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Air pressure sensing system

  • US 10,072,999 B2
  • Filed: 08/11/2016
  • Issued: 09/11/2018
  • Est. Priority Date: 05/27/2016
  • Status: Active Grant
First Claim
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1. An air pressure sensing system, comprising a first sensing unit and a second sensing unit, wherein the first sensing unit comprises:

  • a substrate, having a cavity connected with an exterior environment;

    a diaphragm, movably and deformably disposed at the substrate and suspended in the cavity; and

    a supporting member, disposed between the substrate and the diaphragm, wherein an electrostatic force is provided between the substrate and the diaphragm to drive the diaphragm, such that a portion of the substrate, the supporting member and the diaphragm are contacted with each other and a closed space is formed in the cavity, the exterior environment and the closed space are divided by the diaphragm, and the diaphragm is deformed due to an air pressure difference between the exterior environment and the closed space.

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