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MEMS automatic alignment high-and-low comb tooth and manufacturing method thereof

  • US 10,077,184 B2
  • Filed: 05/11/2015
  • Issued: 09/18/2018
  • Est. Priority Date: 10/30/2014
  • Status: Active Grant
First Claim
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1. MEMS self-aligning high/low comb teeth, comprising movable comb teeth, fixed comb teeth, and a lifting structure with one end fixed to a substrate and the other end connected to the movable comb teeth, wherein, the lifting structure comprises at least one bent beam section and at least one straight beam section, the bent beam and the straight beam together form at least one bent folded beam structure, the bent beam makes the folded beam structure displace in the vertical direction, and thereby drives the movable comb teeth connected to the lifting structure to displace out of the plane of the fixed comb teeth, forming high/low comb teeth, said lifting structure having a uniform and continuous first material layer and a non-continuous and sectional second material layer covering the first material layer, the straight beam including the first material layer solely, while the bent beam includes the first material layer and the covering second material layer.

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