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Three-dimensional waveguide sensors for sample analysis

  • US 10,073,188 B2
  • Filed: 10/02/2014
  • Issued: 09/11/2018
  • Est. Priority Date: 10/02/2014
  • Status: Active Grant
First Claim
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1. A sensor for measuring a characteristic of a substance, comprising:

  • a plurality of sensing channels positioned along an exposed surface of a substrate, each of the plurality of sensing channels comprising a plurality of waveguides embedded in the substrate, wherein a first group of sensing channels of the plurality of sensing channels share a first reference waveguide of the plurality of waveguides and a second group of sensing channels of the plurality of sensing channels share a second reference waveguide of the plurality of waveguides, the first reference waveguide being different from the second reference waveguide, the exposed surface comprising a portion of a side surface of at least one of the plurality of waveguides;

    a sensitized coating positioned on the exposed surface of the at least one of the plurality of waveguides along a longitudinal axis of the sensor; and

    a mask disposed on an end surface of the substrate that is orthogonal to the longitudinal axis of the sensor, the mask being in contact with transparent portions of the substrate and the plurality of waveguides.

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