluid droplets onto the substrate surface in order to optimize a scan area and a scan pattern of the immersion microscopy instrument.

14. The immersion fluid printer of claim 5, wherein the immersion fluid printer is configured to print the replenishment array of immersion fluid droplets in a staggered hash pattern.

15. The immersion fluid printer of claim 5, wherein the immersion fluid printer is configured to print the replenishment array of immersion fluid droplets onto the substrate surface in a direction of next movement of an objective lens during immersion microscopy.