Single mode vertical-cavity surface-emitting laser
First Claim
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1. A vertical-cavity surface-emitting laser (VCSEL) comprising:
- a first reflector having a first reflectivity;
a radially-dependent mesa layer above the first reflector having a central point aligned with a central axis;
one or more metallic layers above the radially-dependent mesa layer;
a second reflector having a second reflectivity, wherein the second reflectivity is less than the first reflectivity;
a light generation region between the first and second reflectors;
an oxide layer having an aperture with an aperture diameter in a central area of the oxide layer; and
a substrate having a first surface and a second surface, wherein the first surface is coupled to the second reflector, and wherein the second surface is formed into a lens shape to act upon light emitted by the VCSEL through the substrate,wherein the VCSEL lases in a single transverse mode,wherein the aperture in the oxide layer has a higher refractive index than the surrounding oxide layer;
the oxide layer is located at or near a null of a standing wave in the VCSEL; and
a center of the oxide layer is approximately aligned with the central axis of the first reflector, the light generation region, the second reflector, and the substrate,wherein the radially-dependent mesa layer comprises at least one of;
a dielectric material, a transparent conductive oxide, a transparent conductive nitride, or a polymer,wherein the radially-dependent mesa layer has a first thickness that is approximately a quarter of the VCSEL lasing wavelength within a first region having a first diameter around the central axis, and the radially-dependent mesa layer has a second thickness that is approximately half of the VCSEL lasing wavelength in a second region surrounding the first region,wherein the first reflector comprises multiple pairs of semiconductor layers forming a distributed Bragg reflector, andfurther wherein the first diameter of the first region is less than the aperture diameter.
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Abstract
A vertical-cavity surface-emitting laser (VCSEL) includes first reflector having a first reflectivity; a second reflector having a second reflectivity, where the second reflectivity is less than the first reflectivity; a gain region between the first and second reflectors; and a substrate having a first surface and a second surface, where the first surface is coupled to the second reflector, and where the second surface is formed into a lens to act upon light emitted the VCSEL through the substrate. The VCSEL lases in a single transverse mode.
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Citations
10 Claims
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1. A vertical-cavity surface-emitting laser (VCSEL) comprising:
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a first reflector having a first reflectivity; a radially-dependent mesa layer above the first reflector having a central point aligned with a central axis; one or more metallic layers above the radially-dependent mesa layer; a second reflector having a second reflectivity, wherein the second reflectivity is less than the first reflectivity; a light generation region between the first and second reflectors; an oxide layer having an aperture with an aperture diameter in a central area of the oxide layer; and a substrate having a first surface and a second surface, wherein the first surface is coupled to the second reflector, and wherein the second surface is formed into a lens shape to act upon light emitted by the VCSEL through the substrate, wherein the VCSEL lases in a single transverse mode, wherein the aperture in the oxide layer has a higher refractive index than the surrounding oxide layer;
the oxide layer is located at or near a null of a standing wave in the VCSEL; and
a center of the oxide layer is approximately aligned with the central axis of the first reflector, the light generation region, the second reflector, and the substrate,wherein the radially-dependent mesa layer comprises at least one of;
a dielectric material, a transparent conductive oxide, a transparent conductive nitride, or a polymer,wherein the radially-dependent mesa layer has a first thickness that is approximately a quarter of the VCSEL lasing wavelength within a first region having a first diameter around the central axis, and the radially-dependent mesa layer has a second thickness that is approximately half of the VCSEL lasing wavelength in a second region surrounding the first region, wherein the first reflector comprises multiple pairs of semiconductor layers forming a distributed Bragg reflector, and further wherein the first diameter of the first region is less than the aperture diameter. - View Dependent Claims (2, 3, 4)
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5. A method for fabricating a single transverse mode VCSEL comprising:
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depositing a ring-shaped electrically conductive material on a first reflector, wherein the first reflector is coupled to a light generation region, the light generation region is further coupled to a second reflector, and the second reflector is coupled to a first surface of a substrate; depositing a hard mask layer over the ring-shaped electrically conductive material; removing material from the first reflector and the light generation region to form a wide mesa beneath the hard mask layer; oxidizing a portion of a layer in the first reflector containing aluminum to create an oxide aperture; and depositing an ohmic contact layer on the second reflector surrounding the wide mesa, wherein an improvement comprises; removing the hard mask layer; depositing an oxide layer on the wide mesa; removing portions of the oxide layer to leave a remaining oxide layer within the ring-shaped electrically conductive material, wherein at least a portion of the remaining oxide layer has a thickness that is approximately a quarter of a wavelength, and further wherein the VCSEL lases in a single transverse mode at the wavelength; and depositing a metallic reflector layer on top of the quarter wavelength thickness of the remaining oxide layer, wherein the metallic reflector layer is anchored to the ring-shaped electrically conductive material. - View Dependent Claims (6, 7, 8, 9, 10)
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Specification