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Array substrate of OLED display device and manufacturing method thereof

  • US 10,068,955 B2
  • Filed: 01/13/2017
  • Issued: 09/04/2018
  • Est. Priority Date: 12/30/2016
  • Status: Active Grant
First Claim
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1. A manufacturing method of an array substrate of an OLED display device, comprising steps of:

  • providing a substrate;

    using a first mask pattern to form a semiconductor pattern on the substrate, which includes active areas of a first thin film transistor and a second thin film transistor in each driving unit;

    based on the above pattern, using a second mask pattern to form an electro-conductive channel of the first thin film transistor and an electro-conductive channel of the second thin film transistor on the substrate; and

    using an ion-injection method to form a channel doping area, and form a source electrode doping area and a drain electrode doping area beside two sides of each of the channel doping areas;

    based on the above pattern, forming a pattern of an insulation layer;

    based on the above pattern, using a third mask pattern to form a pattern of a first metal layer, which includes a gate electrode of the first thin film transistor and a gate electrode of the second thin film transistor;

    based on the above pattern, forming a pattern of an interlayer; and

    using an fourth mask pattern to form a via which is in the first thin film transistor and passes through the insulation layer and the interlayer, and a via which is in the second thin film transistor and passes through the insulation layer and the interlayer;

    based on the above pattern, using a fifth mask pattern to form a pattern of a second metal layer, which includes a source electrode and a drain electrode of the first thin film transistor, a source electrode and a drain electrode of the second thin film transistor, and a data line and a pixel electrode; and

    based on the above pattern, forming a protecting layer, and etching to remove the protecting layer on the surface of the pixel electrode through a sixth mask pattern.

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