Physical quantity sensor, physical quantity sensor apparatus, electronic device, and mobile body

• US 10,073,114 B2
• Filed: 08/10/2015
• Issued: 09/11/2018
• Est. Priority Date: 08/15/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Tanaka, Satoru
• Primary Examiner(s): Chapman, Jr., John
• Application Number:
  US14/822,008
• Publication Number:
  US 20160047838A1
• Time in Patent Office: 1,128 Days
• Field of Search: 7351432
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A physical quantity sensor has a first structure which has a movable section that includes movable electrode fingers, a second structure which includes first fixed electrode fingers that are arranged to oppose the movable electrode fingers, a third structure which includes second fixed electrode fingers that are arranged to oppose the movable electrode fingers, and a first electrostatic capacity forming section that forms an electrostatic capacity between the first structure and the second structure.

Claims

1. A physical quantity sensor comprising:

a first structure which has a movable section that includes movable electrode fingers;

a second structure which includes first fixed electrode fingers that are arranged to oppose the movable electrode fingers;

a third structure which includes second fixed electrode fingers that are arranged to oppose the movable electrode fingers;

an electrostatic capacity forming section that forms a first electrostatic capacity between the first structure and the second structure; and

a first electrostatic capacity adjusting section that is configured to adjust the first electrostatic capacity,

wherein the first structure has a first support section which supports the movable section,

the first support section has a first extending section which extends from the first support section, the first extending section has a first leading end side surface, and the first leading end side surface is located directly adjacent to a first finder side surface of one of the first fixed electrode fingers, and

the first electrostatic capacity adjusting section is configured by the first leading end side surface and the finger side surface of the one of the first fixed electrode fingers.

2. The physical quantity sensor according to claim 1,

wherein the electrostatic capacity forming section forms a second electrostatic capacity between the first structure and the third structure, and a second electrostatic capacity adjusting section is configured to adjust the second electrostatic capacity,

wherein the first structure has a second support section that is different from the first support section, and the second support section supports the movable section,

the second support section has a second extending section which extends from the second support section, the second extending section has a second leading end side surface, and the second leading end side surface is located directly adjacent to a second finger side surface of one of the second fixed electrode fingers,

the second electrostatic capacity adjusting section is configured by the second leading end side surface and the second finger side surface of the one of the second fixed electrode fingers, and

wherein a first area of the first leading end side surface is larger than a second area of the second leading end side surface, and a first electrostatic capacity value of the first electrostatic capacity forming section is larger than a second electrostatic capacity value of the second electrostatic capacity forming section.

3. A physical quantity sensor apparatus comprising:

the physical quantity sensor according to claim 2; and

an electronic component which is electrically connected to the physical quantity sensor.

4. An electronic device comprising:

a housing that houses the physical quantity sensor according to claim 2; and

a display that is assembled in the housing.

5. A mobile body comprising:

a housing that houses the physical quantity sensor according to claim 2; and

a display that is assembled in the housing.

6. A physical quantity sensor apparatus comprising:

the physical quantity sensor according to claim 1; and

an electronic component which is electrically connected to the physical quantity sensor.

7. An electronic device comprising:

a housing that houses the physical quantity sensor according to claim 1; and

a display that is assembled in the housing.

8. A mobile body comprising:

a housing that houses the physical quantity sensor according to claim 1; and

a display that is assembled in the housing.

9. A physical quantity sensor comprising:

a first structure which has a movable section that includes movable electrode fingers;

a second structure which includes first fixed electrode fingers that are arranged to oppose the movable electrode fingers;

a third structure which includes second fixed electrode fingers that are arranged to oppose the movable electrode fingers;

an electrostatic capacity forming section that forms a first electrostatic capacity between the first structure and the second structure; and

an electrostatic capacity adjusting section that is configured to adjust the first electrostatic capacity,

wherein the first structure has a support section which supports the movable section, the support section has an extending section which extends from the support section in a first direction,

wherein the second structure has a connecting section which connects the first fixed electrode fingers, a first part of the connecting section extends in the first direction, the first part of the connecting section is located directly adjacent to the extending section of the support section of the first structure so that a side surface of the first part of the connecting section directly faces a side surface of the extending section, and the first part is located opposite to the movable electrode fingers with respect to the support section, and

the electrostatic capacity adjusting section is configured by the side surface of the extending section and the side surface of the first part of the connecting section.

10. A physical quantity sensor apparatus comprising:

the physical quantity sensor according to claim 9; and

an electronic component which is electrically connected to the physical quantity sensor.

11. An electronic device comprising:

a housing that houses the physical quantity sensor according to claim 9; and

a display that is assembled in the housing.

12. A mobile body comprising:

a housing that houses the physical quantity sensor according to claim 9; and

a display that is assembled in the housing.

13. A physical quantity sensor comprising:

a first structure which has a movable section that includes movable electrode fingers;

a second structure which includes first fixed electrode fingers that are arranged to oppose the movable electrode fingers;

a third structure which includes second fixed electrode fingers that are arranged to oppose the movable electrode fingers; and

an electrostatic capacity forming section that forms a first electrostatic capacity between the first structure and the second structure,

wherein the first structure has a support section which supports the movable section, a wiring outwardly extend from the support section in a first direction, and the wiring is electrically connected to the movable section via the support section,

wherein the second structure has a connecting section which connects the first fixed electrode fingers, a first part of the connecting section extends in a second direction perpendicular to the first direction, the first part is located directly adjacent to the support section of the first structure, the first part is located opposite to the movable electrode fingers with respect to the support section, and

the electrostatic capacity forming section is configured by an overlapped section between the wiring and the first part of the connecting section.

14. A physical quantity sensor apparatus comprising:

the physical quantity sensor according to claim 13; and

an electronic component which is electrically connected to the physical quantity sensor.

15. An electronic device comprising:

a housing that houses the physical quantity sensor according to claim 13; and

a display that is assembled in the housing.

16. A mobile body comprising:

a housing that houses the physical quantity sensor according to claim 13; and

a display that is assembled in the housing.