Pressure sensing element including electrode having protrusion
First Claim
1. A pressure sensing element comprising:
- a first electrode including at least one protrusion;
a second electrode facing the at least one protrusion; and
a dielectric disposed between the first electrode and the second electrode, the dielectric including a first dielectric and a second dielectric, whereinthe first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode,the second dielectric is disposed between a protrusion-free portion of the first electrode and the first dielectric, the protrusion-free portion not including the at least one protrusion,the at least one protrusion has a higher elastic modulus than the first dielectric,the pressure sensing element has a capacitance including a first capacitance and a second capacitance,the first capacitance is a capacitance of a first capacitor including a contact area between the at least one protrusion and the first dielectric, andthe second capacitance is a capacitance of a second capacitor including a contact area between the first dielectric and the second dielectric.
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Accused Products
Abstract
A pressure sensing element according to one aspect of the present disclosure includes a first electrode including at least one protrusion, a second electrode facing the at least one protrusion, and a dielectric disposed between the first electrode and the second electrode. The dielectric includes a first dielectric and a second dielectric. The first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode. The second dielectric is disposed between a first portion of the first electrode and the first dielectric. The first portion does not include the at least one protrusion. The at least one protrusion has a higher elastic modulus than the first dielectric.
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Citations
12 Claims
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1. A pressure sensing element comprising:
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a first electrode including at least one protrusion; a second electrode facing the at least one protrusion; and a dielectric disposed between the first electrode and the second electrode, the dielectric including a first dielectric and a second dielectric, wherein the first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode, the second dielectric is disposed between a protrusion-free portion of the first electrode and the first dielectric, the protrusion-free portion not including the at least one protrusion, the at least one protrusion has a higher elastic modulus than the first dielectric, the pressure sensing element has a capacitance including a first capacitance and a second capacitance, the first capacitance is a capacitance of a first capacitor including a contact area between the at least one protrusion and the first dielectric, and the second capacitance is a capacitance of a second capacitor including a contact area between the first dielectric and the second dielectric. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification