Semiconductor device
First Claim
1. A semiconductor device including a trench-gate type field effect transistor configuring a power transistor in a transistor formation region on a main surface of a semiconductor substrate, comprising:
- a first trench formed in the transistor formation region of the semiconductor substrate;
a first electrode formed in a lower portion inside the first trench;
a gate electrode for the trench-gate type field effect transistor formed in an upper portion inside the first trench;
a first insulating film formed between the first electrode and a side wall and a bottom surface of the first trench;
a second insulating film formed between the gate electrode and the side wall of the first trench;
a third insulating film formed between the first electrode and the gate electrode;
a semiconductor region for a source of a first conductivity type formed in a region that is adjacent to the first trench in the semiconductor substrate, a semiconductor region for channel formation of a second conductivity type opposite to the first conductivity type positioned below the semiconductor region for a source, and a semiconductor region for a drain of the first conductivity type positioned below the semiconductor region for channel formation;
an interlayer insulating film formed on the main surface of the semiconductor substrate;
a wiring for a source formed on the interlayer insulating film and electrically connected to the semiconductor region for a source;
a wiring for a gate formed on the interlayer insulating film and electrically connected to the gate electrode; and
a first wiring formed on the interlayer insulating film and electrically connected to the first electrode,wherein the first wiring is not connected to the wiring for a source through a conductor, and is not connected to the wiring for a gate through a conductor,wherein the wiring for a source is arranged in the transistor formation region in plan view,wherein the first wiring is formed on the interlayer insulating film in a periphery of the transistor formation region in plan view,wherein the wiring for a gate is formed on the interlayer insulating film in a periphery of the transistor formation region in plan view, andwherein the wiring for a gate is arranged between the wiring for a source and the first wiring in plan view.
1 Assignment
0 Petitions
Accused Products
Abstract
A control electrode GE1 is formed in a lower portion of a trench TR1 formed in a semiconductor substrate SUB, and a gate electrode GE2 is formed in an upper portion inside the trench TR1. An insulating film G1 is formed between the control electrode GE1 and a side wall and a bottom surface of the trench TR1, an insulating film G2 is formed between the side wall of the trench TR1 and the gate electrode GE2, and an insulating film G3 is formed between the control electrode GE1 and the gate electrode GE2. A region adjacent to the trench TR1 includes an n+-type semiconductor region NR for a source, a p-type semiconductor region PR for a channel formation, and a semiconductor region for a drain. A wiring connected to the control electrode GE1 is not connected to a wiring connected to the gate electrode GE2, and is not connected to a wiring connected to the n+-type semiconductor region NR for a source.
11 Citations
10 Claims
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1. A semiconductor device including a trench-gate type field effect transistor configuring a power transistor in a transistor formation region on a main surface of a semiconductor substrate, comprising:
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a first trench formed in the transistor formation region of the semiconductor substrate; a first electrode formed in a lower portion inside the first trench; a gate electrode for the trench-gate type field effect transistor formed in an upper portion inside the first trench; a first insulating film formed between the first electrode and a side wall and a bottom surface of the first trench; a second insulating film formed between the gate electrode and the side wall of the first trench; a third insulating film formed between the first electrode and the gate electrode; a semiconductor region for a source of a first conductivity type formed in a region that is adjacent to the first trench in the semiconductor substrate, a semiconductor region for channel formation of a second conductivity type opposite to the first conductivity type positioned below the semiconductor region for a source, and a semiconductor region for a drain of the first conductivity type positioned below the semiconductor region for channel formation; an interlayer insulating film formed on the main surface of the semiconductor substrate; a wiring for a source formed on the interlayer insulating film and electrically connected to the semiconductor region for a source; a wiring for a gate formed on the interlayer insulating film and electrically connected to the gate electrode; and a first wiring formed on the interlayer insulating film and electrically connected to the first electrode, wherein the first wiring is not connected to the wiring for a source through a conductor, and is not connected to the wiring for a gate through a conductor, wherein the wiring for a source is arranged in the transistor formation region in plan view, wherein the first wiring is formed on the interlayer insulating film in a periphery of the transistor formation region in plan view, wherein the wiring for a gate is formed on the interlayer insulating film in a periphery of the transistor formation region in plan view, and wherein the wiring for a gate is arranged between the wiring for a source and the first wiring in plan view. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification