Silicon-based MEMS devices including wells embedded with high density metal

• US 10,073,113 B2
• Filed: 04/24/2015
• Issued: 09/11/2018
• Est. Priority Date: 12/22/2014
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Zhang, Xin, Judy, Michael
• Primary Examiner(s): Enad, Christine
• Application Number:
  US14/695,421
• Publication Number:
  US 20160178656A1
• Time in Patent Office: 1,236 Days
• Field of Search: 257414
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 3/0059 Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: B81C 1/00261 Processes for packaging MEMS devices MEMS packages B81B7/0032, packaging of smart-MEMS B81C1/0023
• CPC Class Codes: B81C 2203/0109 Bonding an individual cap on the substrate
• CPC Class Codes: G01C 19/5769 Manufacturing; Mounting; Housings
• CPC Class Codes: G01P 15/0802 Details

Abstract

In one aspect, the disclosure is directed to a MEMS device. The MEMS device includes a silicon-based movable MEMS sensor element. The MEMS device also includes a plurality of wells formed into at least one surface of the movable MEMS sensor element. Each well is filled with at least one metal so as to increase the effective mass of the movable MEMS sensor element. The metal may be tungsten or tantalum, or an alloy with tungsten or tantalum.

Claims

1. A MEMS device comprising:

a silicon-based movable MEMS sensor element having a surface with a plurality of wells formed therein;

wherein the plurality of wells are filled with at least one metal and cover between 20% and 82% of the surface of the movable MEMS sensor element.

2. The MEMS device of claim 1, wherein the at least one metal includes tungsten or an alloy with tungsten.

3. The MEMS device of claim 1, wherein the at least one metal includes tantalum or an alloy with tantalum.

4. The MEMS device of claim 1, wherein the at least one metal is between about 20% and about 70% tungsten or tantalum or an alloy with tungsten or tantalum.

5. The MEMS device of claim 1, wherein the plurality of wells filled with at least one metal increase an effective mass of the movable MEMS sensor element between about 2.5×

and about 7.0×

.

6. The MEMS device of claim 1, wherein at least one well of the plurality of wells is shaped like a clover in a plane parallel to the surface.

7. The MEMS device of claim 6, wherein a length of an edge in the clover is about 6.4 μ

m and the wells are separated by about 2.0 μ

m.

8. The MEMS device of claim 1, wherein at least one well of the plurality of wells is shaped like a square in a plane parallel to the surface.

9. The MEMS device of claim 8, wherein each side in the square is between about 2.0 μ

m and about 10.0 μ

m and the wells are separated by about 2.0 μ

m.

10. The MEMS device of claim 1, wherein at least one well of the plurality of wells is shaped like a rectangle in a plane parallel to the surface.

11. The MEMS device of claim 10, wherein the rectangle has a length of about 20.0 μ

m, has a width of about 2.0 μ

m, and the wells are separated by about 6.0 μ

m.

12. The MEMS device of claim 1, wherein at least one well of the plurality of wells is shaped like a circle in a plane parallel to the surface.

13. The MEMS device of claim 12, wherein the circle has a diameter between about 2.0 μ

m and about 10.0 μ

m and the wells are separated by about 2.0 μ

m.

14. The MEMS device of claim 1, wherein at least one of:

the movable MEMS sensor element is a proof mass of a MEMS accelerometer;

or

the movable MEMS sensor element is a resonator mass of a MEMS gyroscope.

15. The MEMS device of claim 1, wherein at least one well of the plurality of wells extends completely through the MEMS sensor element.

16. The MEMS device of claim 15, wherein multiple wells of the plurality of wells extend completely through the MEMS sensor element.

17. The MEMS device of claim 15, wherein at least one well of the plurality of wells extends only partially through the MEMS sensor element.

18. The MEMS device of claim 1, wherein at least one well of the plurality of wells is partially filled with the at least one metal.

19. The MEMS device of claim 1, wherein at least one well of the plurality of wells is completely filled with the at least one metal.

20. A method of fabricating a MEMS device, the method comprising:

forming a silicon-based MEMS sensor element having a surface;

forming a plurality of wells in the surface of the MEMS sensor element, wherein the plurality of wells covers between 20% and 82% of the surface; and

filling the plurality of wells with at least one metal.

21. The method of claim 20, wherein the at least one metal includes tungsten or tantalum or an alloy with tungsten or tantalum.

22. The method of claim 20, wherein the wells are shaped like at least one of clovers, squares, rectangles, or circles.

23. The method of claim 20, wherein forming the plurality of wells comprises forming at least one well extending completely through the MEMS sensor element.

24. The method of claim 23, wherein forming the plurality of wells comprises forming a plurality of wells extending completely through the MEMS sensor element.

25. The method of claim 23, wherein forming the plurality of wells comprises forming at least one well extending only partially through the MEMS sensor element.

26. The method of claim 20, wherein filling the plurality of wells with at least one metal comprises partially filling at least one well of the plurality of wells with the at least one metal.

27. The method of claim 20, wherein filling the plurality of wells with at least one metal comprises completely filling at least one well of the plurality of wells with the at least one metal.

28. The method of claim 20, further comprising releasing the MEMS sensor element after filling the plurality of wells with at least one metal.